JPS6488238A - Surface inspecting apparatus - Google Patents

Surface inspecting apparatus

Info

Publication number
JPS6488238A
JPS6488238A JP24411887A JP24411887A JPS6488238A JP S6488238 A JPS6488238 A JP S6488238A JP 24411887 A JP24411887 A JP 24411887A JP 24411887 A JP24411887 A JP 24411887A JP S6488238 A JPS6488238 A JP S6488238A
Authority
JP
Japan
Prior art keywords
converters
reflected
accuracy
laser beam
luminous flux
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24411887A
Other languages
Japanese (ja)
Other versions
JPH0814547B2 (en
Inventor
Chiaki Fukazawa
Masayoshi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62244118A priority Critical patent/JPH0814547B2/en
Publication of JPS6488238A publication Critical patent/JPS6488238A/en
Publication of JPH0814547B2 publication Critical patent/JPH0814547B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To enhance resolving power and accuracy, by separating only desired detection light, for example, only the detection light peculiar to a specific flaw and receiving the same without receiving the effect of disturbance. CONSTITUTION:The laser beam 7 from a projection means 5 is reflected from the surface of an object 1 to be inspected and photoelectric converters 11a, 11b, 11c are respectively arranged at positions P, O, R having different heights. Further, directional sensitivity characteristics like IP, IQ, IR are respectively provided to the converters 11a, 11b, 11c. Next, the laser beam 7 is reflected in luminous flux distribution like reflected luminous flux distribution 19 and each of the converters 11a, 11b, 11c is allowed to catch the incident beam corresponding to each of then directional sensitivity characteristics. Even when an incident point is moved, the specific diffraction pattern moving corresponding to the movement of the incident point is selectively detected by each of the converters 11a, 11b, 11c. Therefore, resolving power and accuracy can be enhanced.
JP62244118A 1987-09-30 1987-09-30 Surface inspection device Expired - Lifetime JPH0814547B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62244118A JPH0814547B2 (en) 1987-09-30 1987-09-30 Surface inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62244118A JPH0814547B2 (en) 1987-09-30 1987-09-30 Surface inspection device

Publications (2)

Publication Number Publication Date
JPS6488238A true JPS6488238A (en) 1989-04-03
JPH0814547B2 JPH0814547B2 (en) 1996-02-14

Family

ID=17114029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62244118A Expired - Lifetime JPH0814547B2 (en) 1987-09-30 1987-09-30 Surface inspection device

Country Status (1)

Country Link
JP (1) JPH0814547B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100878400B1 (en) * 2001-06-04 2009-01-13 하마마츠 포토닉스 가부시키가이샤 Pin hole detector
JP6039119B1 (en) * 2016-02-23 2016-12-07 株式会社ヒューテック Defect inspection equipment
JP2019120540A (en) * 2017-12-28 2019-07-22 タカノ株式会社 Defect inspection device, and defect inspection device manufacturing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55129733A (en) * 1980-03-10 1980-10-07 Matsushita Electric Works Ltd Color deficiency detection unit for sheet material

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55129733A (en) * 1980-03-10 1980-10-07 Matsushita Electric Works Ltd Color deficiency detection unit for sheet material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100878400B1 (en) * 2001-06-04 2009-01-13 하마마츠 포토닉스 가부시키가이샤 Pin hole detector
JP6039119B1 (en) * 2016-02-23 2016-12-07 株式会社ヒューテック Defect inspection equipment
JP2019120540A (en) * 2017-12-28 2019-07-22 タカノ株式会社 Defect inspection device, and defect inspection device manufacturing method

Also Published As

Publication number Publication date
JPH0814547B2 (en) 1996-02-14

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