JPS5578565A - Semiconductor memory device - Google Patents
Semiconductor memory deviceInfo
- Publication number
- JPS5578565A JPS5578565A JP15280978A JP15280978A JPS5578565A JP S5578565 A JPS5578565 A JP S5578565A JP 15280978 A JP15280978 A JP 15280978A JP 15280978 A JP15280978 A JP 15280978A JP S5578565 A JPS5578565 A JP S5578565A
- Authority
- JP
- Japan
- Prior art keywords
- regions
- substrate
- grooves
- semiconductor layer
- semiconductor layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15280978A JPS5578565A (en) | 1978-12-09 | 1978-12-09 | Semiconductor memory device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15280978A JPS5578565A (en) | 1978-12-09 | 1978-12-09 | Semiconductor memory device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5578565A true JPS5578565A (en) | 1980-06-13 |
| JPS6136712B2 JPS6136712B2 (enrdf_load_stackoverflow) | 1986-08-20 |
Family
ID=15548619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15280978A Granted JPS5578565A (en) | 1978-12-09 | 1978-12-09 | Semiconductor memory device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5578565A (enrdf_load_stackoverflow) |
-
1978
- 1978-12-09 JP JP15280978A patent/JPS5578565A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6136712B2 (enrdf_load_stackoverflow) | 1986-08-20 |
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