JPS553129A - X-ray analyzer for scanning electron microscope or the like - Google Patents
X-ray analyzer for scanning electron microscope or the likeInfo
- Publication number
- JPS553129A JPS553129A JP7517078A JP7517078A JPS553129A JP S553129 A JPS553129 A JP S553129A JP 7517078 A JP7517078 A JP 7517078A JP 7517078 A JP7517078 A JP 7517078A JP S553129 A JPS553129 A JP S553129A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- detector
- specimen
- electron beam
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To increase the fetch angle and collecting stereoscopic angle of an X-ray in the state for horizontally holding a specimen in a scanning electron microscope by forming annular non-dispersion type detector and disposing it in the vicinity of an electron beam/route so that electron beam passes inside the detector.
CONSTITUTION: Non-dispersion type X-ray detector 19 is formed annularly and disposed in the vicinity of electron beam route so that the beam passes inside the detector 19. A detector retaining plate 14 thermally integrally formed with an external cooling tank 15 is disposed, for example, between a specimen 12 in a specimen chamber 10 under an objective lens 6 and a magnetic pole 8 under the lens, and an annular semiconductor X-ray detecting element 19 of Si or the like deposited with Be thin film on the detecting surface thereof is buried on the back surface of the edge in a hole 18 for passing the electron beam as formed at the plate 14. Thus, the X-ray can be detected at an X-ray fetch angle near 90° in narrow space without necessity of inclining the specimen 12, and X-ray collecting stereoscopic angle is increased to enhance the detecting sensitivity of an electron microscope.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7517078A JPS553129A (en) | 1978-06-21 | 1978-06-21 | X-ray analyzer for scanning electron microscope or the like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7517078A JPS553129A (en) | 1978-06-21 | 1978-06-21 | X-ray analyzer for scanning electron microscope or the like |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS553129A true JPS553129A (en) | 1980-01-10 |
Family
ID=13568448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7517078A Pending JPS553129A (en) | 1978-06-21 | 1978-06-21 | X-ray analyzer for scanning electron microscope or the like |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS553129A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58115383A (en) * | 1981-12-29 | 1983-07-09 | Shimadzu Corp | Reflected electron detector |
| US4537477A (en) * | 1982-03-05 | 1985-08-27 | Jeol Ltd. | Scanning electron microscope with an optical microscope |
| JPS6325028A (en) * | 1986-07-17 | 1988-02-02 | Bridgestone Corp | Manufacture of wide loop elastic belt provided with recess on internal surface |
| JPH01255143A (en) * | 1988-04-01 | 1989-10-12 | Jeol Ltd | X-ray analyzing device of electron microscope |
| JPH01307149A (en) * | 1988-06-03 | 1989-12-12 | Jeol Ltd | Semiconductor x-ray detector |
| JPH02168548A (en) * | 1988-12-20 | 1990-06-28 | Shimadzu Corp | X-ray analyzer of charged particle beam irradiation type |
| US5481109A (en) * | 1992-09-28 | 1996-01-02 | Hitachi, Ltd. | Surface analysis method and apparatus for carrying out the same |
| US5594246A (en) * | 1994-04-11 | 1997-01-14 | Hitachi, Ltd. | Method and apparatus for x-ray analyses |
| US5877498A (en) * | 1992-09-28 | 1999-03-02 | Hitachi, Ltd. | Method and apparatus for X-ray analyses |
| DE4408057B4 (en) * | 1994-03-07 | 2008-12-24 | Ifg-Institute For Scientific Instruments Gmbh | Device for X-ray fluorescence spectroscopy and its use |
| JP2016533612A (en) * | 2013-09-25 | 2016-10-27 | オックスフォード インストルメンツ ナノテクノロジー ツールス リミテッド | X-ray analysis in air |
-
1978
- 1978-06-21 JP JP7517078A patent/JPS553129A/en active Pending
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58115383A (en) * | 1981-12-29 | 1983-07-09 | Shimadzu Corp | Reflected electron detector |
| JPH0413674B2 (en) * | 1981-12-29 | 1992-03-10 | Shimadzu Corp | |
| US4537477A (en) * | 1982-03-05 | 1985-08-27 | Jeol Ltd. | Scanning electron microscope with an optical microscope |
| JPH0696270B2 (en) * | 1986-07-17 | 1994-11-30 | 株式会社ブリヂストン | Method for manufacturing wide loop-shaped elastic belt having recess on inner peripheral surface |
| JPS6325028A (en) * | 1986-07-17 | 1988-02-02 | Bridgestone Corp | Manufacture of wide loop elastic belt provided with recess on internal surface |
| JPH01255143A (en) * | 1988-04-01 | 1989-10-12 | Jeol Ltd | X-ray analyzing device of electron microscope |
| US4910399A (en) * | 1988-04-01 | 1990-03-20 | Jeol Ltd. | Electron microscope having X-ray detector |
| JPH01307149A (en) * | 1988-06-03 | 1989-12-12 | Jeol Ltd | Semiconductor x-ray detector |
| JPH02168548A (en) * | 1988-12-20 | 1990-06-28 | Shimadzu Corp | X-ray analyzer of charged particle beam irradiation type |
| US5481109A (en) * | 1992-09-28 | 1996-01-02 | Hitachi, Ltd. | Surface analysis method and apparatus for carrying out the same |
| US5877498A (en) * | 1992-09-28 | 1999-03-02 | Hitachi, Ltd. | Method and apparatus for X-ray analyses |
| DE4408057B4 (en) * | 1994-03-07 | 2008-12-24 | Ifg-Institute For Scientific Instruments Gmbh | Device for X-ray fluorescence spectroscopy and its use |
| US5594246A (en) * | 1994-04-11 | 1997-01-14 | Hitachi, Ltd. | Method and apparatus for x-ray analyses |
| JP2016533612A (en) * | 2013-09-25 | 2016-10-27 | オックスフォード インストルメンツ ナノテクノロジー ツールス リミテッド | X-ray analysis in air |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS553129A (en) | X-ray analyzer for scanning electron microscope or the like | |
| Hembree et al. | Biassed secondary electron imaging in a UHV-STEM | |
| JPS57145259A (en) | Scanning type electron microscope and its similar device | |
| JPS5371850A (en) | Position detector | |
| TW306033B (en) | Method of removing charge effect and thermal damage of charged particle microscope | |
| Tripard et al. | Preparation of thin film deuterated polyethylene targets | |
| Lehmpfuhl et al. | Direct electron microscopic imaging of surface topography by diffraction and phase contrast | |
| US3180987A (en) | Ion bombardment camera for crystal orientation determination | |
| JPS5418269A (en) | Electron beam detector | |
| GB1259352A (en) | ||
| JPS564004A (en) | System for detecting minute defects of body | |
| JPS5537754A (en) | Scanning electronic microscope or its similar device | |
| JPS529366A (en) | Sample equipment for electron microscopes, etc | |
| JPH0342609Y2 (en) | ||
| JPS5252562A (en) | Electron beam scanning type sample image pick-up device | |
| JPS54109897A (en) | Specimen analytical apparatus in scanning electron microscope or the like | |
| JPS5778182A (en) | Semiconductor position detector | |
| JPS5478655A (en) | Electronic microscope | |
| JPS52104865A (en) | X-ray analysis apparatus in electronic microscope or like | |
| JPS5481782A (en) | Position mark detecting method of electron beam exposure unit | |
| JPS55117388A (en) | Scanning electronic microscope or its similar device | |
| JPS5636058A (en) | Measuring system for surface electric potential | |
| SU1056309A1 (en) | Multiplier electron collector of scanning electron microscope | |
| Mackay | A tilted specimen holder for electron microscopy and diffraction | |
| JPS5352139A (en) | Specimen supporting device |