JPS5632656A - Scanning electron microscope device - Google Patents

Scanning electron microscope device

Info

Publication number
JPS5632656A
JPS5632656A JP10753779A JP10753779A JPS5632656A JP S5632656 A JPS5632656 A JP S5632656A JP 10753779 A JP10753779 A JP 10753779A JP 10753779 A JP10753779 A JP 10753779A JP S5632656 A JPS5632656 A JP S5632656A
Authority
JP
Japan
Prior art keywords
electron beam
sample
opening end
vacuum
characteristic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10753779A
Other languages
Japanese (ja)
Inventor
Katsukage Uehara
Yusaku Takano
Kazuo Hiromatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP10753779A priority Critical patent/JPS5632656A/en
Publication of JPS5632656A publication Critical patent/JPS5632656A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To perform a nondestructive inspection and observation on surfaces of a large structural body, by arranging a vacuum seal means in the opening end for passing an electron beam provided at the contact side of a sample to be checked in a mirror body frame. CONSTITUTION:At one side of a mirror body frame in which lens systems 4, 5, electron beam scanning coil 6 and astigmatic correction coil 7 are arranged, an opening end 15 is provided and arranged on a sample 17, in a dimension not capable to be inserted into the conventional sample chamber, through a vacuum seal means 16 consisiting of ring packing provided under the outside of the opening end. Then after a completion of evacuation through a vent 12, an electron beam is emitted from an electron gun 2, and a reflected secondary electron beam or a signal 10 of characteristic X-ray is detected by a secondary electron beam detector or a characteristic X-ray detector 11. When a desired degree of vacuum cannot be obtained due to the apprehensive reason of ruggedness on the surface of the sample, a vacuum clay 18 is used for preventing an intrusion of air. In this way, the surface of a large structural body can be nondestructively inspected and observed.
JP10753779A 1979-08-23 1979-08-23 Scanning electron microscope device Pending JPS5632656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10753779A JPS5632656A (en) 1979-08-23 1979-08-23 Scanning electron microscope device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10753779A JPS5632656A (en) 1979-08-23 1979-08-23 Scanning electron microscope device

Publications (1)

Publication Number Publication Date
JPS5632656A true JPS5632656A (en) 1981-04-02

Family

ID=14461695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10753779A Pending JPS5632656A (en) 1979-08-23 1979-08-23 Scanning electron microscope device

Country Status (1)

Country Link
JP (1) JPS5632656A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012124052A (en) * 2010-12-09 2012-06-28 Honda Motor Co Ltd Scanning type electron microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012124052A (en) * 2010-12-09 2012-06-28 Honda Motor Co Ltd Scanning type electron microscope
US8610061B2 (en) 2010-12-09 2013-12-17 Honda Motor Co., Ltd. Scanning electron microscope

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