JPS5676151A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS5676151A
JPS5676151A JP15268279A JP15268279A JPS5676151A JP S5676151 A JPS5676151 A JP S5676151A JP 15268279 A JP15268279 A JP 15268279A JP 15268279 A JP15268279 A JP 15268279A JP S5676151 A JPS5676151 A JP S5676151A
Authority
JP
Japan
Prior art keywords
inspected
electron
electron microscope
scanning electron
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15268279A
Other languages
Japanese (ja)
Inventor
Katsukage Uehara
Yusaku Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP15268279A priority Critical patent/JPS5676151A/en
Publication of JPS5676151A publication Critical patent/JPS5676151A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Abstract

PURPOSE:To perform the inspection of defect and the appearance of large object to be inspected, by arranging a seat on the object to be inspected through a vacuum sealing means then performing the evacuation and irradiating an electron beam from an electron gun onto said object. CONSTITUTION:A seat 23 is arranged on an object 28 to be inspected through a vacuum sealing means 25, then a mirror body is evacuated through an evacuation port 12 such that an electron beam 3 can be radiated. Then an electron beam 3 is projected from an electron gun 2 onto said object 28 while the secondary electron reflected from the surface or a signal 10 of characteristic X-ray is detected by means of a secondary electron detector or a characteristic X-ray detector 11 to perform the inspection of defect and appearance of said object 28.
JP15268279A 1979-11-26 1979-11-26 Scanning electron microscope Pending JPS5676151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15268279A JPS5676151A (en) 1979-11-26 1979-11-26 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15268279A JPS5676151A (en) 1979-11-26 1979-11-26 Scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS5676151A true JPS5676151A (en) 1981-06-23

Family

ID=15545802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15268279A Pending JPS5676151A (en) 1979-11-26 1979-11-26 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5676151A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0057646A2 (en) * 1981-02-04 1982-08-11 Etablissement Public dit: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) Scanning electron microscope for use in situ
WO2016090398A1 (en) * 2014-12-10 2016-06-16 Verein Zur Förderung Der Elektronenmikroskopie Und Feinstrukturforschung Electron microscope and method for examining a sample using an electron microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0057646A2 (en) * 1981-02-04 1982-08-11 Etablissement Public dit: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) Scanning electron microscope for use in situ
WO1982002796A1 (en) * 1981-02-04 1982-08-19 Jouffrey Bernard In situ operating scanning electronic microscope assembly
WO2016090398A1 (en) * 2014-12-10 2016-06-16 Verein Zur Förderung Der Elektronenmikroskopie Und Feinstrukturforschung Electron microscope and method for examining a sample using an electron microscope

Similar Documents

Publication Publication Date Title
JPS5676151A (en) Scanning electron microscope
EP0299951A3 (en) Process and apparatus for mask inspection
JPS5676152A (en) Scanning electron microscope
JPS5258373A (en) Inspection for defects of pattern forming film
JPS5679241A (en) Observation method by scanning electron microscope
JPS5632656A (en) Scanning electron microscope device
EP0058137A3 (en) Apparatus for providing x-rays
JPS5632658A (en) Scanning type electron microscope
JPS5260686A (en) X-ray photoelectronic analysis
JPS56126752A (en) Inspecting device for defect of mask
JPS5666037A (en) X-ray mask
JPS5537719A (en) X-ray analyzer
JPS5418269A (en) Electron beam detector
GB1439146A (en) Recording of kossel lines
GB724350A (en) Improvements in or relating to the examination of materials by means of x-ray
FR2335036A1 (en) Generation of radiation pattern on specimen - converts beam from source into parallel beams displaying pattern of masker
JPS53129587A (en) Electron beam exposure unit
JPS5736763A (en) Scan electron microscope
JPS5582007A (en) Thickness measuring unit for plain bearing material using radiant ray
JPS6476659A (en) Electron beam microanalyzer
JPS56116259A (en) Transmissive electron microscope
JPS5614933A (en) Sample inspecting device
GB1025683A (en) Improvements in or relating to microanalyzers
JPS53113480A (en) Reflecting electron beam detector
JPS54138467A (en) Scanning type electron microscope or resembling apparatus