JPS57120803A - Light interference type sensor - Google Patents

Light interference type sensor

Info

Publication number
JPS57120803A
JPS57120803A JP56006513A JP651381A JPS57120803A JP S57120803 A JPS57120803 A JP S57120803A JP 56006513 A JP56006513 A JP 56006513A JP 651381 A JP651381 A JP 651381A JP S57120803 A JPS57120803 A JP S57120803A
Authority
JP
Japan
Prior art keywords
rays
sensor
physical quantity
half mirror
arrive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56006513A
Other languages
Japanese (ja)
Inventor
Mitsuo Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56006513A priority Critical patent/JPS57120803A/en
Publication of JPS57120803A publication Critical patent/JPS57120803A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35303—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using a reference fibre, e.g. interferometric devices

Abstract

PURPOSE:To make physical quantity measurable with high accuracy by utilizing the monochromatic light emission characteristics of laser beam and its oscillation wavelength stability. CONSTITUTION:The forward path of parallel rays 2 passed through a shutter 10 from a half mirror 6 is focused by a lens 32 and is made incident to an optical fiber 33. While the rays 2 maintain a single mode in the fiber 33, they arrive at a sensor 34. The rays 2 arrive at a reflection mirror 35 in the medium of the sensor 34 in the single mode, and they are reflected there and are reflected by the half mirror 6 through the backward path of the rays 2, thereby forming a part of a rays 3. When the velocity of light in the medium of the sensor 34 changes with measuring physical quantity, the phase at which the backward path of the rays 2 is made incident to the half mirror 6 changes. From this change in the position, the measuring physical quantity applied to the sensor 34 is measured.
JP56006513A 1981-01-21 1981-01-21 Light interference type sensor Pending JPS57120803A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56006513A JPS57120803A (en) 1981-01-21 1981-01-21 Light interference type sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56006513A JPS57120803A (en) 1981-01-21 1981-01-21 Light interference type sensor

Publications (1)

Publication Number Publication Date
JPS57120803A true JPS57120803A (en) 1982-07-28

Family

ID=11640486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56006513A Pending JPS57120803A (en) 1981-01-21 1981-01-21 Light interference type sensor

Country Status (1)

Country Link
JP (1) JPS57120803A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021065106A1 (en) * 2019-09-30 2021-04-08 沖電気工業株式会社 Vibrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021065106A1 (en) * 2019-09-30 2021-04-08 沖電気工業株式会社 Vibrometer

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