JPS56103303A - Optical measuring method for micro-gap - Google Patents

Optical measuring method for micro-gap

Info

Publication number
JPS56103303A
JPS56103303A JP459180A JP459180A JPS56103303A JP S56103303 A JPS56103303 A JP S56103303A JP 459180 A JP459180 A JP 459180A JP 459180 A JP459180 A JP 459180A JP S56103303 A JPS56103303 A JP S56103303A
Authority
JP
Japan
Prior art keywords
beam splitter
brightness
plate
laser
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP459180A
Other languages
English (en)
Other versions
JPS6231281B2 (ja
Inventor
Toshio Akatsu
Kazunori Iijima
Seiichiro Terajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP459180A priority Critical patent/JPS56103303A/ja
Publication of JPS56103303A publication Critical patent/JPS56103303A/ja
Publication of JPS6231281B2 publication Critical patent/JPS6231281B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
JP459180A 1980-01-21 1980-01-21 Optical measuring method for micro-gap Granted JPS56103303A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP459180A JPS56103303A (en) 1980-01-21 1980-01-21 Optical measuring method for micro-gap

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP459180A JPS56103303A (en) 1980-01-21 1980-01-21 Optical measuring method for micro-gap

Publications (2)

Publication Number Publication Date
JPS56103303A true JPS56103303A (en) 1981-08-18
JPS6231281B2 JPS6231281B2 (ja) 1987-07-07

Family

ID=11588278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP459180A Granted JPS56103303A (en) 1980-01-21 1980-01-21 Optical measuring method for micro-gap

Country Status (1)

Country Link
JP (1) JPS56103303A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140607A (ja) * 1982-02-17 1983-08-20 Hitachi Ltd 微小隙間の光学的測定方法
DE3338583A1 (de) * 1982-10-22 1984-04-26 Hitachi, Ltd., Tokio/Tokyo Verfahren und anordnung zur optischen messung von abstandsaenderungen
JPS60123704A (ja) * 1983-11-03 1985-07-02 ジゴ−　コ−ポレ−シヨン 光学干渉計システムとその使用方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140607A (ja) * 1982-02-17 1983-08-20 Hitachi Ltd 微小隙間の光学的測定方法
JPS637601B2 (ja) * 1982-02-17 1988-02-17 Hitachi Ltd
DE3338583A1 (de) * 1982-10-22 1984-04-26 Hitachi, Ltd., Tokio/Tokyo Verfahren und anordnung zur optischen messung von abstandsaenderungen
JPS5975108A (ja) * 1982-10-22 1984-04-27 Hitachi Ltd 微小隙間の光学的測定方法及び測定装置
US4632556A (en) * 1982-10-22 1986-12-30 Hitachi, Ltd. Method and apparatus for optically measuring clearance change
JPH0472163B2 (ja) * 1982-10-22 1992-11-17 Hitachi Ltd
JPS60123704A (ja) * 1983-11-03 1985-07-02 ジゴ−　コ−ポレ−シヨン 光学干渉計システムとその使用方法
JPH0431043B2 (ja) * 1983-11-03 1992-05-25

Also Published As

Publication number Publication date
JPS6231281B2 (ja) 1987-07-07

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