GB2029094B - Pressure transducers having piezoresistive strain gauges and methods of manufacturing such transducers - Google Patents

Pressure transducers having piezoresistive strain gauges and methods of manufacturing such transducers

Info

Publication number
GB2029094B
GB2029094B GB7909862A GB7909862A GB2029094B GB 2029094 B GB2029094 B GB 2029094B GB 7909862 A GB7909862 A GB 7909862A GB 7909862 A GB7909862 A GB 7909862A GB 2029094 B GB2029094 B GB 2029094B
Authority
GB
United Kingdom
Prior art keywords
transducers
manufacturing
methods
strain gauges
piezoresistive strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7909862A
Other versions
GB2029094A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Babcock and Wilcox Co
Original Assignee
Babcock and Wilcox Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Babcock and Wilcox Co filed Critical Babcock and Wilcox Co
Publication of GB2029094A publication Critical patent/GB2029094A/en
Application granted granted Critical
Publication of GB2029094B publication Critical patent/GB2029094B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
GB7909862A 1978-08-28 1979-03-21 Pressure transducers having piezoresistive strain gauges and methods of manufacturing such transducers Expired GB2029094B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US93730478A 1978-08-28 1978-08-28

Publications (2)

Publication Number Publication Date
GB2029094A GB2029094A (en) 1980-03-12
GB2029094B true GB2029094B (en) 1983-01-26

Family

ID=25469756

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7909862A Expired GB2029094B (en) 1978-08-28 1979-03-21 Pressure transducers having piezoresistive strain gauges and methods of manufacturing such transducers

Country Status (9)

Country Link
JP (1) JPS5533092A (en)
AU (1) AU503379B1 (en)
BR (1) BR7902641A (en)
CA (1) CA1134021A (en)
DE (1) DE2921043C2 (en)
ES (2) ES480075A1 (en)
FR (1) FR2435022A1 (en)
GB (1) GB2029094B (en)
IT (1) IT1112793B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4327350A (en) * 1979-07-17 1982-04-27 Data Instruments, Inc. Pressure transducer
JPS5796573A (en) * 1980-12-08 1982-06-15 Hitachi Ltd Semiconductor strain transducer
JPS58197780A (en) * 1982-05-14 1983-11-17 Hitachi Ltd Semiconductor pressure converter
JPS59230101A (en) * 1983-06-13 1984-12-24 Tokyo Electric Co Ltd Distortion sensor
CA1314410C (en) * 1986-12-08 1993-03-16 Masanori Nishiguchi Wiring structure of semiconductor pressure sensor
FR2643148B1 (en) * 1989-02-15 1991-12-06 Schlumberger Ind Sa SEMICONDUCTOR-ON-INSULATION PRESSURE SENSOR
DE102007057877A1 (en) 2007-11-29 2009-06-04 Endress + Hauser Gmbh + Co. Kg pressure sensor
CN116222839B (en) * 2023-05-09 2023-07-18 苏州亿波达光电子科技有限公司 Sensing element and pressure sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE875879C (en) * 1951-07-25 1953-05-07 Land Shielding method for strain gauges
GB1265018A (en) * 1968-08-27 1972-03-01
US4050049A (en) * 1976-02-09 1977-09-20 Signetics Corporation Solid state force transducer, support and method of making same
FR2367280A1 (en) * 1976-10-08 1978-05-05 Schlumberger Ind Sa STRAIN GAUGE SENSOR EQUIPPED WITH A TEMPERATURE SENSOR
JPS54131892A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Semiconductor pressure converter

Also Published As

Publication number Publication date
BR7902641A (en) 1980-03-18
FR2435022B1 (en) 1983-04-01
ES480075A1 (en) 1979-11-16
IT1112793B (en) 1986-01-20
DE2921043C2 (en) 1985-07-04
ES480076A1 (en) 1979-11-16
IT7922259A0 (en) 1979-04-30
DE2921043A1 (en) 1980-03-13
CA1134021A (en) 1982-10-19
GB2029094A (en) 1980-03-12
FR2435022A1 (en) 1980-03-28
JPS5533092A (en) 1980-03-08
AU503379B1 (en) 1979-08-30

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee