JPS5583238A - Producing semiconductor element - Google Patents
Producing semiconductor elementInfo
- Publication number
- JPS5583238A JPS5583238A JP15651578A JP15651578A JPS5583238A JP S5583238 A JPS5583238 A JP S5583238A JP 15651578 A JP15651578 A JP 15651578A JP 15651578 A JP15651578 A JP 15651578A JP S5583238 A JPS5583238 A JP S5583238A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- groove
- rods
- sintering
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To provide glass coating by sintering glass powder filled in groove on the main surface of substrate which is held horizontally.
CONSTITUTION: Base 21 made of silica has a pair of support rods 22a, 22b attached with horizontal and parallel arranged rods 22aa..., 22ba... to mount wafers. Electrophoresis is used to deposit glass powder on the surface groove of semiconductor 2. The glass-deposited semiconductors 2 are mounted on the rods with the surfaces facing upward and chraged into a sintering furnace. When they are heated to glass sintering temperatures, uniform glass coated layer 23 is formed in the groove, without allowing undesired glass coating to be deposited on the back of wafers.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15651578A JPS5583238A (en) | 1978-12-20 | 1978-12-20 | Producing semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15651578A JPS5583238A (en) | 1978-12-20 | 1978-12-20 | Producing semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5583238A true JPS5583238A (en) | 1980-06-23 |
Family
ID=15629453
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15651578A Pending JPS5583238A (en) | 1978-12-20 | 1978-12-20 | Producing semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5583238A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4681667A (en) * | 1982-12-22 | 1987-07-21 | Nec Corporation | Method of producing electrostrictive effect element |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933912A (en) * | 1972-07-31 | 1974-03-28 |
-
1978
- 1978-12-20 JP JP15651578A patent/JPS5583238A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933912A (en) * | 1972-07-31 | 1974-03-28 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4681667A (en) * | 1982-12-22 | 1987-07-21 | Nec Corporation | Method of producing electrostrictive effect element |
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