JPS6488238A - Surface inspecting apparatus - Google Patents
Surface inspecting apparatusInfo
- Publication number
- JPS6488238A JPS6488238A JP24411887A JP24411887A JPS6488238A JP S6488238 A JPS6488238 A JP S6488238A JP 24411887 A JP24411887 A JP 24411887A JP 24411887 A JP24411887 A JP 24411887A JP S6488238 A JPS6488238 A JP S6488238A
- Authority
- JP
- Japan
- Prior art keywords
- converters
- reflected
- accuracy
- laser beam
- luminous flux
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To enhance resolving power and accuracy, by separating only desired detection light, for example, only the detection light peculiar to a specific flaw and receiving the same without receiving the effect of disturbance. CONSTITUTION:The laser beam 7 from a projection means 5 is reflected from the surface of an object 1 to be inspected and photoelectric converters 11a, 11b, 11c are respectively arranged at positions P, O, R having different heights. Further, directional sensitivity characteristics like IP, IQ, IR are respectively provided to the converters 11a, 11b, 11c. Next, the laser beam 7 is reflected in luminous flux distribution like reflected luminous flux distribution 19 and each of the converters 11a, 11b, 11c is allowed to catch the incident beam corresponding to each of then directional sensitivity characteristics. Even when an incident point is moved, the specific diffraction pattern moving corresponding to the movement of the incident point is selectively detected by each of the converters 11a, 11b, 11c. Therefore, resolving power and accuracy can be enhanced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62244118A JPH0814547B2 (en) | 1987-09-30 | 1987-09-30 | Surface inspection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62244118A JPH0814547B2 (en) | 1987-09-30 | 1987-09-30 | Surface inspection device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6488238A true JPS6488238A (en) | 1989-04-03 |
JPH0814547B2 JPH0814547B2 (en) | 1996-02-14 |
Family
ID=17114029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62244118A Expired - Lifetime JPH0814547B2 (en) | 1987-09-30 | 1987-09-30 | Surface inspection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0814547B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100878400B1 (en) * | 2001-06-04 | 2009-01-13 | 하마마츠 포토닉스 가부시키가이샤 | Pin hole detector |
JP6039119B1 (en) * | 2016-02-23 | 2016-12-07 | 株式会社ヒューテック | Defect inspection equipment |
JP2019120540A (en) * | 2017-12-28 | 2019-07-22 | タカノ株式会社 | Defect inspection device, and defect inspection device manufacturing method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55129733A (en) * | 1980-03-10 | 1980-10-07 | Matsushita Electric Works Ltd | Color deficiency detection unit for sheet material |
-
1987
- 1987-09-30 JP JP62244118A patent/JPH0814547B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55129733A (en) * | 1980-03-10 | 1980-10-07 | Matsushita Electric Works Ltd | Color deficiency detection unit for sheet material |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100878400B1 (en) * | 2001-06-04 | 2009-01-13 | 하마마츠 포토닉스 가부시키가이샤 | Pin hole detector |
JP6039119B1 (en) * | 2016-02-23 | 2016-12-07 | 株式会社ヒューテック | Defect inspection equipment |
JP2019120540A (en) * | 2017-12-28 | 2019-07-22 | タカノ株式会社 | Defect inspection device, and defect inspection device manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
JPH0814547B2 (en) | 1996-02-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment |
Year of fee payment: 12 Free format text: PAYMENT UNTIL: 20080214 |