JPS6476659A - Electron beam microanalyzer - Google Patents
Electron beam microanalyzerInfo
- Publication number
- JPS6476659A JPS6476659A JP62234327A JP23432787A JPS6476659A JP S6476659 A JPS6476659 A JP S6476659A JP 62234327 A JP62234327 A JP 62234327A JP 23432787 A JP23432787 A JP 23432787A JP S6476659 A JPS6476659 A JP S6476659A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- spattering
- observation
- composition analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To perform the observation or composition analysis inside a sample by spattering the sample surface with an ion gun in the mirror body of an electron beam microanalyzer. CONSTITUTION:Fluorescent X-rays 13 and secondary electrons 15 are generated from the surface of a sample by the radiation of an electron beam 12. The fluorescent X-rays 13 are spectrum-analyzed by an X-ray spectroscope 10 and detected by an X-ray detector 9. The secondary electrons generated from a sample 6a are detected by a secondary electron detector 8. For the spattering of the sample 6a by an ion beam 14 generated from an ion gun 11, the sample 6a is moved to the position for spattering by a sample moving device 7, and the sample surface is spattered by the ion beam 14 of the ion gun 11. A sample 6b is then moved to the position for the observation or composition analysis of the sample by the sample moving device 7 again, and the observation or composition analysis of the sample surface is performed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62234327A JPS6476659A (en) | 1987-09-17 | 1987-09-17 | Electron beam microanalyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62234327A JPS6476659A (en) | 1987-09-17 | 1987-09-17 | Electron beam microanalyzer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6476659A true JPS6476659A (en) | 1989-03-22 |
Family
ID=16969266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62234327A Pending JPS6476659A (en) | 1987-09-17 | 1987-09-17 | Electron beam microanalyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6476659A (en) |
-
1987
- 1987-09-17 JP JP62234327A patent/JPS6476659A/en active Pending
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