JPS5597220A - Method of producing metal filter - Google Patents

Method of producing metal filter

Info

Publication number
JPS5597220A
JPS5597220A JP393379A JP393379A JPS5597220A JP S5597220 A JPS5597220 A JP S5597220A JP 393379 A JP393379 A JP 393379A JP 393379 A JP393379 A JP 393379A JP S5597220 A JPS5597220 A JP S5597220A
Authority
JP
Japan
Prior art keywords
layer
photomask
produce
metal
metal filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP393379A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6249094B2 (xx
Inventor
Yasuyuki Abe
Tomihiro Nakada
Tatsumi Takahashi
Masao Kodera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP393379A priority Critical patent/JPS5597220A/ja
Publication of JPS5597220A publication Critical patent/JPS5597220A/ja
Publication of JPS6249094B2 publication Critical patent/JPS6249094B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Filtering Materials (AREA)
  • Combined Means For Separation Of Solids (AREA)
JP393379A 1979-01-19 1979-01-19 Method of producing metal filter Granted JPS5597220A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP393379A JPS5597220A (en) 1979-01-19 1979-01-19 Method of producing metal filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP393379A JPS5597220A (en) 1979-01-19 1979-01-19 Method of producing metal filter

Publications (2)

Publication Number Publication Date
JPS5597220A true JPS5597220A (en) 1980-07-24
JPS6249094B2 JPS6249094B2 (xx) 1987-10-16

Family

ID=11570931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP393379A Granted JPS5597220A (en) 1979-01-19 1979-01-19 Method of producing metal filter

Country Status (1)

Country Link
JP (1) JPS5597220A (xx)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05181258A (ja) * 1992-06-19 1993-07-23 Hitachi Ltd ホトマスク用原板
WO2001021282A2 (en) * 1999-09-22 2001-03-29 Viostyle Limited Laminar structure
JP2004504634A (ja) * 2000-07-19 2004-02-12 エーエスエムエル　ユーエス，インコーポレイテッド ホログラフィックレチクルを用いて光学システムを特徴付けする方法
US7804601B2 (en) 1999-06-24 2010-09-28 Asml Holding N.V. Methods for making holographic reticles for characterizing optical systems

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110158025B (zh) * 2018-05-31 2021-01-26 京东方科技集团股份有限公司 掩膜板的制作方法及掩膜板

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05181258A (ja) * 1992-06-19 1993-07-23 Hitachi Ltd ホトマスク用原板
JPH0715578B2 (ja) * 1992-06-19 1995-02-22 株式会社日立製作所 ホトマスク用原板
US7804601B2 (en) 1999-06-24 2010-09-28 Asml Holding N.V. Methods for making holographic reticles for characterizing optical systems
WO2001021282A2 (en) * 1999-09-22 2001-03-29 Viostyle Limited Laminar structure
WO2001021282A3 (en) * 1999-09-22 2001-10-18 Viostyle Ltd Laminar structure
US6794056B1 (en) 1999-09-22 2004-09-21 Nord Impianti S.R.L. Laminar structure
JP2004504634A (ja) * 2000-07-19 2004-02-12 エーエスエムエル　ユーエス，インコーポレイテッド ホログラフィックレチクルを用いて光学システムを特徴付けする方法

Also Published As

Publication number Publication date
JPS6249094B2 (xx) 1987-10-16

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