JPS56126752A - Inspecting device for defect of mask - Google Patents
Inspecting device for defect of maskInfo
- Publication number
- JPS56126752A JPS56126752A JP3074580A JP3074580A JPS56126752A JP S56126752 A JPS56126752 A JP S56126752A JP 3074580 A JP3074580 A JP 3074580A JP 3074580 A JP3074580 A JP 3074580A JP S56126752 A JPS56126752 A JP S56126752A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- electron
- inspected
- reflected
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/071—Investigating materials by wave or particle radiation secondary emission combination of measurements, at least 1 secondary emission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/102—Different kinds of radiation or particles beta or electrons
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/611—Specific applications or type of materials patterned objects; electronic devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/646—Specific applications or type of materials flaws, defects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3074580A JPS56126752A (en) | 1980-03-11 | 1980-03-11 | Inspecting device for defect of mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3074580A JPS56126752A (en) | 1980-03-11 | 1980-03-11 | Inspecting device for defect of mask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56126752A true JPS56126752A (en) | 1981-10-05 |
JPH0130082B2 JPH0130082B2 (ja) | 1989-06-16 |
Family
ID=12312208
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3074580A Granted JPS56126752A (en) | 1980-03-11 | 1980-03-11 | Inspecting device for defect of mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56126752A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05264464A (ja) * | 1992-12-04 | 1993-10-12 | Hitachi Ltd | 繰返しパターンの欠陥検査装置 |
JPH1019538A (ja) * | 1997-03-27 | 1998-01-23 | Hitachi Ltd | 電子ビーム欠陥検査方法および装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0652677U (ja) * | 1991-07-24 | 1994-07-19 | 弘 西中 | 洗面台および洗面台補助具 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5056283A (ja) * | 1973-09-14 | 1975-05-16 | ||
JPS5273788A (en) * | 1975-12-17 | 1977-06-21 | Hitachi Ltd | Silid analyzer capable of performing somultaneous counting |
-
1980
- 1980-03-11 JP JP3074580A patent/JPS56126752A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5056283A (ja) * | 1973-09-14 | 1975-05-16 | ||
JPS5273788A (en) * | 1975-12-17 | 1977-06-21 | Hitachi Ltd | Silid analyzer capable of performing somultaneous counting |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05264464A (ja) * | 1992-12-04 | 1993-10-12 | Hitachi Ltd | 繰返しパターンの欠陥検査装置 |
JPH1019538A (ja) * | 1997-03-27 | 1998-01-23 | Hitachi Ltd | 電子ビーム欠陥検査方法および装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0130082B2 (ja) | 1989-06-16 |
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