JPS533902A - Production of silicon crystal membrane - Google Patents

Production of silicon crystal membrane

Info

Publication number
JPS533902A
JPS533902A JP7703176A JP7703176A JPS533902A JP S533902 A JPS533902 A JP S533902A JP 7703176 A JP7703176 A JP 7703176A JP 7703176 A JP7703176 A JP 7703176A JP S533902 A JPS533902 A JP S533902A
Authority
JP
Japan
Prior art keywords
silicon crystal
production
crystal membrane
membrane
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7703176A
Other languages
Japanese (ja)
Other versions
JPS5617312B2 (en
Inventor
Haruo Ito
Tadashi Saito
Shigekazu Minagawa
Takashi Tokuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP7703176A priority Critical patent/JPS533902A/en
Publication of JPS533902A publication Critical patent/JPS533902A/en
Publication of JPS5617312B2 publication Critical patent/JPS5617312B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To melt the central part alone of a silicon membrane formed on a substrate in zone melting by devising the shapes of susceptors so as to obtain a silicon crystal membrane with excellent crystallinity and uniform thickness.
COPYRIGHT: (C)1978,JPO&Japio
JP7703176A 1976-07-01 1976-07-01 Production of silicon crystal membrane Granted JPS533902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7703176A JPS533902A (en) 1976-07-01 1976-07-01 Production of silicon crystal membrane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7703176A JPS533902A (en) 1976-07-01 1976-07-01 Production of silicon crystal membrane

Publications (2)

Publication Number Publication Date
JPS533902A true JPS533902A (en) 1978-01-14
JPS5617312B2 JPS5617312B2 (en) 1981-04-21

Family

ID=13622371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7703176A Granted JPS533902A (en) 1976-07-01 1976-07-01 Production of silicon crystal membrane

Country Status (1)

Country Link
JP (1) JPS533902A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59163711A (en) * 1983-03-07 1984-09-14 三菱電機株式会社 Multicore superconductive cable
JPH01207906A (en) * 1988-02-15 1989-08-21 Kansai Electric Power Co Inc:The Superconducting winding

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59163711A (en) * 1983-03-07 1984-09-14 三菱電機株式会社 Multicore superconductive cable
JPH01207906A (en) * 1988-02-15 1989-08-21 Kansai Electric Power Co Inc:The Superconducting winding

Also Published As

Publication number Publication date
JPS5617312B2 (en) 1981-04-21

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