JPS5632658A - Scanning type electron microscope - Google Patents

Scanning type electron microscope

Info

Publication number
JPS5632658A
JPS5632658A JP10753979A JP10753979A JPS5632658A JP S5632658 A JPS5632658 A JP S5632658A JP 10753979 A JP10753979 A JP 10753979A JP 10753979 A JP10753979 A JP 10753979A JP S5632658 A JPS5632658 A JP S5632658A
Authority
JP
Japan
Prior art keywords
plinth
flame
spherical
inspected
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10753979A
Other languages
Japanese (ja)
Inventor
Katsukage Uehara
Yusaku Takano
Kazuo Hiromatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP10753979A priority Critical patent/JPS5632658A/en
Publication of JPS5632658A publication Critical patent/JPS5632658A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To perform a nondestructive inspection and an observation of a large structure as well as to obtain a bright image of an object to be inspected, by mounting above the object a mirror flame and a semi-spherical plinth for tiltably mounting the flame thereon by means of their respective vacuum seals. CONSTITUTION:A mirror flame 1, which has an inwardly extending vacuum seal means 16 consisting of a ring packing or the like at an opening end 15 thereof, is mounted on a hollow semi-spherical plinth 17 having an opening 18 for allowing electron-beam to pass therethrough. This plinth 17 is in turn mounted on the surface of a large structure 20 or the like via a vacuum sealing means 19 constituted of a ring packing or the like and provided on the bottom surface of the spherical plinth 17. Then, after evacuating the so-constituted chamber through a port 12, a signal 10 of a secondary electron beam or a specific X-ray is detected by a detector 11, thereby by inclining the frame 1 along the semispherical surface and adjusting the inclination so as to make larger the angle theta between an incoming electron-beam 3 and the surface 20A of the structure 20 which is to be inspected, thus a bright and detail image can be obtained.
JP10753979A 1979-08-23 1979-08-23 Scanning type electron microscope Pending JPS5632658A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10753979A JPS5632658A (en) 1979-08-23 1979-08-23 Scanning type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10753979A JPS5632658A (en) 1979-08-23 1979-08-23 Scanning type electron microscope

Publications (1)

Publication Number Publication Date
JPS5632658A true JPS5632658A (en) 1981-04-02

Family

ID=14461747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10753979A Pending JPS5632658A (en) 1979-08-23 1979-08-23 Scanning type electron microscope

Country Status (1)

Country Link
JP (1) JPS5632658A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007188821A (en) * 2006-01-16 2007-07-26 Univ Osaka Sangyo Handy electron microscope
EP2043131A3 (en) * 2000-11-02 2009-07-08 Hitachi Ltd. Minute sample processing method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2043131A3 (en) * 2000-11-02 2009-07-08 Hitachi Ltd. Minute sample processing method
US7888639B2 (en) 2000-11-02 2011-02-15 Hitachi, Ltd. Method and apparatus for processing a micro sample
US8222618B2 (en) 2000-11-02 2012-07-17 Hitachi, Ltd. Method and apparatus for processing a microsample
US8618520B2 (en) 2000-11-02 2013-12-31 Hitachi, Ltd. Method and apparatus for processing a micro sample
JP2007188821A (en) * 2006-01-16 2007-07-26 Univ Osaka Sangyo Handy electron microscope

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