JPS559488A - Method of making semiconductor device - Google Patents
Method of making semiconductor deviceInfo
- Publication number
- JPS559488A JPS559488A JP8337678A JP8337678A JPS559488A JP S559488 A JPS559488 A JP S559488A JP 8337678 A JP8337678 A JP 8337678A JP 8337678 A JP8337678 A JP 8337678A JP S559488 A JPS559488 A JP S559488A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- chip
- header
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83192—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Die Bonding (AREA)
Abstract
PURPOSE: To improve the characteristics such as low contact resistance by providing the silicon powder including the same conductivity type of impurities as that of a semiconductor chip between the chip and a header upon joining the chip with the header by a Au-Si eutectic technique.
CONSTITUTION: The epitaxial growth of a n-type layer 3 is first allowed to proceed on a p-type Si substrate 2 to isolate the layer 3 by a p-type region 2'; then p-type gate 4, n-type source 5 and drain region 6 are provided in the isolated region; and the back of the substrate 2 is etched to remove the high impurity content layer. Prior to joining the chip 1 made in this way with the header 7 conprising Kovar 8 and Au layer 9 coated thereon, the high concentration boron doped silicon powder 10 is coated on the layer 9. In this manner, boron segregates to provide a low electric resistance layer to the side of the substrate 2 resulting in low contact resistance.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8337678A JPS559488A (en) | 1978-07-07 | 1978-07-07 | Method of making semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8337678A JPS559488A (en) | 1978-07-07 | 1978-07-07 | Method of making semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS559488A true JPS559488A (en) | 1980-01-23 |
Family
ID=13800690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8337678A Pending JPS559488A (en) | 1978-07-07 | 1978-07-07 | Method of making semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS559488A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013121794A1 (en) | 2012-02-15 | 2013-08-22 | Jfe条鋼株式会社 | Soft-nitriding steel and soft-nitrided component using steel as material |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4990879A (en) * | 1972-12-28 | 1974-08-30 |
-
1978
- 1978-07-07 JP JP8337678A patent/JPS559488A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4990879A (en) * | 1972-12-28 | 1974-08-30 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013121794A1 (en) | 2012-02-15 | 2013-08-22 | Jfe条鋼株式会社 | Soft-nitriding steel and soft-nitrided component using steel as material |
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