JPS57137463A - Vapor depositing method - Google Patents

Vapor depositing method

Info

Publication number
JPS57137463A
JPS57137463A JP2403381A JP2403381A JPS57137463A JP S57137463 A JPS57137463 A JP S57137463A JP 2403381 A JP2403381 A JP 2403381A JP 2403381 A JP2403381 A JP 2403381A JP S57137463 A JPS57137463 A JP S57137463A
Authority
JP
Japan
Prior art keywords
boat
temp
vapor depositing
evaporation
arrow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2403381A
Other languages
Japanese (ja)
Inventor
Teruo Misumi
Yoichi Osato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2403381A priority Critical patent/JPS57137463A/en
Publication of JPS57137463A publication Critical patent/JPS57137463A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To make the evaporation temp. uniform and to prevent the reevaporation of a vapor depositing material and the evaporation of impurities by circulating a heating medium having a controlled temp. through a vapor depositing boat to heat and melt the depositing material. CONSTITUTION:A vapor depositing vessel 5 is evacuated by exhausing air in the direction of an arrow 12, a support 6 of Al or the like is fixed in the vessel 5 with a fixing member 8 together with a heater 7, and a vapor depositing boat 9 made of stainless steel or the like is set at a prescribed position of the vessel 5. A heating medium having a controlled temp. such as silicon oil is circulated through the boat 9 from an arrow 10 to an arrow 11, and the boat 9 is packed with a vapor depositing material such as Se. The internal temp. of the boat 9 is monitored with thermocouples A-I set in the boat 9. The material reaches the evaporation temp. in a short time. No temp. difference is produced in the longitudinal direction of the boat 9, and uniform evaporation is carried out until vapor deposition is finished.
JP2403381A 1981-02-20 1981-02-20 Vapor depositing method Pending JPS57137463A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2403381A JPS57137463A (en) 1981-02-20 1981-02-20 Vapor depositing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2403381A JPS57137463A (en) 1981-02-20 1981-02-20 Vapor depositing method

Publications (1)

Publication Number Publication Date
JPS57137463A true JPS57137463A (en) 1982-08-25

Family

ID=12127194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2403381A Pending JPS57137463A (en) 1981-02-20 1981-02-20 Vapor depositing method

Country Status (1)

Country Link
JP (1) JPS57137463A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010533790A (en) * 2007-07-19 2010-10-28 アプライド マテリアルズ インコーポレイテッド Vacuum deposition equipment for solid materials
JP2013524001A (en) * 2010-03-26 2013-06-17 サン−ゴバン グラス フランス Method and apparatus for refilling an evaporator chamber

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010533790A (en) * 2007-07-19 2010-10-28 アプライド マテリアルズ インコーポレイテッド Vacuum deposition equipment for solid materials
JP2013524001A (en) * 2010-03-26 2013-06-17 サン−ゴバン グラス フランス Method and apparatus for refilling an evaporator chamber

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