JPS5577178A - Semiconductor pressure converting element - Google Patents
Semiconductor pressure converting elementInfo
- Publication number
- JPS5577178A JPS5577178A JP15000378A JP15000378A JPS5577178A JP S5577178 A JPS5577178 A JP S5577178A JP 15000378 A JP15000378 A JP 15000378A JP 15000378 A JP15000378 A JP 15000378A JP S5577178 A JPS5577178 A JP S5577178A
- Authority
- JP
- Japan
- Prior art keywords
- center
- gages
- pressure
- section
- circumferential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15000378A JPS5577178A (en) | 1978-12-06 | 1978-12-06 | Semiconductor pressure converting element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15000378A JPS5577178A (en) | 1978-12-06 | 1978-12-06 | Semiconductor pressure converting element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5577178A true JPS5577178A (en) | 1980-06-10 |
JPS6313357B2 JPS6313357B2 (ja) | 1988-03-25 |
Family
ID=15487335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15000378A Granted JPS5577178A (en) | 1978-12-06 | 1978-12-06 | Semiconductor pressure converting element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5577178A (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6174374A (ja) * | 1984-09-19 | 1986-04-16 | Toyota Central Res & Dev Lab Inc | 半導体圧力変換器 |
US4622098A (en) * | 1982-10-27 | 1986-11-11 | Tokyo Shibaura Denki Kabushiki Kaisha | Method for manufacturing semiconductor strain sensor |
JPH06167351A (ja) * | 1991-06-27 | 1994-06-14 | Dresser Ind Inc | 変化器の非直線性の制御法 |
JPH08334424A (ja) * | 1995-06-07 | 1996-12-17 | Mitsubishi Electric Corp | 半導体圧力検出装置 |
JP2017181431A (ja) * | 2016-03-31 | 2017-10-05 | 京セラ株式会社 | 応力センサ |
JP2017181439A (ja) * | 2016-03-31 | 2017-10-05 | 京セラ株式会社 | 応力センサ及びその製造方法 |
WO2017170748A1 (ja) * | 2016-03-31 | 2017-10-05 | 京セラ株式会社 | 応力センサ |
JP2017181436A (ja) * | 2016-03-31 | 2017-10-05 | 京セラ株式会社 | 応力センサ |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4984189A (ja) * | 1972-12-15 | 1974-08-13 |
-
1978
- 1978-12-06 JP JP15000378A patent/JPS5577178A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4984189A (ja) * | 1972-12-15 | 1974-08-13 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4622098A (en) * | 1982-10-27 | 1986-11-11 | Tokyo Shibaura Denki Kabushiki Kaisha | Method for manufacturing semiconductor strain sensor |
JPS6174374A (ja) * | 1984-09-19 | 1986-04-16 | Toyota Central Res & Dev Lab Inc | 半導体圧力変換器 |
JPH06167351A (ja) * | 1991-06-27 | 1994-06-14 | Dresser Ind Inc | 変化器の非直線性の制御法 |
JPH08334424A (ja) * | 1995-06-07 | 1996-12-17 | Mitsubishi Electric Corp | 半導体圧力検出装置 |
JP2017181431A (ja) * | 2016-03-31 | 2017-10-05 | 京セラ株式会社 | 応力センサ |
JP2017181439A (ja) * | 2016-03-31 | 2017-10-05 | 京セラ株式会社 | 応力センサ及びその製造方法 |
WO2017170748A1 (ja) * | 2016-03-31 | 2017-10-05 | 京セラ株式会社 | 応力センサ |
JP2017181436A (ja) * | 2016-03-31 | 2017-10-05 | 京セラ株式会社 | 応力センサ |
CN108885165A (zh) * | 2016-03-31 | 2018-11-23 | 京瓷株式会社 | 应力传感器 |
US10866203B2 (en) | 2016-03-31 | 2020-12-15 | Kyocera Corporation | Stress sensor |
Also Published As
Publication number | Publication date |
---|---|
JPS6313357B2 (ja) | 1988-03-25 |
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