JPS5537719A - X-ray analyzer - Google Patents

X-ray analyzer

Info

Publication number
JPS5537719A
JPS5537719A JP10974478A JP10974478A JPS5537719A JP S5537719 A JPS5537719 A JP S5537719A JP 10974478 A JP10974478 A JP 10974478A JP 10974478 A JP10974478 A JP 10974478A JP S5537719 A JPS5537719 A JP S5537719A
Authority
JP
Japan
Prior art keywords
ray
squeezer
holes
detecting element
nice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10974478A
Other languages
Japanese (ja)
Inventor
Tadashi Otaka
Minoru Shinohara
Kimio Kanda
Minoru Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10974478A priority Critical patent/JPS5537719A/en
Publication of JPS5537719A publication Critical patent/JPS5537719A/en
Pending legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To enable a nice X-ray analysis by providing an adjustable squeezing hole between a sample and an X-ray detector.
CONSTITUTION: An X-ray 5 emitted from a sample 4 by illuminating an electron beam 3 converged with an electro-magnetic lens 1 is made formed to shoot into an X-ray detecting element 6 through holes 13, 14 opened in a lens magnetic route 1 and X-ray squeezer 8. The X-ray squeezer 8 is made from a material such as Aluminium, coated with carbon films to absorb characteristic X-rays of Aluminium upon surfaces and has squeezer holes 8-1, 8-2 of different diameters. Control of the squeezer holes is performed by a controller 9 outside of a vacuum vessel 10. In this manner, X-ray excited by reflecting electron, scattered X-ray etc. other than those necessary X-rays to the detecting element 6 are suppressed to go into the detecting element 6 and a nice X-ray analysis can be performed.
COPYRIGHT: (C)1980,JPO&Japio
JP10974478A 1978-09-08 1978-09-08 X-ray analyzer Pending JPS5537719A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10974478A JPS5537719A (en) 1978-09-08 1978-09-08 X-ray analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10974478A JPS5537719A (en) 1978-09-08 1978-09-08 X-ray analyzer

Publications (1)

Publication Number Publication Date
JPS5537719A true JPS5537719A (en) 1980-03-15

Family

ID=14518138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10974478A Pending JPS5537719A (en) 1978-09-08 1978-09-08 X-ray analyzer

Country Status (1)

Country Link
JP (1) JPS5537719A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62116289A (en) * 1985-11-12 1987-05-27 ウエスチングハウス　エレクトリック　コ−ポレ−ション End plug for nuclear fuel rod
JPH06160564A (en) * 1992-08-04 1994-06-07 General Electric Co <Ge> Holding-spring assembly provided with sleeve for fixation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62116289A (en) * 1985-11-12 1987-05-27 ウエスチングハウス　エレクトリック　コ−ポレ−ション End plug for nuclear fuel rod
JPH0470597B2 (en) * 1985-11-12 1992-11-11 Westinghouse Electric Corp
JPH06160564A (en) * 1992-08-04 1994-06-07 General Electric Co <Ge> Holding-spring assembly provided with sleeve for fixation

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