JPS56112759A - Formation of gate electrode - Google Patents

Formation of gate electrode

Info

Publication number
JPS56112759A
JPS56112759A JP1453080A JP1453080A JPS56112759A JP S56112759 A JPS56112759 A JP S56112759A JP 1453080 A JP1453080 A JP 1453080A JP 1453080 A JP1453080 A JP 1453080A JP S56112759 A JPS56112759 A JP S56112759A
Authority
JP
Japan
Prior art keywords
gate
source
gate electrode
electrode side
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1453080A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6252957B2 (enrdf_load_stackoverflow
Inventor
Yoichi Aono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1453080A priority Critical patent/JPS56112759A/ja
Publication of JPS56112759A publication Critical patent/JPS56112759A/ja
Publication of JPS6252957B2 publication Critical patent/JPS6252957B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes
    • H10D30/87—FETs having Schottky gate electrodes, e.g. metal-semiconductor FETs [MESFET]
    • H10D30/877—FETs having Schottky gate electrodes, e.g. metal-semiconductor FETs [MESFET] having recessed gate electrodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP1453080A 1980-02-08 1980-02-08 Formation of gate electrode Granted JPS56112759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1453080A JPS56112759A (en) 1980-02-08 1980-02-08 Formation of gate electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1453080A JPS56112759A (en) 1980-02-08 1980-02-08 Formation of gate electrode

Publications (2)

Publication Number Publication Date
JPS56112759A true JPS56112759A (en) 1981-09-05
JPS6252957B2 JPS6252957B2 (enrdf_load_stackoverflow) 1987-11-07

Family

ID=11863689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1453080A Granted JPS56112759A (en) 1980-02-08 1980-02-08 Formation of gate electrode

Country Status (1)

Country Link
JP (1) JPS56112759A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59147466A (ja) * 1983-02-10 1984-08-23 Sony Corp シヨツトキ・バリア・ゲ−ト型ｆｅｔ
FR2543365A1 (fr) * 1983-03-26 1984-09-28 Mitsubishi Electric Corp Transistor a effet de champ
JPS59224175A (ja) * 1983-06-03 1984-12-17 Nec Corp 電界効果トランジスタ
EP0614230A3 (en) * 1993-03-05 1995-11-02 Mitsubishi Electric Corp Sunken gate semiconductor device and manufacturing method.

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59147466A (ja) * 1983-02-10 1984-08-23 Sony Corp シヨツトキ・バリア・ゲ−ト型ｆｅｔ
FR2543365A1 (fr) * 1983-03-26 1984-09-28 Mitsubishi Electric Corp Transistor a effet de champ
JPS59224175A (ja) * 1983-06-03 1984-12-17 Nec Corp 電界効果トランジスタ
EP0614230A3 (en) * 1993-03-05 1995-11-02 Mitsubishi Electric Corp Sunken gate semiconductor device and manufacturing method.

Also Published As

Publication number Publication date
JPS6252957B2 (enrdf_load_stackoverflow) 1987-11-07

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