JPS56114778A - Measuring method for distortion of deflection - Google Patents

Measuring method for distortion of deflection

Info

Publication number
JPS56114778A
JPS56114778A JP1732780A JP1732780A JPS56114778A JP S56114778 A JPS56114778 A JP S56114778A JP 1732780 A JP1732780 A JP 1732780A JP 1732780 A JP1732780 A JP 1732780A JP S56114778 A JPS56114778 A JP S56114778A
Authority
JP
Japan
Prior art keywords
distortion
drift
deflection
extent
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1732780A
Other languages
English (en)
Inventor
Hitoshi Takemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP1732780A priority Critical patent/JPS56114778A/ja
Publication of JPS56114778A publication Critical patent/JPS56114778A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Beam Exposure (AREA)
JP1732780A 1980-02-15 1980-02-15 Measuring method for distortion of deflection Pending JPS56114778A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1732780A JPS56114778A (en) 1980-02-15 1980-02-15 Measuring method for distortion of deflection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1732780A JPS56114778A (en) 1980-02-15 1980-02-15 Measuring method for distortion of deflection

Publications (1)

Publication Number Publication Date
JPS56114778A true JPS56114778A (en) 1981-09-09

Family

ID=11940944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1732780A Pending JPS56114778A (en) 1980-02-15 1980-02-15 Measuring method for distortion of deflection

Country Status (1)

Country Link
JP (1) JPS56114778A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62115828A (ja) * 1985-11-15 1987-05-27 Fujitsu Ltd 電子ビ−ム露光方法
JP2013077847A (ja) * 2007-07-12 2013-04-25 Nuflare Technology Inc 荷電粒子ビーム描画方法および荷電粒子ビーム描画装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62115828A (ja) * 1985-11-15 1987-05-27 Fujitsu Ltd 電子ビ−ム露光方法
JP2013077847A (ja) * 2007-07-12 2013-04-25 Nuflare Technology Inc 荷電粒子ビーム描画方法および荷電粒子ビーム描画装置

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