JPS6426117A - Pressure transducer - Google Patents
Pressure transducerInfo
- Publication number
- JPS6426117A JPS6426117A JP16908988A JP16908988A JPS6426117A JP S6426117 A JPS6426117 A JP S6426117A JP 16908988 A JP16908988 A JP 16908988A JP 16908988 A JP16908988 A JP 16908988A JP S6426117 A JPS6426117 A JP S6426117A
- Authority
- JP
- Japan
- Prior art keywords
- strain inducing
- inducing plate
- strain
- stress
- stress concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To improve various performances such as nonlinearity and transient temperature characteristics of a pressure transducer by forming stress concentration grooves in the reverse surface of a strain inducing plate and increasing the spring constant of the strain inducing plate. CONSTITUTION:Strain gauges 11, 11... are stuck on the opposite side (top surface side) from where the stress concentration grooves 8 and 8 are formed in the reverse surface of the strain inducing plate 10. Consequently, a diaphragm 2 deforms by receiving pressure, thereby the strain inducing plate 100 of strain inducing body 4 is deformed and the stress is generated at the inside of the strain inducing plate 10, and the stress is much larger in the part where the stress concentration grooves 8 and 8 are formed. Namely, when the stress concentration grooves 8 are formed in the strain inducing plate 10, the stress that the strain inducing plate 10 has when receiving pressure is concentrated on the part where the stress concentration grooves 8 are formed. Outputs that the strain gauges 11, 11... generate corresponding to the pressure applied to the strain inducing plate 10 increase and the sensitivity becomes excellent.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16908988A JPS6426117A (en) | 1988-07-08 | 1988-07-08 | Pressure transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16908988A JPS6426117A (en) | 1988-07-08 | 1988-07-08 | Pressure transducer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6426117A true JPS6426117A (en) | 1989-01-27 |
JPH0253732B2 JPH0253732B2 (en) | 1990-11-19 |
Family
ID=15880123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16908988A Granted JPS6426117A (en) | 1988-07-08 | 1988-07-08 | Pressure transducer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6426117A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016056555A1 (en) * | 2014-10-07 | 2016-04-14 | 日立金属株式会社 | Pressure sensor, differential pressure sensor, and mass flow rate control device using same |
CN113340503A (en) * | 2021-06-24 | 2021-09-03 | 武汉东海石化重型装备有限公司 | Material increase manufacturing method of pressure-bearing equipment convenient for stress sensing |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6314891A (en) * | 1986-07-04 | 1988-01-22 | Nippon Steel Corp | Production of zn alloy electroplated steel sheet having superior adhesion to plating |
-
1988
- 1988-07-08 JP JP16908988A patent/JPS6426117A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6314891A (en) * | 1986-07-04 | 1988-01-22 | Nippon Steel Corp | Production of zn alloy electroplated steel sheet having superior adhesion to plating |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016056555A1 (en) * | 2014-10-07 | 2016-04-14 | 日立金属株式会社 | Pressure sensor, differential pressure sensor, and mass flow rate control device using same |
JPWO2016056555A1 (en) * | 2014-10-07 | 2017-06-08 | 日立金属株式会社 | Pressure sensor, differential pressure sensor, and mass flow controller using them |
US10175132B2 (en) | 2014-10-07 | 2019-01-08 | Hitachi Metals, Ltd. | Pressure sensor, differential pressure sensor, and mass flow rate control device using same |
CN113340503A (en) * | 2021-06-24 | 2021-09-03 | 武汉东海石化重型装备有限公司 | Material increase manufacturing method of pressure-bearing equipment convenient for stress sensing |
Also Published As
Publication number | Publication date |
---|---|
JPH0253732B2 (en) | 1990-11-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ES1001567U (en) | Pressure sensor | |
DE3777187D1 (en) | Accelerometer. | |
SE8803590D0 (en) | ABSOLUTELY CAPACITANS MANOMETER | |
CA2029041A1 (en) | Piezoelectric pressure sensor | |
EP0333091A3 (en) | Transducer for picking-up pressures, vibrations and/or accelerations and converting them into electrical signals | |
AU645310B2 (en) | Piezo-electric transducer arrangement | |
ES8305495A1 (en) | Differential pressure gauge | |
GB1534276A (en) | Force transducers | |
JPS6426117A (en) | Pressure transducer | |
GB910977A (en) | Pressure responsive devices | |
JPS5577178A (en) | Semiconductor pressure converting element | |
GB2029094B (en) | Pressure transducers having piezoresistive strain gauges and methods of manufacturing such transducers | |
ES8307063A1 (en) | Force transducers. | |
JPS55151235A (en) | Torque measuring instrument | |
SU1647304A1 (en) | Strain-gauge pressure transducer | |
JPS6459075A (en) | Semiconductor acceleration sensor | |
EP0320299A3 (en) | Pressure transducers and a method of measuring pressure | |
DE3468074D1 (en) | Pressure sensor with a pressure-sensitive diaphragm | |
DE59602688D1 (en) | Device for measuring pressure force | |
JPS57190242A (en) | Pressure sensor | |
KR850008406A (en) | Cylindrical Beam Force Converter | |
JPS54158281A (en) | Load cell | |
SU663929A1 (en) | Valve | |
JPS5374473A (en) | Semiconductor pressure transducer | |
JPS57191526A (en) | Pressure sensor |