JPS5056283A - - Google Patents
Info
- Publication number
- JPS5056283A JPS5056283A JP48103248A JP10324873A JPS5056283A JP S5056283 A JPS5056283 A JP S5056283A JP 48103248 A JP48103248 A JP 48103248A JP 10324873 A JP10324873 A JP 10324873A JP S5056283 A JPS5056283 A JP S5056283A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48103248A JPS5056283A (ja) | 1973-09-14 | 1973-09-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP48103248A JPS5056283A (ja) | 1973-09-14 | 1973-09-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5056283A true JPS5056283A (ja) | 1975-05-16 |
Family
ID=14349127
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP48103248A Pending JPS5056283A (ja) | 1973-09-14 | 1973-09-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5056283A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5679241A (en) * | 1979-11-30 | 1981-06-29 | Mitsubishi Heavy Ind Ltd | Observation method by scanning electron microscope |
JPS56126752A (en) * | 1980-03-11 | 1981-10-05 | Nippon Telegr & Teleph Corp <Ntt> | Inspecting device for defect of mask |
JPS5947857U (ja) * | 1982-09-22 | 1984-03-30 | 日本電子株式会社 | 試料分析装置等用のガス導入試料装置 |
JP2014157772A (ja) * | 2013-02-18 | 2014-08-28 | Horon:Kk | 走査型電子顕微鏡および検査装置 |
JP2018092952A (ja) * | 2018-03-15 | 2018-06-14 | 株式会社ホロン | 走査型電子顕微鏡および検査装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS479356U (ja) * | 1971-03-02 | 1972-10-04 |
-
1973
- 1973-09-14 JP JP48103248A patent/JPS5056283A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS479356U (ja) * | 1971-03-02 | 1972-10-04 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5679241A (en) * | 1979-11-30 | 1981-06-29 | Mitsubishi Heavy Ind Ltd | Observation method by scanning electron microscope |
JPS56126752A (en) * | 1980-03-11 | 1981-10-05 | Nippon Telegr & Teleph Corp <Ntt> | Inspecting device for defect of mask |
JPH0130082B2 (ja) * | 1980-03-11 | 1989-06-16 | Nippon Telegraph & Telephone | |
JPS5947857U (ja) * | 1982-09-22 | 1984-03-30 | 日本電子株式会社 | 試料分析装置等用のガス導入試料装置 |
JP2014157772A (ja) * | 2013-02-18 | 2014-08-28 | Horon:Kk | 走査型電子顕微鏡および検査装置 |
JP2018092952A (ja) * | 2018-03-15 | 2018-06-14 | 株式会社ホロン | 走査型電子顕微鏡および検査装置 |