JPS5595263A - X-ray analyzer - Google Patents
X-ray analyzerInfo
- Publication number
- JPS5595263A JPS5595263A JP131779A JP131779A JPS5595263A JP S5595263 A JPS5595263 A JP S5595263A JP 131779 A JP131779 A JP 131779A JP 131779 A JP131779 A JP 131779A JP S5595263 A JPS5595263 A JP S5595263A
- Authority
- JP
- Japan
- Prior art keywords
- dispersion type
- incident
- energy dispersion
- characteristic
- ray quantity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To enable at the same time the energy dispersion type detection and the wavelength dispersion type detection, by providing a stop means for limiting the incident X-ray quantity in the energy dispersion type detector and making the sensitivities equal for the energy dispersion type and wavelength dispersion type detectors.
CONSTITUTION: Characteristic X-rays 3 emitted from a specimen 2 irradiated by an electron beam 1 are detected by a wavelength dispersion type detector consisting of a spectroscopic crystal 4, a slit 5, and a proportional counter 6. On the other hand, the characteristic X-rays 3 are detected by an energy dispersion type detector consisting of a stop means 8 for limiting the incident X-ray quantity and a semiconductor detector 7. Thus, when the electron beam 1 is adjusted to provide a suitable electron current, the energy dispersion type detection and the wavelength dispersion type detection can simultaneously be carried out by suitably adjusting the characteristic X-ray quantity incident on the semiconductor detector 7 using the stop means 8 for limiting the incident X-ray quantity.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP131779A JPS5595263A (en) | 1979-01-12 | 1979-01-12 | X-ray analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP131779A JPS5595263A (en) | 1979-01-12 | 1979-01-12 | X-ray analyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5595263A true JPS5595263A (en) | 1980-07-19 |
Family
ID=11498110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP131779A Pending JPS5595263A (en) | 1979-01-12 | 1979-01-12 | X-ray analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5595263A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5764155A (en) * | 1980-10-07 | 1982-04-19 | Rigaku Denki Kogyo Kk | Fluorescent x-ray analyzer |
JPS6193938A (en) * | 1984-10-13 | 1986-05-12 | Jeol Ltd | Analysis of sample by electron microscope for analysis or the like |
JPS62149157U (en) * | 1986-03-14 | 1987-09-21 |
-
1979
- 1979-01-12 JP JP131779A patent/JPS5595263A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5764155A (en) * | 1980-10-07 | 1982-04-19 | Rigaku Denki Kogyo Kk | Fluorescent x-ray analyzer |
JPH0250420B2 (en) * | 1980-10-07 | 1990-11-02 | Rigaku Denki Kogyo Kk | |
JPS6193938A (en) * | 1984-10-13 | 1986-05-12 | Jeol Ltd | Analysis of sample by electron microscope for analysis or the like |
JPS62149157U (en) * | 1986-03-14 | 1987-09-21 |
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