JPS5583233A - Electron beam scanning method for mark detection - Google Patents

Electron beam scanning method for mark detection

Info

Publication number
JPS5583233A
JPS5583233A JP15891378A JP15891378A JPS5583233A JP S5583233 A JPS5583233 A JP S5583233A JP 15891378 A JP15891378 A JP 15891378A JP 15891378 A JP15891378 A JP 15891378A JP S5583233 A JPS5583233 A JP S5583233A
Authority
JP
Japan
Prior art keywords
mark
scanning
constant
increased
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15891378A
Other languages
Japanese (ja)
Other versions
JPS6258140B2 (en
Inventor
Junichi Kai
Nobuyuki Yasutake
Toru Funayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP15891378A priority Critical patent/JPS5583233A/en
Publication of JPS5583233A publication Critical patent/JPS5583233A/en
Publication of JPS6258140B2 publication Critical patent/JPS6258140B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Abstract

PURPOSE:To make positioning using constant generation of secondary electrons caused by scanning by a method wherein beam length is made constant in the direction of beam scanning and charged in the direction of mark edge depending on the speed of scanning. CONSTITUTION:If the speed of scanning is increased in mark scanning area to facilitate resist removal, then secondary electron generation per unit time is reduced to cause mark detection to become impossible. If beam size is expanded to increase the amount of secondary electron generation, the difference between electrons from the mark and those from other area becomes small to cause detection to be difficult. Thus, the beam size BM1 in the direction of mark scanning is made constant, and the size BM2 at right angle is increased. This allows constant secondary electron generation if marking speed is increased. Because the beam size is not changed in the direction of mark scanning, mark detection accuracy is kept constant. In this manner, mark detection can be performed without causing detection accuracy decrease and resist removal difficulty.
JP15891378A 1978-12-20 1978-12-20 Electron beam scanning method for mark detection Granted JPS5583233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15891378A JPS5583233A (en) 1978-12-20 1978-12-20 Electron beam scanning method for mark detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15891378A JPS5583233A (en) 1978-12-20 1978-12-20 Electron beam scanning method for mark detection

Publications (2)

Publication Number Publication Date
JPS5583233A true JPS5583233A (en) 1980-06-23
JPS6258140B2 JPS6258140B2 (en) 1987-12-04

Family

ID=15682076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15891378A Granted JPS5583233A (en) 1978-12-20 1978-12-20 Electron beam scanning method for mark detection

Country Status (1)

Country Link
JP (1) JPS5583233A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870554U (en) * 1981-11-09 1983-05-13 トヨタ自動車株式会社 damper pulley
JPS58102524A (en) * 1981-12-14 1983-06-18 Fujitsu Ltd Position aligning method for electron beam exposing apparatus
JPS58151041A (en) * 1982-03-03 1983-09-08 Toshiba Corp Redundancy apparatus
JPS61210625A (en) * 1985-03-15 1986-09-18 Toshiba Corp Electron beam lighography

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870554U (en) * 1981-11-09 1983-05-13 トヨタ自動車株式会社 damper pulley
JPS58102524A (en) * 1981-12-14 1983-06-18 Fujitsu Ltd Position aligning method for electron beam exposing apparatus
JPS58151041A (en) * 1982-03-03 1983-09-08 Toshiba Corp Redundancy apparatus
JPS61210625A (en) * 1985-03-15 1986-09-18 Toshiba Corp Electron beam lighography

Also Published As

Publication number Publication date
JPS6258140B2 (en) 1987-12-04

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