CN105203555B - A kind of multi-layer graphene dust detection device - Google Patents
A kind of multi-layer graphene dust detection device Download PDFInfo
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- CN105203555B CN105203555B CN201510691239.2A CN201510691239A CN105203555B CN 105203555 B CN105203555 B CN 105203555B CN 201510691239 A CN201510691239 A CN 201510691239A CN 105203555 B CN105203555 B CN 105203555B
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 69
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 69
- 239000000428 dust Substances 0.000 title claims abstract description 37
- 238000001514 detection method Methods 0.000 title claims abstract description 34
- 230000007246 mechanism Effects 0.000 claims abstract description 37
- 230000003287 optical effect Effects 0.000 claims description 40
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 32
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- 230000000740 bleeding effect Effects 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 18
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 17
- 238000012545 processing Methods 0.000 claims description 17
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 239000001307 helium Substances 0.000 claims description 5
- 229910052734 helium Inorganic materials 0.000 claims description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 239000000284 extract Substances 0.000 claims description 4
- 150000001336 alkenes Chemical class 0.000 claims 4
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Abstract
The present invention relates to a kind of multi-layer graphene dust detection devices, comprising: rack and the sweep mechanism being arranged on the rack, controller, operating mechanism, mechanism of taking pictures, image processor, seal closure, air blown producer and apparatus for vacuum producing；The principle being refracted using laser detects the stain on graphene, accuracy with higher, carrying out scanning one by one using the better laser of polymerism has stronger accuracy and mistake proofing, laser sensor acquires laser signal, there is control unit analysis, its lighttight characteristic can have the interference for preventing other light and influence test result convenient for test；Its air blown producer can clean the confined space, and the dust in air is avoided to fall on graphene to be detected, influence the accuracy of detection.
Description
Technical field
The present invention relates to a kind of multi-layer graphene dust detection devices.
Background technique
Graphene is the two dimension crystalline substance for the only one layer atomic thickness for being stripped out from graphite material, being made of carbon atom
Body.Graphene is both most thin material, and most tough material, and 200 times more taller than best steel of breaking strength.Simultaneously
It has good elasticity again, and stretch range can reach the 20% of own dimensions.If made of one piece 1 square metre of area of graphene
At hammock, weight itself can bear one one kilogram of cat less than 1 milligram.Graphene is almost fully transparent, only absorption
2.3% light.On the other hand, it is very fine and close, even the smallest gas atom can not also penetrate.These features make it non-
Often it is suitable as the raw material of transparent electron product, such as transparent touch display screen, luminescent screen and solar panel.
Due to the excellent performance of graphene, graphene becomes the main points of a breakthrough bottleneck of current development in science and technology, though
Right China is upper at the forefront in the world in the paper studies of graphene, but in the application and detection of graphene there is also it is many not
Foot, in the application of graphene, multi-layer graphene is during coincidence, if reaches the requirement used, needs good detection
Means and detection device.
Summary of the invention
It is an object of the invention to: in view of the above problems, provide multi-layer graphene dust detection device, using swash
The principle that light is refracted detects the stain on graphene, accuracy with higher, using the better laser of polymerism
Carrying out scanning one by one has stronger accuracy and mistake proofing, and laser sensor acquires laser signal, there is control unit analysis,
Lighttight characteristic can have the interference for preventing other light and influence test result convenient for test；Camera is high definition camera,
Can to amplification 500 times -1000 times take a picture, with continuous shooting function, more photo can be shot moment, at image
Reason device is detected, and has better anti-error property, improves accuracy, and the subnormal ambient in seal closure can reduce air flowing,
Influence to laser beam, air blown producer can clean the confined space, avoid the dust in air from falling to be checked
On the graphene of survey, the accuracy of detection is influenced.
The technical solution adopted by the invention is as follows:
The invention discloses a kind of multi-layer graphene dust detection devices, comprising: rack and the scanning being arranged on the rack
Mechanism, controller, operating mechanism, mechanism of taking pictures, image processor, seal closure, air blown producer and apparatus for vacuum producing；
Sweep mechanism includes scanning support and is fixed on laser on scanning support, lifter, and laser includes a flat laser
The laser pick-off slot of generator, a round end laser generator and spill, laser pick-off slot inside are equipped with several laser sensors；Swash
Optical sensor, two laser generators and lifter are electrically connected with the controller respectively；
Operating mechanism includes fixator, reflecting mirror and the optical screen of mobile station and setting on a mobile station, is arranged in mobile station
There are transverse shifting device and longitudinal movement device, mobile station and optical screen are electrically connected with the controller；The side of mobile station is arranged in optical screen, uses
In the light for generating single color；Reflecting mirror is set to the lower section of fixator；
The camera that mechanism of taking pictures includes the fixed frame being fixed on the rack, is arranged on fixed frame；In the mirror of camera
It is equipped with telescopic device at head, moveable magnifying glass is equipped with below telescopic device；The mechanism of taking pictures is connected with controller；
Image processor is set to machine frame inside, is connected with controller, is used for image procossing；
Seal closure is set to above rack, and constitutes lighttight confined space with rack, is equipped in the edge of seal closure
Sealing ring；
Apparatus for vacuum producing is set in rack, including vacuum motor, gas outlet and bleeding point；Between gas outlet and bleeding point
Equipped with check valve；
It includes nitrogen gas tank, solenoid valve and the air blast head being sequentially connected in rack that air blown producer, which is set to,；It is also logical at bleeding point
It crosses solenoid valve and pipeline connects the nitrogen gas tank.
Further, it is 1mm, the partially flat laser with a thickness of 10um that the flat laser generator, which generates width,；The round end
Laser generator generates the Column laser that radius is 10um.
Further, high, medium and low three gears of the lifter, respectively correspond friction speed；The movement speed of low or first gear
For 5cm/min.
Further, the seal closure is opaque seal closure；Observation panel to be opened/closed is equipped on seal closure.
Further, there is flat nozzle on the air blast head of the air blown producer.
Further, the vacuum motor uses the three-phase alternating current stepper motor of 220v；The gas outlet is greater than bleeding point.
It further, include 88% nitrogen, 5% helium and 7% hydrogen in the nitrogen gas tank.
Due to above structure, the principle being refracted using laser detects the stain on graphene, with higher
Accuracy, carrying out scanning one by one using the better laser of polymerism has stronger accuracy and mistake proofing, and laser sensor is adopted
Collect laser signal, there is control unit analysis, lighttight characteristic can be convenient for test, the shadow with the interference for preventing other light
Ring test result；Camera is high definition camera, can to amplification 500 times -1000 times take a picture, with continuous shooting function,
More photo can be shot moment, image processor is detected, and is had better anti-error property, is improved accuracy, seal closure
Interior subnormal ambient, can reduce air flowing, the influence to laser beam, and air blown producer can carry out the confined space clear
It sweeps, the dust in air is avoided to fall on graphene to be detected, influence the accuracy of detection.
Further, the control system of multi-layer graphene dust detection device includes:
Control unit, including controller；
Scanning element, including sweep mechanism, sweep mechanism include laser, lifter, and laser includes a flat laser
Generator, the laser pick-off slot of a round end laser generator and spill and several laser sensings on the inside of laser pick-off slot
Device；Laser is gone up and down to designated position, and it is 1mm, the flat laser with a thickness of 10um, laser that flat laser generator, which generates width,
By specifying the laser sensor in region to receive in laser pick-off slot after graphene reflects；Laser sensor in non-designated region
When receiving the laser intensity variation that the laser sensor in laser or specified region receives and being more than setting value, then round end is opened
Laser generator generates the Column laser that radius is 10um, and Column laser is along the width direction scanning with shape laser, Column laser
Through on graphene and reflecting mirror reflection laser sensor, convenient for calculating the position on graphene with stain；
Operating unit is provided with cross in mobile station including mobile station and setting fixator and reflecting mirror on a mobile station
To shifter and longitudinal movement device, mobile station and optical screen are electrically connected with the controller；For fixing graphene, reflecting mirror is set fixator
Below graphene, optical screen is set to the side of fixator, for generating monochromatic light；When mobile station is mobile, make to be set on fixator
Graphene move horizontally, reflection laser to laser sensor；
Photographing unit, including mechanism of taking pictures, mechanism of taking pictures include camera, the telescopic device at camera gun,
And moveable magnifying glass and optical screen；Magnifying glass is movable to telescopic device front end, convenient for taking pictures；Reflect the list that optical screen generates
Coloured light is taken pictures by camera；
Vacuum unit, including seal closure, apparatus for vacuum producing and air blown producer；Apparatus for vacuum producing includes vacuum motor, gas outlet, pumping
Mouth and the check valve being arranged between gas outlet and bleeding point；Air blown producer includes nitrogen gas tank, solenoid valve and air blast head, air blast head
It is controlled and is rotated by controller；Also pass through solenoid valve at bleeding point and is connected with nitrogen gas tank；Seal closure cooperate rack by scanning element,
Operating unit and photographing unit sealing；It include 88% nitrogen, 5% helium and 7% hydrogen in nitrogen gas tank；
Image processing unit, for carrying out image procossing to the collected picture of photographing unit；
Control unit is connected with scanning element, operating unit, photographing unit and vacuum unit, image processing unit respectively,
And for controlling each unit.
Due to above system, make each unit precise match, reaches better detection effect, it can be according to its user
Method effectively detects it, alleviates the workload of artificial detection, and the unified allocation of resources work of each unit can be accurately controlled
Make, avoids the movement conflict between each unit, influence its accuracy of action；Its scanning element generates two different sharp
Light respectively carries out laser, preliminary scan and accurate scan, avoids because individualized reasons influence the accuracy of scanning；Operation is single
Member moves graphene, can moving distance it is smaller, avoid laser move mode, excessive velocities, scanning speed should not be controlled
The defect of system；Photographing unit is intuitively shown after capable of amplifying stain, convenient for observation and can be shown；Vacuum unit is reduced
The air of seal closure energy reduces influence of the air ion to laser intensity and degree of penetrating partially；Meanwhile air blown producer, sky can be discharged
The big gas of particle in gas, while the dust for reducing seal closure avoids, influence of the dust in seal closure to testing result.
Further, the control method of control system:
(1), seal closure is closed, and detects the sealing condition at seal closure gap；
(2), control unit makes it be acted and be extracted out with the revolving speed of 180-200r/min to the electric current of vacuum motor 5-5.5A
Air in seal closure makes the absolute pressure 80-88kpa in seal closure；
(3), control unit control air blown producer is opened, and is controlled air blast head and injected nitrogen stream into seal closure, close to blow afloat
Seal intracavitary dust；
(4), the electric current that control unit increases supply vacuum motor improves its revolving speed to 230-240r/min；Make simultaneously close
Absolute pressure in sealing cover is not higher than 80kpa；
(5), after 5-8min, air blown producer is closed, and to being further depressurized to absolute pressure 30-35kpa in seal closure；
(6), scanning element is opened, control laser is gone up and down to apart from mobile station 20cm-22cm high, controls flat laser hair
It is 1mm, the band shape laser with a thickness of 10um that raw device, which generates width,；
(7), control unit control mobile station is transversely and horizontally moved with the speed of 60cm/min, and reflective mirror is made to be moved to band shape
At laser, reflective mirror will be with shape laser reflection to laser sensor at；
(8), the position for adjusting mobile station carries out reflective mirror with shape laser with the velocity scanning reflecting mirror of 2.5cm/min
Scanning, laser sensor receive band shape laser；Control unit records the position of mobile station, and records reception band shape laser simultaneously
Laser sensor position and laser intensity；
(9), graphene is horizontally arranged on the fixator above reflective mirror, adjustment mobile station utilize band shape laser with
The speed of 2.5cm/min carries out transversal scanning to graphene, and control unit, which is detected again and recorded, receives the laser with shape laser
The position of the position of sensor and laser intensity and mobile station；The data that control unit comparison front and back records, when reception band shape
When the position of the laser sensor of laser deflects or laser intensity variation is greater than 2.75%, stops mobile station movement and close
Flat laser generator；Record current flat laser-scanning position；
(10), Column laser is opened, Column laser is to the scan position of laser flat before graphene with 0.2cm/min's
Speed carries out longitudinal scanning；When the position for the laser sensor for receiving Column laser deflects or laser intensity variable quantity is greater than
When 6%, laser is closed；It is stain position that control unit, which marks scan position of the Column laser on graphene,；
(11), behind control unit label stain position, optical screen and camera are opened；Optical screen and position of camera are adjusted, is made
Camera is to be directed at the stain position of graphene, and using the optical screen through mirror reflection as background；
(12), it adjusts telescopic device and controls the movement of magnifying glass, camera is made to focus stain position；
(13), optical screen is adjusted to white screen, camera carries out continuously taking pictures for the interval 0.1ms to stain position；Obtain 20-
30 photos；
(14), the photo that photographing unit will acquire is transferred in control unit, has control unit to carry out judgement processing；
(15), the color for adjusting optical screen more than three times, every time continues stain position and takes pictures and obtain 20-30 photos,
Then step (14) are repeated；
(16), control unit controls photographing unit tenth skill, and controls laser and continue to scan on；
(17), a Target Photo is transferred to image processing unit and Target Photo is cut into several side lengths by control unit
It is unit length by the side length L1 of origin, sub-pictures of the midpoint of Target Photo for the square sub-pictures of L1, establishes right angle seat
Mark system；It obtains the background average RGB value of target context picture and records；In Target Photo, using origin as the center of circle, 2L1 is half
Diameter draws limit circle；
(18), a comparison picture same or similar with Target Photo background is transferred to image procossing list by control unit
Member simultaneously cuts the picture, adjusts the average RGB value of the comparison picture, is allowed to identical as the average RGB value of Target Photo；It will dislocation
It covers on Target Photo, be limited to the central point of the picture in limit circle and be not overlapped with origin, then delete target figure
Piece sub-pictures identical with rgb value in comparison picture；
(19), step (18) are repeated until the picture of same color background all covers on Target Photo；
(20), circumscribed circle is drawn to remaining sub-pictures, the center of circle for measuring circumscribed circle is (m, n) coordinate and marks the coordinate；
(21), the Target Photo of another background is replaced, step (17)-(20) are repeated；Obtain another label coordinate；
(22), step (21) are repeated until the use having powerful connections；Extract all labeled (m, n) coordinates；If all
(m, n) coordinate is respectively positioned in the region of specified size, and the coordinate label number in the region is greater than designated value, then marks the area
There is stain in domain；
(23), reacquire Target Photo, midpoint be origin, sub-pictures side length L2 be unit length, establish right angle seat
Mark system, L2=5L1；Target Photo is cut into the sub-pictures that several side lengths are L2；
(24), the region that label is in step (22) corresponds in coordinate system；If multiple regions are close and have company
Continuous property, then the region has rejudged inviolateness；If multiple regions are not close or do not have continuity, it is further processed；
(25), reacquire a Target Photo, midpoint be origin, sub-pictures side length L2 be unit length, establish right angle
Coordinate system, L3=0.3L1；The Target Photo is cut into the sub-pictures that several side lengths are L3；
(26), the region that label is in step (22) is corresponded in coordinate system；Retain rgb value and back in the region
The part that the difference of scape rgb value is greater than the set value；And determine that the reservation region has stain.
Due to above-mentioned control method, each unit precise match reaches better detection effect, can be according to its user
Method effectively detects it, alleviates the workload of artificial detection, and the unified allocation of resources work of each unit can be accurately controlled
Make, avoids the movement conflict between each unit, influence its accuracy of action；Its scanning element generates two different sharp
Light respectively carries out laser, preliminary scan and accurate scan, avoids because individualized reasons influence the accuracy of scanning；Operation is single
Member moves graphene, can moving distance it is smaller, avoid laser move mode, excessive velocities, scanning speed should not be controlled
The defect of system；Photographing unit is intuitively shown after capable of amplifying stain, convenient for observation and can be shown；Vacuum unit is reduced
The air of seal closure energy reduces influence of the air ion to laser intensity and degree of penetrating partially；Meanwhile air blown producer, sky can be discharged
The big gas of particle in gas, while the dust for reducing seal closure avoids, influence of the dust in seal closure to testing result.Due to
The above method can efficiently clean the sealed environment, can reduce the air of seal closure energy, and it is strong to laser to reduce air ion
The influence of degree and degree of penetrating partially；The dust for reducing seal closure avoids, influence of the dust in seal closure to testing result；Improve result
Accuracy and accuracy rate, for test one excellent environment is provided.Photographic method can will detect possibility to scanning element
There are the positions of stain to take pictures, and using high definition camera, amplifies focusing, has stronger specific aim, can be realized
By the position shape of stain, showed by more intuitive mode, by way of more photos, reduces error, exclude one by one, together
When by different colors be background, reducing uniform background makes the indetectable situation of stain, improves accuracy；Image processing method
Method can be handled multiple pictures that collect, and there may be the sub-pictures of stain for acquisition；Excluding other will not have a stain
Sub-pictures, to reduce the calculation amount of control unit, and then keep the processing speed of picture processing unit faster, more convenient,
Reduce hardware resources occupation amount, by sub-pictures there are the regions of stain to be determined, determine after region can be reduced work
Amount；Then the region for observing its doubtful stain on the whole, be the region can, if there is linear continuity to close in the region
System or other continuous sexual intercourse, it can be determined that the region be because being dealt with improperly caused by hardware because, it is this have it is continuous
The stain of sexual intercourse, it is easy to be visually noticeable, no longer need to be judged using this method；After excluding this kind of stain, remain
Remaining stain region is refined, and the region delimited before further limiting guarantees that collected photo has more accuracies；
It is the influence for reducing light source to result using different light sources.
In conclusion by adopting the above-described technical solution, the beneficial effects of the present invention are:
1, the principle being refracted using laser detects the stain on graphene, accuracy with higher, uses
The better laser of polymerism, which carries out scanning one by one, has stronger accuracy and mistake proofing, and laser sensor acquires laser signal,
There is control unit analysis, lighttight characteristic there can be the interference for preventing other light and influence test result convenient for test；
2, camera is high definition camera, can to amplification 500 times -1000 times take a picture, with continuous shooting function,
More photo can be shot moment, image processor is detected, and is had better anti-error property, is improved accuracy, seal closure
Interior subnormal ambient, can reduce air flowing, the influence to laser beam, and air blown producer can carry out the confined space clear
It sweeps, the dust in air is avoided to fall on graphene to be detected, influence the accuracy of detection；
3, each unit precise match reaches better detection effect, can carry out to it effectively according to its application method
Detection, alleviate the workload of artificial detection, can accurately control each unit unified allocation of resources work, avoid each unit it
Between movement conflict, influence its accuracy of action；
4, operating unit moves graphene, can moving distance it is smaller, avoid laser move mode, speed mistake
Fastly, the defect that scanning speed should not control；The dust for reducing seal closure avoids, shadow of the dust in seal closure to testing result
It rings；The accuracy and accuracy rate of result are improved, provides an excellent environment for test.
Detailed description of the invention
Fig. 1 is image processing method main view in the present invention.
Marked in the figure: 1- rack, 2- mobile station, 3- takes pictures mechanism, 4- air blast head, 5- sweep mechanism, 6- optical screen, 7- sealing
Cover, 8- nitrogen gas tank, 9- vacuum motor.
Specific embodiment
With reference to the accompanying drawing, the present invention is described in detail.
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Specific embodiment 1:
As shown in Figure 1, a kind of multi-layer graphene dust detection device of the invention, comprising: rack 1 and setting are in rack 1
On sweep mechanism 5, controller, operating mechanism, mechanism of taking pictures 3, image processor, seal closure 7, air blown producer and apparatus for vacuum producing；
Sweep mechanism 5 includes scanning support and is fixed on laser on scanning support, lifter, and laser includes a flat laser
The laser pick-off slot of generator, a round end laser generator and spill, laser pick-off slot inside are equipped with several laser sensors；Swash
Optical sensor, two laser generators and lifter are electrically connected with the controller respectively；
Operating mechanism includes mobile station 2 and the fixator being arranged in mobile station 2, reflecting mirror and optical screen 6, in mobile station 2
It is provided with transverse shifting device and longitudinal movement device, mobile station 2 and optical screen 6 are electrically connected with the controller；Optical screen 6 is arranged in mobile station 2
Side, for generating the light of single color；Reflecting mirror is set to the lower section of fixator；
Mechanism of taking pictures 3 includes the fixed frame being fixed in rack 1, the camera being arranged on fixed frame；In camera
It is equipped with telescopic device at camera lens, moveable magnifying glass is equipped with below telescopic device；The mechanism 3 of taking pictures is connected with controller；
Image processor is set to inside rack 1, is connected with controller, and image procossing is used for；
Seal closure 7 is set to 1 top of rack, and constitutes lighttight confined space with rack 1, in the edge of seal closure 7
Equipped with sealing ring；
Apparatus for vacuum producing is set in rack 1, including vacuum motor 9, gas outlet and bleeding point；Gas outlet and bleeding point it
Between be equipped with check valve；
It includes nitrogen gas tank 8, solenoid valve and the air blast head 4 being sequentially connected in rack 1 that air blown producer, which is set to,；At bleeding point
The nitrogen gas tank 8 is also connected by solenoid valve and pipeline.
It is 1mm, the partially flat laser with a thickness of 10um that flat laser generator, which generates width,；Round end laser generator generates radius
For the Column laser of 10um.
High, medium and low three gears of lifter, respectively correspond friction speed；The movement speed of low or first gear is 5cm/min.
Seal closure 7 is opaque seal closure 7；Observation panel to be opened/closed is equipped on seal closure 7.
There is flat nozzle on the air blast head 4 of air blown producer.
Vacuum motor 9 uses the three-phase alternating current stepper motor of 220v；Gas outlet is greater than bleeding point.
It include 88% nitrogen, 5% helium and 7% hydrogen in nitrogen gas tank 8.
Due to above structure, the principle being refracted using laser detects the stain on graphene, with higher
Accuracy, carrying out scanning one by one using the better laser of polymerism has stronger accuracy and mistake proofing, and laser sensor is adopted
Collect laser signal, there is control unit analysis, lighttight characteristic can be convenient for test, the shadow with the interference for preventing other light
Ring test result；Camera is high definition camera, can to amplification 500 times -1000 times take a picture, with continuous shooting function,
More photo can be shot moment, image processor is detected, and is had better anti-error property, is improved accuracy, seal closure 7
Interior subnormal ambient, can reduce air flowing, the influence to laser beam, and air blown producer can carry out the confined space clear
It sweeps, the dust in air is avoided to fall on graphene to be detected, influence the accuracy of detection.
Specific embodiment 2:
According to the control system of the multi-layer graphene dust detection device of embodiment 1, comprising:
Control unit, including controller；
Scanning element, including sweep mechanism 5, sweep mechanism 5 include laser, lifter, and laser includes one flat sharp
Optical generator, the laser pick-off slot of a round end laser generator and spill and several lasers on the inside of laser pick-off slot
Sensor；Laser is gone up and down to designated position, and it is 1mm, the flat laser with a thickness of 10um that flat laser generator, which generates width, is swashed
Light is after graphene reflects by specifying the laser sensor in region to receive in laser pick-off slot；Laser sensing in non-designated region
When device receives the laser intensity variation that the laser sensor in laser or specified region receives and is more than setting value, then circle is opened
Head laser generator generates the Column laser that radius is 10um, and Column laser swashs along the width direction scanning with shape laser, cylindricality
Light is through on graphene and reflecting mirror reflection laser sensor, convenient for calculating the position on graphene with stain；
Operating unit is provided in mobile station 2 including mobile station 2 and the fixator and reflecting mirror that are arranged in mobile station 2
Transverse shifting device and longitudinal movement device, mobile station 2 and optical screen 6 are electrically connected with the controller；Fixator is reflected for fixing graphene
Mirror is set to below graphene, and optical screen 6 is set to the side of fixator, for generating monochromatic light；When mobile station 2 is mobile, make to be set to solid
The graphene determined on device moves horizontally, reflection laser to laser sensor；
Photographing unit, including mechanism 3 of taking pictures, mechanism of taking pictures 3 include camera, the flexible dress at camera gun
It sets and moveable magnifying glass and optical screen 6；Magnifying glass is movable to telescopic device front end, convenient for taking pictures；Optical screen 6 is reflected to generate
Monochromatic light taken pictures by camera；
Vacuum unit, including seal closure 7, apparatus for vacuum producing and air blown producer；Apparatus for vacuum producing includes vacuum motor 9, gas outlet, pumping
Port and the check valve being arranged between gas outlet and bleeding point；Air blown producer includes nitrogen gas tank 8, solenoid valve and air blast head 4, drum
Public attention 4 is controlled by controller and is rotated；Also pass through solenoid valve at bleeding point and is connected with nitrogen gas tank 8；Seal closure 7 cooperates rack 1 will
Scanning element, operating unit and photographing unit sealing；It include 88% nitrogen, 5% helium and 7% hydrogen in nitrogen gas tank 8；
Image processing unit, for carrying out image procossing to the collected picture of photographing unit；
Control unit is connected with scanning element, operating unit, photographing unit and vacuum unit, image processing unit respectively,
And for controlling each unit.
Due to above system, make each unit precise match, reaches better detection effect, it can be according to its user
Method effectively detects it, alleviates the workload of artificial detection, and the unified allocation of resources work of each unit can be accurately controlled
Make, avoids the movement conflict between each unit, influence its accuracy of action；Its scanning element generates two different sharp
Light respectively carries out laser, preliminary scan and accurate scan, avoids because individualized reasons influence the accuracy of scanning；Operation is single
Member moves graphene, can moving distance it is smaller, avoid laser move mode, excessive velocities, scanning speed should not be controlled
The defect of system；Photographing unit is intuitively shown after capable of amplifying stain, convenient for observation and can be shown；Vacuum unit is reduced
The air of 7 energy of seal closure, reduces influence of the air ion to laser intensity and degree of penetrating partially；Meanwhile air blown producer, sky can be discharged
The big gas of particle in gas, while the dust for reducing seal closure 7 avoids, influence of the dust in seal closure 7 to testing result.
Specific embodiment 3:
The control method of 2 control system according to specific embodiment:
(1), seal closure 7 is closed, and detects the sealing condition at 7 gap of seal closure；
(2), control unit makes it be acted and be extracted out with the revolving speed of 180-200r/min to the electric current of vacuum motor 95-5.5A
Air in seal closure 7 makes the absolute pressure 80-88kpa in seal closure 7；
(3), control unit control air blown producer is opened, and is controlled air blast head 4 and injected nitrogen stream into seal closure 7, to blow afloat
Dust in seal chamber；
(4), the electric current that control unit increases supply vacuum motor 9 improves its revolving speed to 230-240r/min；Make simultaneously
Absolute pressure in seal closure 7 is not higher than 80kpa；
(5), after 5-8min, air blown producer is closed, and to being further depressurized to absolute pressure 30-35kpa in seal closure 7；
(6), scanning element is opened, control laser is gone up and down to apart from mobile station 220cm-22cm high, controls flat laser
It is 1mm, the band shape laser with a thickness of 10um that generator, which generates width,；
(7), control unit control mobile station 2 is transversely and horizontally moved with the speed of 60cm/min, and reflective mirror is made to be moved to band
At shape laser, reflective mirror will be with shape laser reflection to laser sensor at；
(8), the position for adjusting mobile station 2, with shape laser with the velocity scanning reflecting mirror of 2.5cm/min, to reflective mirror into
Row scanning, laser sensor receive band shape laser；Control unit records the position of mobile station 2, and records reception band shape simultaneously
The position of the laser sensor of laser and laser intensity；
(9), graphene is horizontally arranged on the fixator above reflective mirror, adjustment mobile station 2 using band shape laser with
The speed of 2.5cm/min carries out transversal scanning to graphene, and control unit, which is detected again and recorded, receives the laser with shape laser
The position of the position of sensor and laser intensity and mobile station 2；The data that control unit comparison front and back records, when reception band
When the position of the laser sensor of shape laser deflects or laser intensity variation is greater than 2.75%, stops the movement of mobile station 2 and close
Close flat laser generator；Record current flat laser-scanning position；
(10), Column laser is opened, Column laser is to the scan position of laser flat before graphene with 0.2cm/min's
Speed carries out longitudinal scanning；When the position for the laser sensor for receiving Column laser deflects or laser intensity variable quantity is greater than
When 6%, laser is closed；It is stain position that control unit, which marks scan position of the Column laser on graphene,；
(11), behind control unit label stain position, optical screen 6 and camera are opened；Optical screen 6 and position of camera are adjusted,
Make camera to be directed at the stain position of graphene, and is background with the optical screen 6 through mirror reflection；
(12), it adjusts telescopic device and controls the movement of magnifying glass, camera is made to focus stain position；
(13), optical screen 6 is adjusted to white screen, camera carries out continuously taking pictures for the interval 0.1ms to stain position；It obtains
20-30 photos；
(14), the photo that photographing unit will acquire is transferred in control unit, has control unit to carry out judgement processing；
(15), the color for adjusting optical screen 6 more than three times, every time continues stain position and takes pictures and obtain 20-30 photos,
Then step (14) are repeated；
(16), control unit controls photographing unit tenth skill, and controls laser and continue to scan on；
(17), a Target Photo is transferred to image processing unit and Target Photo is cut into several side lengths by control unit
It is unit length by the side length L1 of origin, sub-pictures of the midpoint of Target Photo for the square sub-pictures of L1, establishes right angle seat
Mark system；It obtains the background average RGB value of target context picture and records；In Target Photo, using origin as the center of circle, 2L1 is half
Diameter draws limit circle；
(18), a comparison picture same or similar with Target Photo background is transferred to image procossing list by control unit
Member simultaneously cuts the picture, adjusts the average RGB value of the comparison picture, is allowed to identical as the average RGB value of Target Photo；It will dislocation
It covers on Target Photo, be limited to the central point of the picture in limit circle and be not overlapped with origin, then delete target figure
Piece sub-pictures identical with rgb value in comparison picture；
(19), step (18) are repeated until the picture of same color background all covers on Target Photo；
(20), circumscribed circle is drawn to remaining sub-pictures, the center of circle for measuring circumscribed circle is (m, n) coordinate and marks the coordinate；
(21), the Target Photo of another background is replaced, step (17)-(20) are repeated；Obtain another label coordinate；
(22), step (21) are repeated until the use having powerful connections；Extract all labeled (m, n) coordinates；If all
(m, n) coordinate is respectively positioned in the region of specified size, and the coordinate label number in the region is greater than designated value, then marks the area
There is stain in domain；
(23), reacquire Target Photo, midpoint be origin, sub-pictures side length L2 be unit length, establish right angle seat
Mark system, L2=5L1；Target Photo is cut into the sub-pictures that several side lengths are L2；
(24), the region that label is in step (22) corresponds in coordinate system；If multiple regions are close and have company
Continuous property, then the region has rejudged inviolateness；If multiple regions are not close or do not have continuity, it is further processed；
(25), reacquire a Target Photo, midpoint be origin, sub-pictures side length L2 be unit length, establish right angle
Coordinate system, L3=0.3L1；The Target Photo is cut into the sub-pictures that several side lengths are L3；
(26), the region that label is in step (22) is corresponded in coordinate system；Retain rgb value and back in the region
The part that the difference of scape rgb value is greater than the set value；And determine that the reservation region has stain.
Due to above-mentioned control method, each unit precise match reaches better detection effect, can be according to its user
Method effectively detects it, alleviates the workload of artificial detection, and the unified allocation of resources work of each unit can be accurately controlled
Make, avoids the movement conflict between each unit, influence its accuracy of action；Its scanning element generates two different sharp
Light respectively carries out laser, preliminary scan and accurate scan, avoids because individualized reasons influence the accuracy of scanning；Operation is single
Member moves graphene, can moving distance it is smaller, avoid laser move mode, excessive velocities, scanning speed should not be controlled
The defect of system；Photographing unit is intuitively shown after capable of amplifying stain, convenient for observation and can be shown；Vacuum unit is reduced
The air of 7 energy of seal closure, reduces influence of the air ion to laser intensity and degree of penetrating partially；Meanwhile air blown producer, sky can be discharged
The big gas of particle in gas, while the dust for reducing seal closure 7 avoids, influence of the dust in seal closure 7 to testing result.By
In the above method, the sealed environment can be efficiently cleaned, the air of 7 energy of seal closure can be reduced, reduces air ion to sharp
The influence of luminous intensity and partially degree of penetrating；The dust for reducing seal closure 7 avoids, influence of the dust in seal closure 7 to testing result；It mentions
The accuracy and accuracy rate of high result provide an excellent environment for test.Photographic method can will detect scanning element
It takes pictures to the position there may be stain, using high definition camera, amplifies focusing, there is stronger specific aim, energy
It is enough to realize the position shape of stain, showed by more intuitive mode, by way of more photos, reduces error, one by one
It excludes, while being background by different colors, reducing uniform background makes the indetectable situation of stain, improves accuracy；Figure
As processing method, multiple pictures that collect can be handled, and there may be the sub-pictures of stain for acquisition；Exclude other not
Can flecked sub-pictures, to reduce the calculation amount of control unit, so make the processing speed of picture processing unit it is faster,
It is more convenient, reduce the resources occupation amount of hardware, by sub-pictures there are the regions of stain to be determined, the region after determining can subtract
Few workload；Then the region for observing its doubtful stain on the whole, be the region can, if the region have linear company
Continuous sexual intercourse or other continuous sexual intercourse, it can be determined that the region be because being dealt with improperly caused by hardware because, this tool
There is the stain of continuous sexual intercourse, it is easy to be visually noticeable, no longer need to be judged using this method；Exclude this kind of stain
Afterwards, remaining stain region is refined, the region delimited before further limiting, and guarantees that collected photo has more essences
True property；It is the influence for reducing light source to result using different light sources.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (5)
1. a kind of multi-layer graphene dust detection device characterized by comprising rack and the scanning machine being arranged on the rack
Structure, controller, operating mechanism, mechanism of taking pictures, image processor, seal closure, air blown producer and apparatus for vacuum producing；
Sweep mechanism includes scanning support and the laser, the lifter that are fixed on scanning support, and laser includes a flat laser hair
The laser pick-off slot of raw device, a round end laser generator and spill, laser pick-off slot inside are equipped with several laser sensors；Laser
Sensor, two laser generators and lifter are electrically connected with the controller respectively；
Operating mechanism includes fixator, reflecting mirror and the optical screen of mobile station and setting on a mobile station, is provided with cross in mobile station
To shifter and longitudinal movement device, mobile station and optical screen are electrically connected with the controller；The side of mobile station is arranged in optical screen, for producing
The light of raw single color；Reflecting mirror is set to the lower section of fixator；
The camera that mechanism of taking pictures includes the fixed frame being fixed on the rack, is arranged on fixed frame；At the camera lens of camera
Equipped with telescopic device, moveable magnifying glass is equipped with below telescopic device；The mechanism of taking pictures is connected with controller；
Image processor is set to machine frame inside, is connected with controller, is used for image procossing；
Seal closure is set to above rack, and constitutes lighttight confined space with rack, is equipped with sealing in the edge of seal closure
Ring；
Apparatus for vacuum producing is set in rack, including vacuum motor, gas outlet and bleeding point；It is equipped between gas outlet and bleeding point
Check valve；
Air blown producer is set in rack, including the nitrogen gas tank, solenoid valve and air blast head being sequentially connected；Also pass through at bleeding point
Solenoid valve and pipeline connect the nitrogen gas tank；
The control system of multi-layer graphene dust detection device includes:
Control unit, including controller；
Scanning element, including sweep mechanism, sweep mechanism include laser, lifter, and laser includes that a flat laser occurs
Device, the laser pick-off slot of a round end laser generator and spill and several laser sensors on the inside of laser pick-off slot；Swash
Light device is gone up and down to designated position, and it is 1mm, the flat laser with a thickness of 10um that flat laser generator, which generates width, and laser is through stone
By specifying the laser sensor in region to receive in laser pick-off slot after black alkene reflection；Laser sensor in non-designated region receives
When being more than setting value to the laser intensity variation that the laser sensor in laser or specified region receives, then round end laser is opened
Generator generates the Column laser that radius is 10um, and Column laser is scanned along the width direction of flat laser, and Column laser is through stone
On black alkene and reflecting mirror reflection laser sensor, convenient for calculating the position on graphene with stain；
Operating unit is provided with lateral shifting in mobile station including mobile station and setting fixator and reflecting mirror on a mobile station
Dynamic device and longitudinal movement device, mobile station and optical screen are electrically connected with the controller；Fixator is set to stone for fixing graphene, reflecting mirror
Below black alkene, optical screen is set to the side of fixator, for generating monochromatic light；When mobile station is mobile, make the stone being set on fixator
Black alkene moves horizontally, reflection laser to laser sensor；
Photographing unit, including mechanism of taking pictures, mechanism of taking pictures include camera, the telescopic device at camera gun and can
Mobile magnifying glass and optical screen；Magnifying glass is movable to telescopic device front end, convenient for taking pictures；Reflect the monochromatic light that optical screen generates
It is taken pictures by camera；
Vacuum unit, including seal closure, apparatus for vacuum producing and air blown producer；Apparatus for vacuum producing include vacuum motor, gas outlet, bleeding point and
Check valve between gas outlet and bleeding point is set；Air blown producer includes nitrogen gas tank, solenoid valve and air blast head, and air blast head is by controlling
Device control rotation processed；Seal closure cooperates rack to seal scanning element, operating unit and photographing unit；Include in nitrogen gas tank
88% nitrogen, 5% helium and 7% hydrogen；
Image processing unit, for carrying out image procossing to the collected picture of photographing unit；
Control unit is connected with scanning element, operating unit, photographing unit and vacuum unit, image processing unit respectively, is used in combination
In control each unit；
The control method of control system:
(1), seal closure is closed, and detects the sealing condition at seal closure gap；
(2), control unit acts it with the revolving speed of 180-200r/min to the electric current of vacuum motor 5-5.5A and extracts sealing out
Air in cover makes the absolute pressure 80-88kpa in seal closure；
(3), control unit control air blown producer is opened, and is controlled air blast head and injected nitrogen stream into seal closure, to blow afloat seal chamber
Interior dust；
(4), the electric current that control unit increases supply vacuum motor improves its revolving speed to 230-240r/min；Make seal closure simultaneously
Interior absolute pressure is not higher than 80kpa；
(5), after 5-8min, air blown producer is closed, and to being further depressurized to absolute pressure 30-35kpa in seal closure；
(6), scanning element is opened, control laser is gone up and down to apart from mobile station 20cm-22cm high, controls flat laser generator
Generation width is 1mm, the band shape laser with a thickness of 10um；
(7), control unit control mobile station is transversely and horizontally moved with the speed of 60cm/min, and reflective mirror is made to be moved to band shape laser
Place, reflective mirror will be with shape laser reflection to laser sensor at；
(8), reflective mirror is swept with shape laser with the velocity scanning reflecting mirror of 2.5cm/min in the position for adjusting mobile station
It retouches, laser sensor receives band shape laser；Control unit records the position of mobile station, and records reception simultaneously with shape laser
The position of laser sensor and laser intensity；
(9), graphene is horizontally arranged on the fixator above reflective mirror, adjustment mobile station utilizes band shape laser with 2.5cm/
The speed of min carries out transversal scanning to graphene, and control unit, which is detected again and recorded, receives the laser sensor with shape laser
Position and laser intensity and mobile station position；The data that control unit comparison front and back records, when reception is with shape laser
When the position of laser sensor deflects or laser intensity variation is greater than 2.75%, stops mobile station movement and close flat
Laser generator；Record current flat laser-scanning position；
(10), Column laser is opened, Column laser is to the scan position of laser flat before graphene with the speed of 0.2cm/min
Carry out longitudinal scanning；When receive Column laser laser sensor position deflect or laser intensity variable quantity be greater than 6%
When, close laser；It is stain position that control unit, which marks scan position of the Column laser on graphene,；
(11), behind control unit label stain position, optical screen and camera are opened；Optical screen and position of camera are adjusted, makes to take a picture
Machine is to be directed at the stain position of graphene, and using the optical screen through mirror reflection as background；
(12), it adjusts telescopic device and controls the movement of magnifying glass, camera is made to focus stain position；
(13), optical screen is adjusted to white screen, camera carries out continuously taking pictures for the interval 0.1ms to stain position；Obtain 20-30
Photo；
(14), the photo that photographing unit will acquire is transferred in control unit, has control unit to carry out judgement processing；
(15), the color for adjusting optical screen more than three times, every time continues stain position and takes pictures and obtain 20-30 photos, then
It repeats step (14)；
(16), control unit controls photographing unit tenth skill, and controls laser and continue to scan on；
(17), it is L1 that a Target Photo is transferred to image processing unit and Target Photo is cut into several side lengths by control unit
Square sub-pictures, be unit length by the side length L1 of origin, sub-pictures of the midpoint of Target Photo, establish rectangular co-ordinate
System；It obtains the background average RGB value of target context picture and records；In Target Photo, using origin as the center of circle, 2L1 is radius
Draw limit circle；
(18), a comparison picture same or similar with Target Photo background is transferred to image processing unit simultaneously by control unit
The picture is cut, the average RGB value of the comparison picture is adjusted, is allowed to identical as the average RGB value of Target Photo；Dislocation is covered
Onto Target Photo, make the central point of the picture be limited to limit circle in and is not overlapped with origin, then delete target picture with
Compare the identical sub-pictures of rgb value in picture；
(19), step (18) are repeated until the picture of same color background all covers on Target Photo；
(20), circumscribed circle is drawn to remaining sub-pictures, the center of circle for measuring circumscribed circle is (m, n) coordinate and marks the coordinate；
(21), the Target Photo of another background is replaced, step (17)-(20) are repeated；Obtain another label coordinate；
(22), step (21) are repeated until the use having powerful connections；Extract all labeled (m, n) coordinates；All if (m, n)
Coordinate is respectively positioned in the region of specified size, and the coordinate label number in the region is greater than designated value, then marks in the region
With stain；
(23), reacquire Target Photo, midpoint be origin, sub-pictures side length L2 be unit length, establish rectangular coordinate system,
L2=5L1；Target Photo is cut into the sub-pictures that several side lengths are L2；
(24), the region that label is in step (22) corresponds in coordinate system；If multiple regions are close and have continuity,
Then the region has rejudged inviolateness；If multiple regions are not close or do not have continuity, it is further processed；
(25), reacquire a Target Photo, midpoint be origin, sub-pictures side length L2 be unit length, establish rectangular co-ordinate
System, L3=0.3L1；The Target Photo is cut into the sub-pictures that several side lengths are L3；
(26), the region that label is in step (22) is corresponded in coordinate system；Retain rgb value and background in the region
The part that the difference of rgb value is greater than the set value；And determine that the reservation region has stain.
2. multi-layer graphene dust detection device according to claim 1, which is characterized in that the lifter is high, medium and low
Three gears, respectively correspond friction speed；The movement speed of low or first gear is 5cm/min.
3. multi-layer graphene dust detection device according to claim 2, which is characterized in that the seal closure is opaque
Seal closure；Observation panel to be opened/closed is equipped on seal closure.
4. multi-layer graphene dust detection device according to claim 3, which is characterized in that the air blast head of the air blown producer
It is upper that there is flat nozzle.
5. multi-layer graphene dust detection device according to claim 4, which is characterized in that the vacuum motor uses
The three-phase alternating current stepper motor of 220v；The gas outlet is greater than bleeding point.
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| CN111272080A (en) * | 2020-02-13 | 2020-06-12 | 深圳市智慧恒迪科技有限公司 | Full-automatic laser scanning tester |
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| CN108469500A (en) * | 2018-05-24 | 2018-08-31 | 湖南国盛石墨科技有限公司 | A kind of graphene detection graphene surface detector |
| CN112798632A (en) * | 2020-12-17 | 2021-05-14 | 湖南铁路科技职业技术学院 | Multilayer graphene stain detection device |
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| CN1104329A (en) * | 1993-06-25 | 1995-06-28 | 松下电器产业株式会社 | Apparatus and method for detecting out appearance of electronic elements |
| CN202583078U (en) * | 2012-04-17 | 2012-12-05 | 宜兴爱特盟光电科技有限公司 | Crystal microdefect scanner |
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| CN205120619U (en) * | 2015-10-22 | 2016-03-30 | 夏烬楚 | Multilayer graphite alkene stain detection device |
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| RU2141647C1 (en) * | 1998-11-30 | 1999-11-20 | Войналович Александр Владимирович | Analyzed surface control method and scanning surface analyzer |
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|---|---|---|---|---|
| CN1104329A (en) * | 1993-06-25 | 1995-06-28 | 松下电器产业株式会社 | Apparatus and method for detecting out appearance of electronic elements |
| CN202583078U (en) * | 2012-04-17 | 2012-12-05 | 宜兴爱特盟光电科技有限公司 | Crystal microdefect scanner |
| KR20140028831A (en) * | 2012-08-31 | 2014-03-10 | (주)유텍시스템 | Method for inspecting sapphire wafer |
| CN104871294A (en) * | 2012-10-10 | 2015-08-26 | 英派尔科技开发有限公司 | Defect detection in saturable absorbers |
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| CN111272080A (en) * | 2020-02-13 | 2020-06-12 | 深圳市智慧恒迪科技有限公司 | Full-automatic laser scanning tester |
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