JPH0814547B2 - Surface inspection device - Google Patents
Surface inspection deviceInfo
- Publication number
- JPH0814547B2 JPH0814547B2 JP62244118A JP24411887A JPH0814547B2 JP H0814547 B2 JPH0814547 B2 JP H0814547B2 JP 62244118 A JP62244118 A JP 62244118A JP 24411887 A JP24411887 A JP 24411887A JP H0814547 B2 JPH0814547 B2 JP H0814547B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- receiving means
- light receiving
- inspected
- surface inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
【発明の詳細な説明】 ［発明の目的］ （産業上の利用分野） 本発明は、金属板、ガラス板あるいは紙等の被検査体
の表面を離間的に、例えば光学的に走査して当該被検査
体の表面の欠陥を検出する表面検査装置に関し、特に前
記走査に基づく情報を広範囲に収集し、幅広の被検査体
の表面の欠陥を確実に検出するようにした表面検査装置
に関するものである。DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Industrial field of application) The present invention relates to a method in which the surface of an object to be inspected, such as a metal plate, a glass plate or a paper, is spaced apart, for example optically scanned. The present invention relates to a surface inspection apparatus for detecting defects on the surface of an object to be inspected, and particularly to a surface inspection apparatus for collecting information based on the above-mentioned scanning in a wide range and surely detecting defects on the surface of a wide object to be inspected. is there.
（従来の技術） 近年においては、鋼板、アルミ板等の表面に存在する
キズ等の欠陥を検査するための種々の装置が開発されて
いる。(Prior Art) In recent years, various devices have been developed for inspecting defects such as scratches existing on the surfaces of steel plates, aluminum plates and the like.
従来のこのような装置としては、フライングスポット
法あるいはフライングイメージ法による表面検査装置が
知られている。即ち、例えばフライングスポット法によ
る場合は、冷延鋼板等の被検査体表面は鏡面に近い反射
特性があることから、第11図に示すようにレーザ等の光
源105を用いてスポット状のレーザ光107を冷延鋼板等の
被検査体101の表面に射光し、この冷延鋼板の表面によ
る反射光の回折パターン109をスクリーン115に形成させ
て、冷延鋼板の表面に存在するキズ等の欠陥を検査する
ようにしている。As such a conventional device, a surface inspection device by a flying spot method or a flying image method is known. That is, for example, in the case of the flying spot method, since the surface of the object to be inspected such as a cold rolled steel plate has a reflection characteristic close to a mirror surface, a spot-shaped laser beam is used by using a light source 105 such as a laser as shown in FIG. 107 the surface of the object 101 to be inspected, such as cold-rolled steel sheet, to form a diffraction pattern 109 of the reflected light by the surface of the cold-rolled steel sheet on the screen 115, defects such as scratches present on the surface of the cold-rolled steel sheet I am trying to inspect.
従来のこのような表面検査装置を第12図を参照して具
体的に説明すると、被検査体101は移動方向103へ所定の
速度で移動しており、この移動する被検査体101の上方
に配置した光源105からスポット状のレーザ光107を投射
して被検査体101の表面を走査する。受光レンズ117は被
検査体101の表面で反射さけたレーザ光を受光し、その
焦点を含む面に配置された測定面119に０次の回折光、
即ち正反射光を集光させて、いわゆる静止像の回折パタ
ーンを形成する（第11図参照）。この測定面119は、複
数の光源変換素子111a,111b,111cを配置しており、それ
ぞれの位置に形成された前述の回折パターンに対応する
電気信号を出力する。このような光電変換素子111a,111
b,111cの出力信号を解析することにより、前記被検査物
体101の表面の欠陥を判別する。Specifically explaining such a conventional surface inspection device with reference to FIG. 12, the object 101 to be inspected is moving in a moving direction 103 at a predetermined speed, and above the moving object to be inspected 101. A spot-shaped laser beam 107 is projected from the arranged light source 105 to scan the surface of the inspection object 101. The light receiving lens 117 receives the laser light reflected by the surface of the object 101 to be inspected, and diffracts light of 0th order on the measurement surface 119 arranged on the surface including the focus thereof.
That is, the specularly reflected light is condensed to form a so-called still image diffraction pattern (see FIG. 11). A plurality of light source conversion elements 111a, 111b, 111c are arranged on this measurement surface 119, and an electric signal corresponding to the above-mentioned diffraction pattern formed at each position is output. Such photoelectric conversion elements 111a, 111
Defects on the surface of the object 101 to be inspected are determined by analyzing the output signals of b and 111c.
（発明が解決しようとする問題点） しかしながら、第12図に示した従来例では欠陥を検出
し得る被検査体101の幅は、受光レンズ117で制約され、
最大でも200〜300mmが限界であり（受光レンズの光学的
限界のため）、更に走査による情報を幅広く収集できる
ように改善されることが望まれていた。(Problems to be Solved by the Invention) However, in the conventional example shown in FIG. 12, the width of the inspection object 101 capable of detecting a defect is restricted by the light receiving lens 117,
The limit is 200 to 300 mm at the maximum (due to the optical limit of the light receiving lens), and further improvement has been desired so that information obtained by scanning can be collected widely.
本発明は上記問題点に鑑みてなされたもので、走査に
より情報を広範囲に収集して、幅広の被検査体表面の欠
陥を確実に検出することのできる表面検査装置を提供す
ることを目的とする。The present invention has been made in view of the above problems, and an object of the present invention is to provide a surface inspection apparatus capable of surely detecting defects on the surface of a wide inspection object by collecting information in a wide range by scanning. To do.
［発明の構成］ （問題点を解決するための手段） 上記目的を達成するために、光学的手段を用いて被検
査体の表面を走査しつつ投射し、その反射光を受光手段
で受光することによって得られた検出光を解析して当該
被検査体表面の欠陥を判別する装置における、前記受光
手段を、指向性を有し、所定の入射角の反射光のみを受
光するように構成した。[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, an optical means is used to scan and project the surface of an object to be inspected, and the reflected light is received by a light receiving means. In the device for analyzing the detected light obtained by determining the defect on the surface of the object to be inspected, the light receiving means has directivity and is configured to receive only the reflected light of a predetermined incident angle. .
（作用） 本発明における表面検査装置においては指向性を有す
る受光手段が走査範囲の全域に渡って反射光を受光し、
この受光した検出光を解析することによって幅広の被検
査体の表面の欠陥を全域に渡って検査する。(Operation) In the surface inspection apparatus of the present invention, the light receiving means having directivity receives the reflected light over the entire scanning range,
By analyzing this received detection light, defects on the surface of a wide inspection object are inspected over the entire area.
（実施例） 以下、本発明の実施例を図面を参照して詳細に説明す
る。(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
第１図は本発明の一実施例を示した斜視図、第２図及
び第３図は本発明の原理を示した説明図である。FIG. 1 is a perspective view showing an embodiment of the present invention, and FIGS. 2 and 3 are explanatory views showing the principle of the present invention.
まず、第２図及び第３図を用いて本発明の原理を説明
すると、移動方向３へ移動する被検査体１の表面に向け
てレーザ光７を投射角で投射すると、レーザ光７が被
検査体１の表面で反射され、この反射光に基づく回折パ
ターン９がスクリーン15上に形成される。この回折パタ
ーン９は被検査体１の表面に存在する微細な条痕等の欠
陥に応じて形成される。また、この回折パターン９は第
３図に示すように、反射光17とスクリーン15上の法線13
との交点をＧとすると、法線13とＹ軸との交点H0を中心
とし、且つ線分GH0を半径とする円弧上に形成される。
即ち、レーザ光７の入射点０で反射された反射光は、主
として入射点０を頂点とし、且つ0H0を中心軸とする円
錐状に広がってスクリーン15上に投射される。First, the principle of the present invention will be described with reference to FIGS. 2 and 3. When the laser light 7 is projected at a projection angle toward the surface of the DUT 1 moving in the moving direction 3, the laser light 7 will be projected. The diffraction pattern 9 reflected by the surface of the inspection body 1 and based on this reflected light is formed on the screen 15. The diffraction pattern 9 is formed according to defects such as fine scratches existing on the surface of the inspection object 1. Further, this diffraction pattern 9 is, as shown in FIG. 3, reflected light 17 and a normal line 13 on the screen 15.
Let G be the point of intersection with and, the line is formed on an arc centered on the point of intersection H 0 of the normal line 13 and the Y axis and having a radius of the line segment GH 0 .
That is, the reflected light of the laser light 7 reflected at the incident point 0 is projected on the screen 15 mainly in a conical shape with the incident point 0 as the apex and 0H 0 as the central axis.
法線13上の任意の点E0を通り、且つＸ軸に平行な線上
に存在するE1を例にとって、この点E1の近傍に形成され
る回折パターンを検出する場合を考えると、位置E1にお
ける検出部の特性を光の入射方向である0E1の方向から
入射する光に対して強い指向性を持たせるようにすれば
よい。即ち、∠E0E1O＝θの方向の回折光に強い指向性
を持たせることにより、例えば入射点が０からＦへ移動
した場合には、FE1の方向から入射する光は除去され
る。Taking E 1 existing on a line parallel to the X axis and passing through an arbitrary point E 0 on the normal line 13 as an example, consider the case where the diffraction pattern formed near this point E 1 is detected. the characteristic of the detection unit in the E 1 may be caused to have a strong directivity to the light incident from the direction of 0E 1 is the incident direction of light. That is, by providing the diffracted light in the direction of ∠E0E1O = θ with a strong directivity, for example, when the incident point moves from 0 to F, the light incident from the direction of FE 1 is removed.
同様の点Ｆに対応する点をE2とすると、この点E2にお
ける指向性も前述と同様に∠E0E2F＝θの方向に強い指
向性を持たせることにより、FE2の方向からの反射光に
よる回折パターン即ち、前述の点E1における回折パター
ンと同様な回折パターンを選択的に検出することができ
る。When E 2 points corresponding to the same point F, by which directionality also have a strong directivity in the direction of ∠E0E2F = θ in the same manner as described above in this respect E 2, the reflected light from the direction of the FE 2 It is possible to selectively detect the diffraction pattern according to, that is, the diffraction pattern similar to the diffraction pattern at the point E 1 .
次に第１図及び第４図の第１図に示した本発明の実施
例が適用される表面検査装置のブロック図を参照して構
成を説明する。移動方向３へ所定速度で移動する幅広の
被検査体１の上方に投射手段５を配置している。この投
射手段５はレーザ光を発射する光源及びレーザ光のスポ
ット形状を調整するコリメータ等で構成される。投射手
段５から投射されたレーザ光７は被検査体１の表面を走
査し、該表面で反射される。例えば第１図に示すように
レーザ光７の入射点が０である場合には、入射点０を頂
点とし、0H0を中心軸としる円錐状に反射される。この
ような反射光に基づく回折パターン９を電気信号として
検出するための複数の棒状の光電変換器11a,11b,11cが
走査方向であるＸ軸と平行に配置されている。これらの
各光電変換器11a,11b,11cは後述するように特定の回折
パターンを選択的に検出するため、それぞれ特定の方向
から入射する光に対して指向性をもたせている。Next, the configuration will be described with reference to the block diagrams of the surface inspection apparatus to which the embodiment of the present invention shown in FIG. 1 and FIG. 4 is applied. The projection means 5 is arranged above the wide inspected object 1 which moves in the moving direction 3 at a predetermined speed. The projection means 5 is composed of a light source that emits laser light, a collimator that adjusts the spot shape of the laser light, and the like. The laser light 7 projected from the projection means 5 scans the surface of the inspection object 1 and is reflected by the surface. For example, as shown in FIG. 1, when the incident point of the laser beam 7 is 0, it is reflected in a conical shape with the incident point 0 as the apex and 0H 0 as the central axis. A plurality of rod-shaped photoelectric converters 11a, 11b, 11c for detecting the diffraction pattern 9 based on such reflected light as an electric signal are arranged parallel to the X axis which is the scanning direction. Since each of these photoelectric converters 11a, 11b, 11c selectively detects a specific diffraction pattern as described later, each photoelectric converter 11a, 11b, 11c has directivity with respect to light incident from a specific direction.
第４図に示す検出部21には、第１図に示した複数の光
電変換器11a,11b,11cが組み込まれており、各光電変換
器11a,11b,11cで電気信号に変換された検出情報が出力
される。特徴抽出回路23は検出部21の検出情報に基づい
てそれぞれの欠陥の特徴、例えば欠陥の長さ等を抽出す
る。メモリ25には予め、複数の欠陥の種類に対応したパ
ラメータが格納されており、類似度演算回路27は特徴抽
出回路23からの情報を解析し、前述のパラメータとの類
似度を演算する。判別回路29は類似度演算回路27の演算
結果に基づいて欠陥の種類、例えばキズ、汚れ等を判定
する。The plurality of photoelectric converters 11a, 11b, 11c shown in FIG. 1 are incorporated in the detection unit 21 shown in FIG. 4, and the detection converted into an electric signal by each photoelectric converter 11a, 11b, 11c. Information is output. The feature extraction circuit 23 extracts the features of each defect, such as the length of the defect, based on the detection information of the detection unit 21. Parameters corresponding to a plurality of defect types are stored in advance in the memory 25, and the similarity calculation circuit 27 analyzes the information from the feature extraction circuit 23 and calculates the similarity with the above-mentioned parameters. The discriminating circuit 29 discriminates the type of defect, for example, scratch or stain, based on the calculation result of the similarity calculating circuit 27.
第５図は第１図の作用を示した説明図であり、第５図
（Ａ）はＸ軸方向から見た説明図、第５図（Ｂ）はＺ軸
方向から見た説明図、第５図（Ｃ）はＹ軸方向から見た
説明図である。FIG. 5 is an explanatory view showing the operation of FIG. 1, FIG. 5 (A) is an explanatory view seen from the X-axis direction, and FIG. 5 (B) is an explanatory view seen from the Z-axis direction. FIG. 5C is an explanatory view seen from the Y-axis direction.
次に第５図を参照して本発明の作用を説明する。 Next, the operation of the present invention will be described with reference to FIG.
投射手段５から投射されたレーザ光は被検査体１の表
面で反射される（第５図（Ａ）参照）。高さH1の位置Ｐ
には光電変換器11aが配置され、高さH2の位置Ｑには光
電変換器11bが配置され、さらに高さH3の位置Ｒには光
電変換器11cが配置されている（第５図（Ａ）及び
（Ｃ）参照）。この光電変換器11a,11b,11cはそれぞれ
∠H1PO,∠H2QO,∠H3ROの角度方向に対しての特定の回折
パターンを選択的に検出するような指向性を有している
（第５図（Ｃ）参照。即ち、光電変換器11a,11b,11cは
それぞれIP,IQ,IRに示すような指向感度特性を有してい
る（第５図（Ａ）及び（Ｂ）参照）。The laser light projected from the projection means 5 is reflected on the surface of the device under test 1 (see FIG. 5 (A)). Position P at height H 1
A photoelectric converter 11a is arranged at the position H, a photoelectric converter 11b is arranged at a position Q at a height H 2 , and a photoelectric converter 11c is further arranged at a position R at a height H 3 (Fig. 5). (See (A) and (C)). Each of the photoelectric converters 11a, 11b, 11c has a directivity that selectively detects a specific diffraction pattern in the angular direction of ∠H1PO, ∠H2QO, ∠H3RO (Fig. 5 ( See C), that is, the photoelectric converters 11a, 11b, and 11c have directivity characteristics as shown by I P , I Q , and I R , respectively (see FIGS. 5A and 5B).
レーザ光７が反射光束分布19に示すような光束分布で
反射されると、各光電変換器11a,11b,11cはそれぞれ指
向感度特性IP,IQ,IRに対応して入射する光を捕らえ、こ
れらの入射光に基づいて、それぞれの回折パターンの特
定な成分φP,φQ,φＲを分離検出する第５図（Ｂ）参
照。When the laser light 7 is reflected by the luminous flux distribution shown in the reflected luminous flux distribution 19, the photoelectric converters 11a, 11b, 11c respectively reflect the incident light corresponding to the directional sensitivity characteristics I P , I Q , I R. See FIG. 5 (B), which captures and separately detects specific components φ P , φ Q , and φ R of the respective diffraction patterns based on these incident lights.
このような動作は投射手段５の走査によりレーザ光７
の入射点が移動した場合も同様である。即ち、光電変換
器11a,11b,11cはそれぞれ特定の指向感度特性IP,IQ,IR
を有していることから、レーザ光７の入射点が移動して
もこの入射点の移動に対応して移動する特定の回折パタ
ーンを選択的に検出する。従って、各光電変換器11a,11
b,11cはそれぞれ投射手段５の走査に応じて移動する回
折パターンを選択的に検出することができ、幅広の被検
査体１の全域に渡って検出光を得ることができる。尚、
このとき投射手段５の法線13に対する入射角を40度から
60度に設定すると効率のよい検査を行なうことができ
る。Such an operation is performed by scanning the laser light 7 by the scanning of the projection means 5.
The same applies when the incident point of is moved. That is, each of the photoelectric converters 11a, 11b, 11c has a specific directional sensitivity characteristic I P , I Q , I R.
Therefore, even if the incident point of the laser beam 7 moves, a specific diffraction pattern that moves corresponding to the movement of the incident point is selectively detected. Therefore, each photoelectric converter 11a, 11
Each of b and 11c can selectively detect the diffraction pattern that moves in response to the scanning of the projection means 5, and the detection light can be obtained over the entire area of the wide inspected object 1. still,
At this time, the incident angle of the projection means 5 with respect to the normal line 13 is from 40 degrees.
If it is set to 60 degrees, efficient inspection can be performed.
第６図は本発明の第２の実施例の要部を示した説明図
である。FIG. 6 is an explanatory view showing the essential parts of the second embodiment of the present invention.
第６図に示した例では、走査に応じて移動する回折パ
ターンを検出する受光手段としての複数の光電変換器12
a,12b,12c,12d,12eのうち、光電変換器12eをレーザ光７
の入射点0,即ち走査点より投射手段５側に配置したこと
を特徴とする。In the example shown in FIG. 6, a plurality of photoelectric converters 12 as light receiving means for detecting a diffraction pattern that moves in response to scanning.
Of a, 12b, 12c, 12d, and 12e, the photoelectric converter 12e is set to laser light 7
It is characterized in that it is arranged on the projection means 5 side from the incident point 0, that is, the scanning point.
このように構成すると、第１図に示した実施例と比較
して走査に基づく情報を更に広範囲に収集することがで
きる。With this configuration, it is possible to collect information based on scanning in a wider range as compared with the embodiment shown in FIG.
第７図は本発明の第３の実施例の要部を示した説明図
である。FIG. 7 is an explanatory view showing the main parts of the third embodiment of the present invention.
第７図に示した例では、複数の光電変換器14a,14b,14
c,14d,14e,14fのうち、光電変換器14fを被検査体の走査
面と反対側に配置したことを特徴とする。In the example shown in FIG. 7, a plurality of photoelectric converters 14a, 14b, 14
Among c, 14d, 14e, and 14f, the photoelectric converter 14f is arranged on the side opposite to the scanning surface of the inspection object.
このように構成すると、ガラス等の透過性の被検査体
を透過した光による回折光を検出することができる。With this configuration, it is possible to detect the diffracted light due to the light transmitted through the transparent inspection object such as glass.
第８図は本発明の第４の実施例を示した説明図であ
る。第８図（Ａ）に示すように、移動回折パターン検出
手段として特定の方向から入射する光のみを通させる指
向性を有するフィルタ31と、このフィルタ31を透過して
円筒レンズ33で集光された光を光電変換する光電変換器
35とを設けたことを特徴とする。フィルタ31の前面は黒
色の塗装が施されるとともに、このフィルタ31は第８図
（Ｂ）に示すようなハニカム構造に形成され、このハニ
カムの向きに対応して指向性を選定することができる。FIG. 8 is an explanatory view showing the fourth embodiment of the present invention. As shown in FIG. 8 (A), as a moving diffraction pattern detecting means, a filter 31 having directivity that allows only light incident from a specific direction to pass through, and a cylindrical lens 33 that passes through the filter 31 and collects the light. Photoelectric converter for photoelectric conversion
35 and are provided. The front surface of the filter 31 is painted black, and the filter 31 is formed in a honeycomb structure as shown in FIG. 8 (B), and the directivity can be selected according to the direction of the honeycomb. .
また、フィルタ31のハニカムの径等の形状を調整する
ことにより、指向性の強さを任意に設定することができ
る。Further, by adjusting the shape of the filter 31 such as the diameter of the honeycomb, the directivity can be arbitrarily set.
第９図は第８図に示したフィルタの他の実施例を示し
た説明図である。第９図（Ａ）に示したフィルタ51は、
第９図（Ｂ）及び（Ｃ）に示すように右方向に角度αの
指向性をもたせたフィルタ層51aと、左方向に角度αの
指向性をもたせたフィルタ層51bとを交互に重ねて構成
したことを特徴とする。FIG. 9 is an explanatory view showing another embodiment of the filter shown in FIG. The filter 51 shown in FIG. 9 (A) is
As shown in FIGS. 9B and 9C, a filter layer 51a having a directivity of the angle α to the right and a filter layer 51b having a directivity of the angle α to the left are alternately stacked. It is characterized by being configured.
このように左右の方向に指向性をもたせたことによ
り、スリキズ等の欠陥により左右の両方向に同時に形成
される回折パターンを検出することができる。By providing directivity in the left and right directions in this way, it is possible to detect diffraction patterns that are simultaneously formed in both the left and right directions due to defects such as scratches.
第10図は本発明の第５の実施例を示した説明図であ
る。FIG. 10 is an explanatory view showing the fifth embodiment of the present invention.
第10図（Ａ）に示した例では、移動回折パターン検出
手段として、円筒レンズ71を介して得られた光の特定の
方向にそれぞれ指向性を有する複数の光ファイバ73と、
この光ファイバ73に接続された光電変換器75とで構成し
たことを特徴とする。In the example shown in FIG. 10 (A), a plurality of optical fibers 73 each having directivity in a specific direction of the light obtained via the cylindrical lens 71 are used as the moving diffraction pattern detecting means,
It is characterized by comprising a photoelectric converter 75 connected to the optical fiber 73.
光ファイバ73は第10図（Ｂ）に示すように各光ファイ
バの向きを変えることにより、それぞれの指向感度77a,
77b,77cを容易に調整することができる。即ち、ファイ
バ73の指向性を一定方向又は、左右両方向等の適宜の方
向に指向性をもたせることができる。The optical fiber 73 has a directional sensitivity of 77a, by changing the direction of each optical fiber as shown in FIG. 10 (B).
77b and 77c can be easily adjusted. That is, the directivity of the fiber 73 can be given in a fixed direction or in an appropriate direction such as both left and right directions.
尚、第１図に示した例では移動回折パターン検出手段
として、複数の光電変換器11a,11b,11cを用いた場合を
示したが、単一の光電変換器を用いて構成しても良い。
このように構成することによって、コストの低減を図る
ことができる。また光電変換器としては、光電子増倍管
やCCD等が適宜使用される。In the example shown in FIG. 1, a plurality of photoelectric converters 11a, 11b, 11c are used as the moving diffraction pattern detecting means, but a single photoelectric converter may be used. .
With this configuration, cost reduction can be achieved. Further, as the photoelectric converter, a photomultiplier tube, CCD or the like is appropriately used.
以上説明してきたように本実施例によれば、回折パタ
ーンを静止させることなく、投射手段の走査に応じて移
動する回折パターンをそのまま検出するようにしたこと
から、投射手段の走査による検出情報を広範囲に収集す
ることができ、幅広の被検査体の全域に渡って確実に検
出することができる。As described above, according to the present embodiment, the diffraction pattern that moves according to the scanning of the projection unit is detected as it is without stopping the diffraction pattern. It can be collected over a wide range and can be reliably detected over the entire wide range of the object to be inspected.
さらに、本実施例では板状の被検査体の表面を光学的
手段の走査によって検査するようにしたが、被検査体が
線状である場合も同様に検査できることはいうまでもな
い。Further, in the present embodiment, the surface of the plate-shaped inspection object is inspected by scanning with the optical means, but it is needless to say that the inspection can be similarly performed when the inspection object is linear.
［発明の効果］ 以上詳記したように本発明によれば、受光手段に指向
性を持たせ所定の入射角の反射光のみを受光するように
したので、幅広の被検査体の全域に渡って（即ち、該被
検査体の両端部にまで）反射光を確実に捕えることがで
きる。[Effects of the Invention] According to the present invention as described in detail above, since the light receiving means is made to have directivity and only the reflected light of a predetermined incident angle is received, it is possible to cover the entire area of a wide inspection object. The reflected light can be reliably captured (i.e., even to both ends of the inspection object).
第１図は本発明の一実施例を示した斜視図、第２図及び
第３図は本発明の原理を示した説明図、第４図は第１図
の実施例が適用される表面検査装置のブロック図、第５
図は第１図の作用を示した説明図、第６図は本発明の第
２実施例の要部を示した説明図、第７図は本発明の第３
実施例の要部を示した説明図、第８図は本発明の第４実
施例を示した説明図、第９図は第８図に示したフィルタ
の他の実施例を示した説明図、第10図は本発明の第５実
施例を示した説明図、第11図及び第12図は従来例を示し
た説明図である。 11a,11b,1c……光電変換器 31……光フィルタ、73……光ファイバFIG. 1 is a perspective view showing an embodiment of the present invention, FIGS. 2 and 3 are explanatory views showing the principle of the present invention, and FIG. 4 is a surface inspection to which the embodiment of FIG. 1 is applied. Block diagram of apparatus, fifth
FIG. 7 is an explanatory view showing the operation of FIG. 1, FIG. 6 is an explanatory view showing the essential parts of a second embodiment of the present invention, and FIG. 7 is a third view of the present invention.
FIG. 8 is an explanatory view showing a main part of the embodiment, FIG. 8 is an explanatory view showing a fourth embodiment of the present invention, and FIG. 9 is an explanatory view showing another embodiment of the filter shown in FIG. FIG. 10 is an explanatory view showing a fifth embodiment of the present invention, and FIGS. 11 and 12 are explanatory views showing a conventional example. 11a, 11b, 1c …… Photoelectric converter 31 …… Optical filter, 73 …… Optical fiber
Claims (8)
しつつ投射し、その反射光を受光手段で受光することに
よって得られた検出光を解析して当該被検査体表面の欠
陥を判別する装置において、 前記受光手段は、指向性を有し、所定の入射角の反射光
のみを受光することを特徴とする表面検査装置。1. A defect on the surface of the object to be inspected by analyzing the detected light obtained by projecting the surface of the object to be inspected by optical means while scanning and receiving the reflected light by the light receiving means. The surface inspection apparatus, wherein the light receiving means has directivity and receives only reflected light having a predetermined incident angle.
性を有することを特徴とする特許請求の範囲第１項記載
の表面検査装置。2. The surface inspection apparatus according to claim 1, wherein the light receiving means has directivity in a plurality of different directions.
向に指向性を有する複数の光電変換器で構成したことを
特徴とする特許請求の範囲第２項記載の表面検査装置。3. The surface inspection apparatus according to claim 2, wherein the light receiving means is composed of a plurality of photoelectric converters each having directivity in different specific directions.
査点より光学的手段側に配置したことを特徴とする特許
請求の範囲第３項記載の表面検査装置。4. The surface inspection apparatus according to claim 3, wherein said light receiving means has a predetermined number of photoelectric converters arranged on the optical means side from the scanning point.
検査体の走査面と反対側に配置して、当該被検査体を透
過した光を検出するようにしたことを特徴とする特許請
求の範囲第３項又は第４項記載の表面検査装置。5. The light receiving means is characterized in that a predetermined number of photoelectric converters are arranged on the side opposite to the scanning surface of the object to be inspected and the light transmitted through the object to be inspected is detected. The surface inspection device according to claim 3 or 4.
該光ファイバに接続された光電変換器とで構成したこと
を特徴とする特許請求の範囲第１項乃至第５項のいずれ
かに記載の表面検査装置。6. The light receiving means comprises a plurality of optical fibers and a photoelectric converter connected to the optical fibers, according to any one of claims 1 to 5. The surface inspection device described.
のみを透過するフィルタと、当該フィルタを透過した光
を光電変換する光電変換器とで構成したことを特徴とす
る特許請求の範囲第１項乃至第５項のいずれかに記載の
表面検査装置。7. The light receiving means comprises a filter that transmits only incident light from a specific direction and a photoelectric converter that photoelectrically converts the light transmitted through the filter. The surface inspection apparatus according to any one of items 1 to 5.
回折光を検出光として解析することを特徴とする特許請
求の範囲第１項乃至第７項のいずれかに記載の表面検査
装置。8. The surface inspection apparatus according to claim 1, wherein the light receiving means analyzes the diffracted light on the surface of the object to be inspected as detection light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62244118A JPH0814547B2 (en) | 1987-09-30 | 1987-09-30 | Surface inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62244118A JPH0814547B2 (en) | 1987-09-30 | 1987-09-30 | Surface inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6488238A JPS6488238A (en) | 1989-04-03 |
| JPH0814547B2 true JPH0814547B2 (en) | 1996-02-14 |
Family
ID=17114029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62244118A Expired - Lifetime JPH0814547B2 (en) | 1987-09-30 | 1987-09-30 | Surface inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0814547B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3806616B2 (en) * | 2001-06-04 | 2006-08-09 | 浜松ホトニクス株式会社 | Pinhole detector |
| JP6039119B1 (en) * | 2016-02-23 | 2016-12-07 | 株式会社ヒューテック | Defect inspection equipment |
| JP6956004B2 (en) * | 2017-12-28 | 2021-10-27 | タカノ株式会社 | Defect inspection equipment and manufacturing method of defect inspection equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55129733A (en) * | 1980-03-10 | 1980-10-07 | Matsushita Electric Works Ltd | Color deficiency detection unit for sheet material |
-
1987
- 1987-09-30 JP JP62244118A patent/JPH0814547B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6488238A (en) | 1989-04-03 |
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