FR2367280A1 - STRAIN GAUGE SENSOR EQUIPPED WITH A TEMPERATURE SENSOR - Google Patents

STRAIN GAUGE SENSOR EQUIPPED WITH A TEMPERATURE SENSOR

Info

Publication number
FR2367280A1
FR2367280A1 FR7630297A FR7630297A FR2367280A1 FR 2367280 A1 FR2367280 A1 FR 2367280A1 FR 7630297 A FR7630297 A FR 7630297A FR 7630297 A FR7630297 A FR 7630297A FR 2367280 A1 FR2367280 A1 FR 2367280A1
Authority
FR
France
Prior art keywords
strain gauge
sensor
temperature sensor
gauges
deposits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7630297A
Other languages
French (fr)
Other versions
FR2367280B1 (en
Inventor
Pierre Deschamps
Jacques Fournier
Roger Moura
Rene Rose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schlumberger SA
Original Assignee
Schlumberger SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger SA filed Critical Schlumberger SA
Priority to FR7630297A priority Critical patent/FR2367280A1/en
Priority to BE181173A priority patent/BE859016A/en
Priority to IT2811777A priority patent/IT1085284B/en
Priority to GB4171577A priority patent/GB1562139A/en
Priority to NL7711021A priority patent/NL7711021A/en
Priority to DE19772745263 priority patent/DE2745263A1/en
Publication of FR2367280A1 publication Critical patent/FR2367280A1/en
Application granted granted Critical
Publication of FR2367280B1 publication Critical patent/FR2367280B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Force In General (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne les capteurs à jauges déposées. Une résistance 20 destinée à jouer le rôle de sonde de température est réalisée, au cours même des opérations d'obtention des jauges J1 à J4 et de leurs connexions 14 en protégeant convenablement à son emplacement les deux premiers depôts en couche mince Il, 12 sur le substrat 10, de manière qu'en définitive cette résistance soit constituée uniquement par ces deux dépôts. Application à la compensation de température des capteurs de grandeurs physiques : force, pression, déplacement, etc.The invention relates to sensors with deposited gauges. A resistor 20 intended to play the role of a temperature probe is produced, even during the operations for obtaining the gauges J1 to J4 and their connections 14, while suitably protecting at its location the first two deposits in a thin layer II, 12 on the substrate 10, so that ultimately this resistance is formed only by these two deposits. Application to the temperature compensation of sensors of physical quantities: force, pressure, displacement, etc.

FR7630297A 1976-10-08 1976-10-08 STRAIN GAUGE SENSOR EQUIPPED WITH A TEMPERATURE SENSOR Granted FR2367280A1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7630297A FR2367280A1 (en) 1976-10-08 1976-10-08 STRAIN GAUGE SENSOR EQUIPPED WITH A TEMPERATURE SENSOR
BE181173A BE859016A (en) 1976-10-08 1977-09-23 STRAIN GAUGE SENSOR EQUIPPED WITH A TEMPERATURE SENSOR
IT2811777A IT1085284B (en) 1976-10-08 1977-09-29 EXTENSIMETER INDICATOR WITH TEMPERATURE PROBE
GB4171577A GB1562139A (en) 1976-10-08 1977-10-06 Strain gauge transducer provided with a temperatrue sensor
NL7711021A NL7711021A (en) 1976-10-08 1977-10-07 PROCESS FOR THE SIMULTANEOUS MANUFACTURE OF A SENSOR EQUIPPED WITH STRIPES AND OF A TEMPERATURE PROBE FITTED ON A SAME SUBSTRATE.
DE19772745263 DE2745263A1 (en) 1976-10-08 1977-10-07 MEASURING PROBE WITH STRAIN GAUGE AND METHOD FOR ITS MANUFACTURING

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7630297A FR2367280A1 (en) 1976-10-08 1976-10-08 STRAIN GAUGE SENSOR EQUIPPED WITH A TEMPERATURE SENSOR

Publications (2)

Publication Number Publication Date
FR2367280A1 true FR2367280A1 (en) 1978-05-05
FR2367280B1 FR2367280B1 (en) 1980-04-30

Family

ID=9178522

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7630297A Granted FR2367280A1 (en) 1976-10-08 1976-10-08 STRAIN GAUGE SENSOR EQUIPPED WITH A TEMPERATURE SENSOR

Country Status (6)

Country Link
BE (1) BE859016A (en)
DE (1) DE2745263A1 (en)
FR (1) FR2367280A1 (en)
GB (1) GB1562139A (en)
IT (1) IT1085284B (en)
NL (1) NL7711021A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2435022A1 (en) * 1978-08-28 1980-03-28 Babcock & Wilcox Co PRESSURE TRANSDUCERS WITH ELECTRICALLY PROTECTED PIEZO-RESISTANT SENSORS
EP0018013A1 (en) * 1979-04-23 1980-10-29 Siemens Aktiengesellschaft Strain gauge bridge circuit
FR2535458A1 (en) * 1982-10-29 1984-05-04 Flopetrol Etu Fabrications PRESSURE AND TEMPERATURE SENSOR
FR2545605A1 (en) * 1983-05-03 1984-11-09 Sedeme Measurement device with strain gauges, in particular for measuring pressure
EP0620424A1 (en) * 1993-04-16 1994-10-19 GSF - Forschungszentrum für Umwelt und Gesundheit, GmbH Method for measuring temperature and resistance thermometer for carrying out this method
WO1995011433A1 (en) * 1993-10-21 1995-04-27 John David Barnett Manufacturing of strain gauged sensors

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4188258A (en) * 1978-05-18 1980-02-12 Gulton Industries, Inc. Process for fabricating strain gage transducer
DE2902244C2 (en) * 1979-01-20 1982-11-11 W.C. Heraeus Gmbh, 6450 Hanau Stretch marks with a metal alloy measuring grid applied in a vacuum to an adhesive plastic carrier
EP0053337B1 (en) * 1980-11-29 1987-05-20 Tokyo Electric Co., Ltd. Load cell and method of manufacturing the same
JPS59230101A (en) * 1983-06-13 1984-12-24 Tokyo Electric Co Ltd Distortion sensor

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2435022A1 (en) * 1978-08-28 1980-03-28 Babcock & Wilcox Co PRESSURE TRANSDUCERS WITH ELECTRICALLY PROTECTED PIEZO-RESISTANT SENSORS
EP0018013A1 (en) * 1979-04-23 1980-10-29 Siemens Aktiengesellschaft Strain gauge bridge circuit
FR2535458A1 (en) * 1982-10-29 1984-05-04 Flopetrol Etu Fabrications PRESSURE AND TEMPERATURE SENSOR
FR2545605A1 (en) * 1983-05-03 1984-11-09 Sedeme Measurement device with strain gauges, in particular for measuring pressure
EP0620424A1 (en) * 1993-04-16 1994-10-19 GSF - Forschungszentrum für Umwelt und Gesundheit, GmbH Method for measuring temperature and resistance thermometer for carrying out this method
WO1995011433A1 (en) * 1993-10-21 1995-04-27 John David Barnett Manufacturing of strain gauged sensors

Also Published As

Publication number Publication date
BE859016A (en) 1978-03-23
GB1562139A (en) 1980-03-05
DE2745263A1 (en) 1978-04-13
NL7711021A (en) 1978-04-11
FR2367280B1 (en) 1980-04-30
IT1085284B (en) 1985-05-28

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Legal Events

Date Code Title Description
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