JPS5591974A - Boat in vacuum deposition device - Google Patents

Boat in vacuum deposition device

Info

Publication number
JPS5591974A
JPS5591974A JP3179A JP3179A JPS5591974A JP S5591974 A JPS5591974 A JP S5591974A JP 3179 A JP3179 A JP 3179A JP 3179 A JP3179 A JP 3179A JP S5591974 A JPS5591974 A JP S5591974A
Authority
JP
Japan
Prior art keywords
boat
uniform
film
thermocouples
make
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3179A
Other languages
Japanese (ja)
Inventor
Hideyo Nishijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP3179A priority Critical patent/JPS5591974A/en
Publication of JPS5591974A publication Critical patent/JPS5591974A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To make the thickness of a film deposited on a large-area substrate uniform and enhance the quality of the film by changing the width of a boat at temp. changing portions to make the quantity of heat generated from the boat uniform. CONSTITUTION:Thermocouples 2, 2 are set at the bottom of boat 1, and parts of horizontal frame surface 3 upwardly extending from the thermocouple portions are notched 4, 4.... As a result, heat deprived by setting thermocouples 2 is compensated with an increase in resistance heat accompanied by a decrease in cross- sectional area of boat 1 due to notches 4, and a uniform heating state is attained as a whole, whereby the amt. of a material evaporated becomes uniform. Thus, a uniform film can be formed even on a large-area substrate to give an even product.
JP3179A 1979-01-05 1979-01-05 Boat in vacuum deposition device Pending JPS5591974A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3179A JPS5591974A (en) 1979-01-05 1979-01-05 Boat in vacuum deposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3179A JPS5591974A (en) 1979-01-05 1979-01-05 Boat in vacuum deposition device

Publications (1)

Publication Number Publication Date
JPS5591974A true JPS5591974A (en) 1980-07-11

Family

ID=11462978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3179A Pending JPS5591974A (en) 1979-01-05 1979-01-05 Boat in vacuum deposition device

Country Status (1)

Country Link
JP (1) JPS5591974A (en)

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