JPS5676152A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS5676152A
JPS5676152A JP15268379A JP15268379A JPS5676152A JP S5676152 A JPS5676152 A JP S5676152A JP 15268379 A JP15268379 A JP 15268379A JP 15268379 A JP15268379 A JP 15268379A JP S5676152 A JPS5676152 A JP S5676152A
Authority
JP
Japan
Prior art keywords
electron beam
electron microscope
scanning electron
inspected
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15268379A
Other languages
Japanese (ja)
Inventor
Katsukage Uehara
Yusaku Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP15268379A priority Critical patent/JPS5676152A/en
Publication of JPS5676152A publication Critical patent/JPS5676152A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To perform the inspection of defect and apperance of large object to be inspected, by locating a view moving base on said object then performing the evacuation and irradiating an electron beam on said object. CONSTITUTION:A view moving base 17 is located on a large object to be inspected, e.g. a cylindrical tube 21 through a vacuum seal means 20, then a mirror body is evacuated through an evacuation port 12 such that an electron beam 3 can be radiated. After reaching to predetermined vacuum, an electron beam 3 is projected from an electron gun 2 onto the surface of said object 21, then the signal of secondary electron beam or characteristic X-ray 10 is detected by means of a detector 11 to perform inspection of defect or appearance of said object 21.
JP15268379A 1979-11-26 1979-11-26 Scanning electron microscope Pending JPS5676152A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15268379A JPS5676152A (en) 1979-11-26 1979-11-26 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15268379A JPS5676152A (en) 1979-11-26 1979-11-26 Scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS5676152A true JPS5676152A (en) 1981-06-23

Family

ID=15545827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15268379A Pending JPS5676152A (en) 1979-11-26 1979-11-26 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5676152A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014157772A (en) * 2013-02-18 2014-08-28 Horon:Kk Scanning electron microscope and inspection apparatus
JP2014229551A (en) * 2013-05-24 2014-12-08 Toto株式会社 Reflection electron detector
JP2018092952A (en) * 2018-03-15 2018-06-14 株式会社ホロン Scanning electron microscope and inspection equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014157772A (en) * 2013-02-18 2014-08-28 Horon:Kk Scanning electron microscope and inspection apparatus
JP2014229551A (en) * 2013-05-24 2014-12-08 Toto株式会社 Reflection electron detector
JP2018092952A (en) * 2018-03-15 2018-06-14 株式会社ホロン Scanning electron microscope and inspection equipment

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