WO2016056555A1 - Pressure sensor, differential pressure sensor, and mass flow rate control device using same - Google Patents
Pressure sensor, differential pressure sensor, and mass flow rate control device using same Download PDFInfo
- Publication number
- WO2016056555A1 WO2016056555A1 PCT/JP2015/078358 JP2015078358W WO2016056555A1 WO 2016056555 A1 WO2016056555 A1 WO 2016056555A1 JP 2015078358 W JP2015078358 W JP 2015078358W WO 2016056555 A1 WO2016056555 A1 WO 2016056555A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- diaphragm
- pressure sensor
- elastic body
- sensor according
- strain
- Prior art date
Links
- 239000000463 material Substances 0.000 claims abstract description 49
- 239000012530 fluid Substances 0.000 claims abstract description 37
- 239000010935 stainless steel Substances 0.000 claims abstract description 17
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 17
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 229910045601 alloy Inorganic materials 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 10
- 238000005242 forging Methods 0.000 claims description 9
- 239000007769 metal material Substances 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 5
- 229910001374 Invar Inorganic materials 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 229910000833 kovar Inorganic materials 0.000 claims description 4
- 229910052718 tin Inorganic materials 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 4
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 19
- 238000013461 design Methods 0.000 abstract description 5
- 238000003466 welding Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 230000008859 change Effects 0.000 description 10
- 230000007797 corrosion Effects 0.000 description 9
- 238000005260 corrosion Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
- 239000010409 thin film Substances 0.000 description 6
- 238000005304 joining Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
- A61B5/0004—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network characterised by the type of physiological signal transmitted
- A61B5/0008—Temperature signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/007—Malfunction diagnosis, i.e. diagnosing a sensor defect
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
- G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/0247—Pressure sensors
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/021—Measuring pressure in heart or blood vessels
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/03—Detecting, measuring or recording fluid pressure within the body other than blood pressure, e.g. cerebral pressure; Measuring pressure in body tissues or organs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
- G01L1/2231—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being disc- or ring-shaped, adapted for measuring a force along a single direction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
Definitions
- the present invention relates to a pressure sensor, a differential pressure sensor, and a mass flow control device using the same, and more particularly to a pressure sensor and a differential pressure sensor suitable for detecting pressure using deformation of a diaphragm accompanying pressure application, and the same.
- the present invention relates to a mass flow rate control device using the.
- a pressure sensor that detects the pressure using the deformation of the diaphragm accompanying the pressure application
- a pressure sensor that detects the deformation of the diaphragm accompanying the pressure application as a strain by forming (pasting) a strain gauge on the diaphragm. Is well known.
- the above strain gauge changes its electrical resistance even with slight deformation.
- a strain gauge is formed of a set of four, and by constructing a bridge circuit, a method of measuring a differential voltage proportional to pressure as an output is often used. It is possible to compensate for the temperature characteristics of the gauge itself. For example, even if the strain gauge itself has temperature characteristics, the output of the strain sensor does not vary when the deformation of the four strain gauges due to temperature changes is equal.
- a silicon diaphragm to be a pressure receiving part is formed by partially thinning the silicon substrate, and a strain gauge is formed by impurity diffusion on the silicon diaphragm
- the pressure sensor having such a configuration has advantages such as high sensitivity and the ability to form a strain gauge as an integral structure on a silicon diaphragm.
- the above-described pressure sensor is not suitable when the pressure of the measurement target is high or when corrosion resistance is required, and a strain gauge is attached to a metal diaphragm or a strain sensor with a strain gauge is attached. Many pressure sensors are used.
- Patent Document 1 discloses a pressure sensor, which is a micromachining type device for detecting a pressure value, which includes two constituent elements, and the first constituent element includes a first material.
- a second component that includes the first diaphragm and is made of the second material includes a first region and a second region. The first region is formed thinner than the second region, and the first diaphragm and at least a part of the first region are firmly coupled to each other. And in order to improve the type in which the first material has a larger coefficient of thermal expansion than the second material, the first diaphragm made of the first material has a lateral expansion with respect to the temperature.
- a first bonding material adapted to transmit to the first region of the second component, wherein the transmission of lateral expansion is provided between the first diaphragm and at least a portion of the first region; Is done through.
- the first problem is a problem caused by the difference in linear expansion coefficient between different types of materials
- the second problem is a problem related to improvement of the sensitivity of the pressure sensor.
- stainless steel or the like is formed on a portion (diaphragm) that directly contacts the fluid among the members constituting the pressure sensor. It is necessary to adopt high corrosion resistance material.
- the linear expansion coefficient of silicon is 2.6 ⁇ 10 ⁇ 6 K ⁇ 1
- the linear expansion coefficient of stainless steel is 15.9 ⁇ 10 ⁇ 6 K. -1, which is a big difference.
- the adhesion between the silicon strain sensor and the stainless steel diaphragm can be maintained, and even if no damage has occurred, if the operating environment temperature of the pressure sensor fluctuates, Due to the difference, a large stress is generated in the bonded portion.
- the strain sensor detects the strain even though the diaphragm does not change the pressure of the fluid, so that a measurement error due to a change in the use environment temperature of the pressure sensor occurs. .
- the elastic modulus of the diaphragm is determined by the Young's modulus of the material constituting the diaphragm, the pressure receiving diameter and thickness of the diaphragm, etc., the Young's modulus of the material constituting the diaphragm is reduced, the pressure receiving diameter is increased, and The thinner the thickness, the smaller the elastic modulus of the diaphragm.
- the sensitivity of the pressure sensor is the material that constitutes the diaphragm. Is governed by the mechanical properties of
- the present invention has been made in view of the above points, and the object of the present invention is that even when stainless steel is used for the diaphragm, the diaphragm and the strain sensor are not separated from each other, and the usage environment Pressure sensor and differential pressure sensor that are not easily affected by temperature and that can increase the degree of design freedom of members constituting the pressure sensor, and that the sensitivity of the pressure sensor is not governed solely by the mechanical properties of the material constituting the diaphragm It is in providing a mass flow control device using.
- a pressure sensor includes a diaphragm that is deformed by the pressure of a fluid, an elastic body that covers the entire surface of the diaphragm, and one side is joined to the diaphragm, and the other side of the elastic body. And a strain sensor that is joined and installed on the end side away from a position corresponding to the center of the diaphragm and detects the deformation of the elastic body interlocking with the deformation of the diaphragm as a strain, and the elastic body Is made of a material having a linear expansion coefficient close to that of the material forming the strain sensor.
- the differential pressure sensor of the present invention includes a first diaphragm and a second diaphragm which are arranged opposite to each other and are deformed by the pressure of a fluid, and the first diaphragm and the second diaphragm.
- An elastic body disposed between the diaphragms, one side joining the first diaphragm and the other side joining the second diaphragm, one side or the other side of the elastic body, and the first side Strain that is installed on the end side away from the position corresponding to the center of the diaphragm and the second diaphragm, and detects the deformation of the elastic body as a strain in conjunction with the deformation of the first diaphragm and the second diaphragm
- the elastic body is made of a material having a linear expansion coefficient close to that of the material forming the strain sensor.
- the diaphragm and the strain sensor are not separated from each other, are not easily affected by the operating environment temperature, and the sensitivity of the pressure sensor is reduced.
- the degree of freedom in designing the members constituting the pressure sensor can be increased without being governed only by the mechanical characteristics of the material constituting the pressure sensor.
- FIG. 2 is a cross-sectional view taken along a broken line AA in FIG.
- adopted for the pressure sensor of this invention is shown, and it is an example of the bridge circuit formed with four strain gauges.
- FIG. 5 is a cross-sectional view taken along a broken line AA in FIG. 4.
- FIG. 7 is a cross-sectional view taken along the broken line AA of FIG.
- FIG. 9 is a cross-sectional view taken along the broken line AA of FIG.
- FIG. 11 is a sectional view taken along a broken line AA in FIG. 10. It is sectional drawing which shows the absolute pressure sensor which is Example 6 of this invention. It is sectional drawing which shows the differential pressure sensor which is Example 7 of this invention.
- FIG. 1 and 2 show a pressure sensor according to a first embodiment of the present invention.
- a pressure sensor 1 includes a diaphragm 2 that is deformed by the pressure of a fluid, an elastic body 3 that covers the entire circumference of the diaphragm 2, and one side is joined to the diaphragm 2, and an elastic body 3.
- the deformation of the elastic body 3 that is installed on the other side and joined to the end side (left side in FIGS. 1 and 2) away from the position corresponding to the center of the diaphragm 2 is interlocked with the deformation of the diaphragm 2.
- the elastic body 3 is made of a material having a linear expansion coefficient close to the linear expansion coefficient of the material forming the strain sensor 4, and fixes the outer peripheral portion of the diaphragm 2 as well as a fluid.
- the support 5 in which a hole for introducing a hole is formed is schematically configured.
- the above-mentioned elastic body 3 has a cylindrical shape, the central portion thereof is formed thinner than the end portion, and slits 8A and 8B which are holes are formed in addition to the portion where the strain sensor 4 of the elastic body 3 is installed.
- the slits 8A and 8B are formed so as to extend from end to end of the elastic body 3 so as to sandwich the strain sensor 4, and penetrate the elastic body 3 in the vertical direction (hereinafter referred to as Z direction) in FIG.
- the diaphragm 2 of this embodiment is made of a metal material, for example, stainless steel having high corrosion resistance or a clad material of stainless steel and other metal materials.
- the diaphragm 2 of the present embodiment has a cylindrical shape, and the central portion thereof is thinned from the end portion by processing (t1> t2), and the center of the central portion of the thinned diaphragm 2 is elastic. A part of the structure is raised for joining to the body 3. As a method for reducing the thickness of the central portion of the diaphragm 2, there are cutting and pressing.
- the diaphragm 2 has a structure in which the pressure of the fluid to be measured is deformed by receiving the pressure from the surface opposite to the installation surface of the strain sensor 4 and a strain proportional to the pressure is generated in the bonded strain sensor 4.
- the outer periphery of the diaphragm 2 of this embodiment is fixed to the support 5, and the diaphragm 2 and the support 5 are fixed so as to ensure airtightness using resistance welding or laser welding. It has a structure that does not leak from the gap with the support 5.
- the elastic body 3 is made of a metal material, and is made of, for example, any one of a Kovar alloy, a 42 alloy, an Invar alloy, or the like having a linear expansion coefficient close to that of the material of the strain sensor 4.
- the elastic body 3 may be made of a material whose linear expansion coefficient at 20 ° C. does not exceed 2.5 times the value of the linear expansion coefficient at 20 ° C. of the semiconductor substrate (silicon).
- the elastic body 3 of the present embodiment has a cylindrical shape, and the central portion thereof is thinned from the end portion by processing. Since the elastic body 3 is not in direct contact with the fluid, it is possible to form a hole other than the portion where the strain sensor 4 is installed in order to reduce the rigidity.
- the slits 8 ⁇ / b> A and 8 ⁇ / b> B are formed in a line shape along the radial direction of the elastic body 3 (hereinafter, referred to as the X direction) so that the strain sensor 4 is sandwiched between the strain sensor 4 and the strain sensor 4.
- the part may be a beam.
- the end portion of the elastic body 3 which is made into a thin film is formed with a fillet, and has a structure that relieves stress concentration caused by pressure application or temperature change.
- the elastic body 3 has a width equal to or larger than the size of the strain sensor 4 so that the strain sensor 4 can be installed, and at least two joints 6 in the center of the diaphragm 2 and the outer peripheral portion of the diaphragm 2.
- the joint portion 6 is fixed at one point and the outer peripheral portion is fixed at the entire periphery), and the joint portion 6 is firmly fixed by welding so as not to be peeled off due to application of pressure, temperature change, or the like.
- the joint 6 is fixed not only on the entire surface of the thin film portion of the diaphragm 2 but only on a partial region (one point), thereby reducing the influence of the difference in linear expansion coefficient between the diaphragm 2 and the elastic body 3. Since the elastic body 3 is joined to the diaphragm 2 via the joint portion 6, deflection occurs in conjunction with the deformation of the diaphragm 2, but by appropriately designing the elastic coefficient of the elastic body 3,
- the elastic modulus can be reinforced.
- the depth of the thin film portion of the elastic body 3 is shallower than the height of the diaphragm 2, and the elastic body 3 and the diaphragm 2 are pressed against each other via the joint 6.
- the elastic body 3 is pushed up so as to expand, and the diaphragm 2 is pushed down. Since the elastic body 3 is pushed up in a state where no pressure is applied, the inversion of the unevenness of the elastic body 3 due to the application of pressure is suppressed, and an effect of improving the linearity of sensitivity can be obtained.
- the main stress at the back end of the diaphragm 2 can be a compressive stress opposite to the stress generated when pressure is applied, and the diaphragm 2 when pressure is applied is applied. It is possible to reduce the main stress generated in.
- strain gauges 7a, 7b, 7c, and 7d are formed in the center of the surface of the strain sensor 4, and a set of four bridge circuits is configured.
- the strain sensor 4 is made of a single crystal silicon substrate, and the strain gauges 7a, 7b, 7c, 7d are formed by diffusing impurities into the silicon substrate. Furthermore, the strain gauges 7a and 7b are arranged so that the X direction is parallel, and the strain gauges 7c and 7d are arranged so that the circumferential direction of the diaphragm 2 (hereinafter referred to as the Y direction) is parallel to the direction in which the current flows.
- the Y direction the circumferential direction of the diaphragm 2
- an output proportional to the strain difference between the X direction and the Y direction can be obtained as a differential output (Out1-Out2) of the intermediate potential of the bridge circuit.
- the temperature characteristics of the strain gauges 7a, 7b, 7c, and 7d are equal to those of the four strain gauges, the temperature change of the electrical resistance becomes equal. It does not affect.
- the strain sensor 4 is installed at the end of the thin film portion of the elastic body 3 for the purpose of improving sensitivity.
- the strain sensor 4 By installing the strain sensor 4 at the end of the thin film portion of the elastic body 3, compressive strain and tensile strain are generated in the strain sensor 4 in the X direction and Y direction, respectively, and the strain difference can be increased. It is. Thereby, the improvement of the sensitivity of the pressure sensor 1 can be expected.
- the elastic body 3 and the strain sensor 4 are firmly fixed via a bonding layer.
- a metal (Au / Sn or Au / Ge) bond or a low melting point glass (vanadium glass) for the bonding between them, it is possible to suppress creep deformation accompanying a long-term temperature or pressure application. Since these metals (Au / Sn or Au / Ge) and low melting point glass (vanadium glass) are hard materials, the deformation of the elastic body 3 can be efficiently transmitted to the strain sensor 4.
- the support 5 is a member that supports the connection between the diaphragm 2 and a flange (not shown) attached to the pipe through which the fluid to be measured flows.
- the flange and the pipe are fixed by screws, and if the flange and the diaphragm 2 are directly fixed, the sensitivity may change due to the effect of fastening the screws.
- a constriction 5a is provided in a part of the support 5.
- slits 8A and 8B are formed in the elastic body 3, and penetrate through the elastic body 3 in the Z direction.
- the slits 8 ⁇ / b> A and 8 ⁇ / b> B are formed from end to end in the elastic body 3 in the X direction in FIG. 1, and their positions are provided at a distance from the strain sensor 4.
- the elastic body 3 provided with the strain sensor 4 has a beam shape, and the center and both ends are fixed by the diaphragm 2.
- the strain sensor 4 fixed to the end of the elastic body 3 generates an output as the temperature changes.
- the linear expansion coefficient of stainless steel, which is the material of the diaphragm 2 is different from that of silicon, which is the material of the strain sensor 4, by more than five times.
- the bonding layer for efficiently transmitting the deformation of the elastic body 3 to the strain sensor 4 is greatly affected by Au / Sn, Au / Ge, or low melting point glass (vanadium glass), which is a hard material.
- the strain sensor 4 When the temperature outside the pressure sensor 1 decreases, the strain sensor 4 is subjected to compression strain in both the X direction and the Y direction. If the strains in the X direction and the Y direction are equal, the output does not change, but the output changes because the compressive strain in the Y direction becomes larger. This is because the stress is relaxed in the X direction by the deformation of the elastic body 3, but the area of the elastic body 3 is small and difficult to deform in the Y direction, so that the stress cannot be relaxed compared to the X direction.
- the elastic body 3 and the strain sensor 4 are fixed by using high-temperature bonding of 300 ° C. or higher, such as low melting point glass, a strain difference occurs between the X direction and the Y direction when the temperature is lowered after bonding. , Detected as the output offset of the initial zero point.
- the output offset at the initial zero point is generated, a circuit for correcting the offset to zero is required, and problems such as a narrow usage range of the pressure sensor 1 occur.
- the temperature of about 100 ° C. changes for a consumer pressure sensor and about 160 ° C. for an in-vehicle pressure sensor, and the zero point output of the pressure sensor 1 changes.
- the elastic body 3 such as a slit
- the elastic body 3 is easily deformed also in the Y direction, and the compressive strain in the Y direction applied to the strain sensor 4 is reduced.
- the difference in strain between the X direction and the Y direction becomes small, and it becomes possible to suppress the output fluctuation of the zero point accompanying the temperature change.
- line-shaped slits 8A and 8B are formed in the elastic body 3 as means for reducing the compressive strain in the Y direction applied to the strain sensor 4.
- the depth of the thin film portion of the elastic body 3 is shallower than the height of the diaphragm 2, and the elastic body 3 and the diaphragm 2 are pressed against each other via the joint 6.
- the elastic body 3 has a convex shape toward the installation surface of the strain sensor 4 rather than at least flat. Due to the convex shape of the elastic body 3, the unevenness of the elastic body 3 is prevented from being reversed when pressure by the fluid is applied. This prevents buckling and reversal of the sign of the strain sensor 4 due to inversion of the unevenness of the elastic body 3, thereby improving the linearity of sensitivity.
- the diaphragm 2 is made of a metal material, and is made of stainless steel having high corrosion resistance, and the diaphragm 2 has a cylindrical shape, and the central portion is thinned from the end portion by processing.
- the center of the central portion of the thinned diaphragm 2 has a partially raised structure for joining with the elastic body 3.
- a press working is used as a method of forming the diaphragm 2, and a collar 2 a for welding to the support 5 is provided on the outer peripheral portion of the diaphragm 2, and fluid leakage is caused by welding the collar 2 a and the support 5 of the diaphragm 2. Is preventing. There is no bent portion between the outer peripheral portion and the center portion of the diaphragm 2, and the deformation when the pressure is applied by the fluid is larger than that when the bent portion is present, and the sensitivity is also increased.
- the diaphragm 2 When pressure is applied by the fluid, the diaphragm 2 is pushed up by the fluid, and the maximum principal stress is generated at the end of the back surface of the diaphragm 2. Since it is necessary that the maximum principal stress of the tension does not exceed the proof stress of the material of the diaphragm 2, the diaphragm 2 is configured to be pushed down by the elastic body 3 when no pressure is applied. When the diaphragm 2 is pushed down, a compressive stress is generated at the back end of the diaphragm 2 in a state where no pressure is applied. Since this stress is opposite to the stress generated when pressure is applied, the main stress applied to the diaphragm 2 can be reduced and the dynamic range of pressure is expanded.
- the movable part of the pressure sensor 1 is configured by the two members of the elastic body 3 and the diaphragm 2.
- the part that is required to adopt the material is constituted by a diaphragm 2 made of stainless steel or the like, and the part that requires a low linear expansion coefficient because of the need to be coupled to the strain sensor 4 is Kovar alloy, 42 alloy or It is possible to independently select a material most suitable for each of a plurality of functions required for each member, such as the elastic body 3 made of any one of Invar alloy or the like.
- the first problem relating to the temperature environment can be solved.
- the surfaces of the diaphragm 2 and the elastic body 3 that are individually designed are joined to deform the diaphragm 2 that has received the pressure of the fluid, and the elastic body 3 provided with the strain sensor 4. Can be communicated to.
- the function as the pressure sensor 1 is exhibited by combining these joined members together.
- the diaphragm 2 made of stainless steel and the elastic body 3 made of any one of Kovar alloy, 42 alloy, Invar alloy, and the like are joined through a joint portion made of a molten portion (welding).
- they are not joined in a wide area, but only a part of them is joined in a small area.
- the magnitude of the tensile stress or the compressive stress generated according to the difference in the linear thermal expansion coefficient due to the change in the use environment temperature is also smaller than that in the case of bonding on a wide surface.
- the pressure sensor 1 by comprising the pressure sensor 1 with a some member, compared with the case where it comprises with a single member, not only the selection of material but the design of the shape of each member, a dimension, etc. The degree of freedom increases.
- the elastic coefficient k of the movable part is determined by the Young's modulus and the shape of the diaphragm 2.
- the movable part is separated into the diaphragm 2 and the elastic body 3, for example, a structure in which the elastic body 3 is pushed up or the diaphragm 2 is pushed down becomes possible.
- the diaphragm 2 and the elastic body 3 are configured to pressurize each other, whereby the diaphragm 2 is pushed down, and the stress generated when pressure is applied to the main stress at the back end of the diaphragm 2 in the initial state. , The main stress applied to the diaphragm 2 can be reduced, and the range of pressure that can be measured by the pressure sensor can be expanded.
- the joint surface of the diaphragm may be recessed due to the processing accuracy and the influence of the joint. Since the diaphragm swells when the pressure by the fluid is applied, the unevenness of the diaphragm is reversed when the pressure is applied. This also affects the strain sensor joined to the diaphragm, and the strain applied to the strain sensor is reversed from tension to compression. There was a possibility that non-linearity would increase due to the buckling of the diaphragm and the sign reversal of the strain sensor due to the reversal of the unevenness of the diaphragm and the reversal of the tension and compression of the strain sensor.
- the diaphragm and the strain sensor are not separated from each other and are not easily affected by the operating environment temperature, and the pressure
- the sensitivity of the sensor is not governed only by the mechanical characteristics of the material constituting the diaphragm, and the degree of freedom in designing the members constituting the pressure sensor can be increased.
- the pressure sensor 1 of the present embodiment shown in the figure is a first sensor that penetrates the elastic body 3 in the Z direction so as to sandwich the strain sensor 4 other than the portion where the strain sensor 4 of the elastic body 3 is installed.
- a second through hole 9B that penetrates in the Z direction is formed in the through hole 9A and the elastic body 3 that communicates with the first through hole 9A and is opposite to the side where the strain sensor 4 is installed. Has been.
- the first through-hole 9A provided in the elastic body 3 at a certain distance in the Y direction from the strain sensor 4 in the pressure sensor 1 of the present embodiment is the end of the elastic body 3 in the X direction length.
- the second through hole 9 ⁇ / b> B is also formed in the elastic body 3 that is formed from the end to the end and is opposite to the direction in which the strain sensor 4 is installed when viewed from the joint 6.
- the elastic body 3 provided with the strain sensor 4 has a beam shape, and is fixed by the diaphragm 2 only at the center and the end in the direction in which the strain sensor 4 is provided.
- the same effect as that of the first embodiment can be obtained, and the rigidity of the elastic body 3 can be reduced because the number of fixing points of the elastic body 3 is smaller than that of the first embodiment.
- the elastic body 3 is greatly deformed compared to the first embodiment, and the sensitivity is increased.
- FIG. 6 and 7 show a third embodiment of the pressure sensor of the present invention.
- the third embodiment described below only differences from the first embodiment will be described.
- the pressure sensor 1 of this embodiment shown in the figure is formed in the elastic body 3 so as to sandwich the strain sensor 4 and includes two recesses (recesses) 10A and 10B extending from the end of the elastic body 3 to the end. These recesses (recesses) 10A and 10B are configured not to penetrate through the elastic body 3.
- the lengths of the recesses (recesses) 10A and 10B are formed from end to end of the elastic body 3, and the positions of the recesses (recesses) 10A and 10B are as follows. , Provided at a distance from the strain sensor 4 by a certain distance. Since the elastic body 3 is not beam-shaped, even if the joint 6 is misaligned in the Y direction, twisting of the beam is suppressed.
- the same effects as those of the first embodiment can be obtained, and the recesses (recesses) 10A and 10B do not penetrate the elastic body 3 as compared with the first embodiment.
- the strain sensor 4 is merely provided on the surface of the elastic body 3, and no processing such as slits is performed.
- the same effects as those of the first embodiment can be obtained and, of course, the deformation is smaller than that of the first embodiment. Cost can also be reduced.
- a plurality of bent portions 11 are formed between the center portion and the end portion of the diaphragm 2.
- slits 8A and 8B are formed in the elastic body 3, and the slits 8A and 8B penetrate the elastic body 3.
- the length is formed from end to end of the elastic body 3, and the position is provided at a location away from the strain sensor 4 by a certain distance.
- the elastic body 3 on which the strain sensor 4 is installed has a beam shape, and the center and both ends are fixed to the diaphragm 2.
- the diaphragm 2 is made of a metal material and is made of stainless steel having high corrosion resistance.
- the diaphragm 2 has a cylindrical shape, and the central portion is thinned from the end portion by processing.
- the center of the center portion has a structure that is partly raised for joining to the elastic body 3.
- a plurality of bent portions 11 are formed between the outer peripheral portion (end portion) and the central portion (central portion) of the diaphragm 2.
- the configuration of the present embodiment it is possible to obtain the same effect as that of the first embodiment, and of course, a plurality of pieces between the outer peripheral portion (end portion) and the central portion (central portion) of the diaphragm 2 are provided.
- the bent portion 11 is formed, and the stress concentration when pressure is applied by the fluid can be relaxed.
- FIG. 12 shows an absolute pressure sensor as Example 6 of the present invention.
- the absolute pressure sensor 12 of this embodiment is composed of a pressure sensor 1 and an airtight housing 13 having the same configuration as that of the first embodiment.
- the airtight housing 13 is fixed to the support 5 so as to surround the diaphragm 2 and the strain sensor 4, and the airtight space 14 around the strain sensor 4 is maintained at a constant atmospheric pressure.
- a fixing method capable of maintaining airtightness such as resistance welding or laser welding is used.
- the structure is configured not to be affected by pressure fluctuations other than the measurement target.
- a collar 5b for welding to the airtight housing 13 is provided on the outer periphery of the support 5, and the airtight space 14 is secured by fixing the collar 5b of the support 5 to the airtight housing 13 without a gap.
- a fixing method such as resistance welding or laser welding
- the thickness of the collar 5b is 0.20 mm or less.
- the thickness of the collar 5b is 0.15 mm or less.
- the thickness of the collar 5b is preferably 0.10 mm or more.
- the collar 5b When resistance welding or laser welding is performed using the collar 5b having the above preferred thickness, since the collar 5b is thin, a through-hole is formed in the collar 5b due to the impact of welding, or the process of cooling after welding As a result, the collar 5b may be broken, and the airtight space 14 may not be secured.
- Adopting a material with few defects such as foreign matter and voids as the material for forming the support 5 prevents such foreign matter and voids and other defects from being present in the collar 5b, and through holes are formed in the collar 5b. This is preferable because there is no risk of formation or cracking.
- the support 5 having few defects such as foreign matters and voids in the brim 5b it can be manufactured by machining a material employing a known technique such as a vacuum remelting method or a forging method.
- the support 5 is made so that the direction of the forging line (fiber direction) formed by forging coincides with the in-plane direction of the collar 5b. It is more preferable to manufacture.
- the tensile strength in the direction of the forging line is larger than in the other directions. Therefore, by matching the direction of the forging line with the in-plane direction of the collar 5b, in the cooling process after welding. It is possible to more reliably prevent the brim 5b from cracking.
- the direction of the forging line of the support 5 can be easily determined by a method such as polishing the cut surface of the support 5 and observing the metal structure with an optical microscope or the like.
- the output measured by the strain sensor 4 is drawn out from the through electrode 15 formed in the airtight housing 13.
- the through electrode 15 is formed by plating, is connected to the strain sensor 4 via a flexible substrate electrode (not shown), and the airtight space 14 is secured.
- the support 5 is a member that supports the connection between the flange 16 and the diaphragm 2 attached to the pipe through which the fluid to be measured flows.
- the flange 16 and the pipe are fixed by screws. If the flange 16 and the diaphragm 2 are directly fixed, the sensitivity may change due to the fastening effect of the screws.
- a constriction 5a is provided in a part of the support 5.
- FIG. 13 shows a differential pressure sensor as Example 7 of the present invention.
- the differential pressure sensor 17 of the present embodiment is arranged so as to be opposed to each other, the first diaphragm 22 and the second diaphragm 32 being deformed by the pressure of the fluid, and the first diaphragm 22 and the second diaphragm. 32, the elastic member 3 having one side bonded to the first diaphragm 22 and the other side bonded to the second diaphragm 32, one side or the other side of the elastic body 3, and the first side
- the elastic body 3 is installed on the end side (left side in FIG.
- the elastic body 3 is made of a material having a linear expansion coefficient close to the linear expansion coefficient of the material forming the strain sensor 4. It is substantially constituted.
- the differential pressure sensor 17 of the present embodiment includes two pressure sensors 21 and 31 and an airtight housing 18 having a configuration similar to that of the first embodiment described above.
- the pressure sensors 21 and 31 are respectively provided with a first diaphragm 22 and a second diaphragm 32 and are fixed so as to face each other with an elastic body 3 common to the pressure sensors 21 and 31 interposed therebetween.
- the hermetic housing 18 surrounds the pressure sensors 21 and 31 and maintains the airtight space 14 around the pressure sensors 21 and 31 at a constant atmospheric pressure. Thereby, it is set as the structure which is not influenced by pressure fluctuations other than a measuring object.
- first diaphragm 22 and the second diaphragm 32 are in contact with the first fluid and the second fluid, respectively.
- the first diaphragm 22 and the second diaphragm 32 are respectively connected to the joint portion 26 and the joint portion 36. It is joined to the elastic body 3.
- the joint portion 26 and the joint portion 36 are firmly fixed by welding, and the first diaphragm 22 and the second diaphragm 32 are deformed when a difference occurs in the pressure between the first fluid and the second fluid. It has a structure.
- the first fluid and the second fluid may be the same fluid in communication with different locations in the same fluid system.
- the pressure sensor 1 or the differential pressure sensor 17 according to the present invention can be incorporated in, for example, a mass flow controller used in a semiconductor manufacturing apparatus and used for monitoring the pressure to be evaluated.
- this invention is not limited to an above-described Example, Various modifications are included.
- the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described.
- a part of the configuration of the embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of a certain embodiment.
Abstract
Description
弾性体3が凸形状であることにより、流体による圧力が加わることに伴い、弾性体3の凹凸が反転することを防いでいる。これにより、弾性体3の凹凸が反転することによる座屈やひずみセンサ4の符号反転を防ぎ、感度の線形性向上を図っている。 The depth of the thin film portion of the
Due to the convex shape of the
同様に、使用環境温度の変化によって線熱膨張係数の差に応じて生じる引っ張り応力又は圧縮応力の大きさも、広い面で接着されている場合に比べて小さい。 Therefore, even if there is a difference in the coefficient of linear expansion between the
Similarly, the magnitude of the tensile stress or the compressive stress generated according to the difference in the linear thermal expansion coefficient due to the change in the use environment temperature is also smaller than that in the case of bonding on a wide surface.
例えば、上記した実施例は本発明を分かりやすく説明するために詳細に説明したものであり、必ずしも説明した全ての構成を備えるものに限定されるものでは無い。また、実施例の構成の一部を他の実施例の構成に置き換えることが可能であり、また、ある実施例の構成に他の実施例の構成を加えることも可能である。また、各実施例の構成の一部について、他の構成の追加・削除・置換をすることが可能である。 In addition, this invention is not limited to an above-described Example, Various modifications are included.
For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. Also, a part of the configuration of the embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of a certain embodiment. Further, it is possible to add, delete, and replace other configurations for a part of the configuration of each embodiment.
Claims (19)
- 流体の圧力により変形するダイアフラムと、該ダイアフラムの全面を覆うと共に、一方側が前記ダイアフラムと接合する弾性体と、該弾性体の他方側で、かつ、前記ダイアフラムの中心に相当する位置から離れた端部側に接合して設置され、前記ダイアフラムの変形と連動する前記弾性体の変形をひずみとして検出するひずみセンサとを備え、
前記弾性体は、前記ひずみセンサを形成する材料の線膨張係数に近い線膨張係数をもつ材料から成ることを特徴とする圧力センサ。 A diaphragm that is deformed by the pressure of the fluid; an elastic body that covers the entire surface of the diaphragm; one side is joined to the diaphragm; and the other end of the elastic body that is away from a position corresponding to the center of the diaphragm A strain sensor that is installed on the part side and detects the deformation of the elastic body interlocking with the deformation of the diaphragm as a strain;
The pressure sensor according to claim 1, wherein the elastic body is made of a material having a linear expansion coefficient close to that of the material forming the strain sensor. - 請求項1に記載の圧力センサにおいて、
前記ダイアフラムは、ステンレス鋼又は該ステンレス鋼と他の金属材料とのクラッド材から成ることを特徴とする圧力センサ。 The pressure sensor according to claim 1.
2. The pressure sensor according to claim 1, wherein the diaphragm is made of stainless steel or a clad material of the stainless steel and another metal material. - 請求項1又は2に記載の圧力センサにおいて、
前記ダイアフラムは円筒形を成すと共に、中央部が端部より薄く形成され、その薄く形成された中央部の中心が盛り上がり、この盛り上がった部分が前記弾性体と接合していることを特徴とする圧力センサ。 The pressure sensor according to claim 1 or 2,
The diaphragm has a cylindrical shape, a central portion is formed thinner than an end portion, a center of the thin central portion is raised, and the raised portion is joined to the elastic body. Sensor. - 請求項1乃至3のいずれか1項に記載の圧力センサにおいて、
前記ひずみセンサはシリコンから成り、かつ、前記弾性体は、前記シリコンの線膨張係数に近い線膨張係数をもつコバール合金、42合金又はインバー合金のいずれかから成ることを特徴とする圧力センサ。 The pressure sensor according to any one of claims 1 to 3,
The strain sensor is made of silicon, and the elastic body is made of any one of Kovar alloy, 42 alloy, and Invar alloy having a linear expansion coefficient close to that of the silicon. - 請求項1乃至4のいずれか1項に記載の圧力センサにおいて、
前記弾性体は円筒形を成すと共に、中央部が端部より薄く形成され、かつ、前記弾性体の前記ひずみセンサが設置される部分以外に穴が形成されていることを特徴とする圧力センサ。 The pressure sensor according to any one of claims 1 to 4,
The pressure sensor according to claim 1, wherein the elastic body has a cylindrical shape, a central portion is formed thinner than an end portion, and a hole is formed in a portion other than a portion of the elastic body where the strain sensor is installed. - 請求項5に記載の圧力センサにおいて、
前記穴は、前記ひずみセンサを挟むように形成され、前記弾性体の端から端まで延びた2本のスリットであり、かつ、該スリットは前記弾性体を貫通していることを特徴とする圧力センサ。 The pressure sensor according to claim 5,
The hole is formed so as to sandwich the strain sensor, and is two slits extending from end to end of the elastic body, and the slit penetrates the elastic body. Sensor. - 請求項5に記載の圧力センサにおいて、
前記穴は、前記ひずみセンサを挟むように形成され、前記弾性体を貫通している第1の貫通穴と、該第1の貫通穴と連通し、前記ひずみセンサが設置されている側とは反対側の前記弾性体に形成されている第2の貫通穴から成ることを特徴とする圧力センサ。 The pressure sensor according to claim 5,
The hole is formed so as to sandwich the strain sensor, and communicates with the first through hole penetrating the elastic body and the side on which the strain sensor is installed. A pressure sensor comprising a second through hole formed in the elastic body on the opposite side. - 請求項5に記載の圧力センサにおいて、
前記穴は、前記ひずみセンサを挟むように形成され、前記弾性体の端から端まで延びた2本のくぼみ(凹部)であり、かつ、該くぼみは前記弾性体を貫通していないことを特徴とする圧力センサ。 The pressure sensor according to claim 5,
The hole is formed so as to sandwich the strain sensor, and is two recesses (concave portions) extending from end to end of the elastic body, and the recess does not penetrate the elastic body. Pressure sensor. - 請求項1乃至8のいずれか1項に記載の圧力センサにおいて、
前記弾性体は、前記ひずみセンサの大きさと同等以上の幅を有し、少なくとも前記ダイアフラムの中央部及び外周部の2箇所と接合されていることを特徴とする圧力センサ。 The pressure sensor according to any one of claims 1 to 8,
The pressure sensor according to claim 1, wherein the elastic body has a width equal to or greater than the size of the strain sensor, and is joined to at least two locations of a central portion and an outer peripheral portion of the diaphragm. - 請求項9に記載の圧力センサにおいて、
前記弾性体は、前記ダイアフラムの中央部とは1点で接合され、前記ダイアフラムの外周部とは全周で接合されていることを特徴とする圧力センサ。 The pressure sensor according to claim 9,
The pressure sensor according to claim 1, wherein the elastic body is joined at one point to a central portion of the diaphragm and is joined to an outer peripheral portion of the diaphragm all around. - 請求項1乃至10のいずれか1項に記載の圧力センサにおいて、
前記弾性体と前記ひずみセンサは、金属又は低融点ガラスを用いて接合されていることを特徴とする圧力センサ。 The pressure sensor according to any one of claims 1 to 10,
The said elastic body and the said strain sensor are joined using the metal or the low melting glass, The pressure sensor characterized by the above-mentioned. - 請求項11に記載の圧力センサにおいて、
前記弾性体と前記ひずみセンサを接合する金属は、Au/Sn或いはAu/Geから成ることを特徴とする圧力センサ。 The pressure sensor according to claim 11.
The pressure sensor, wherein the metal that joins the elastic body and the strain sensor is made of Au / Sn or Au / Ge. - 請求項11に記載の圧力センサにおいて、
前記弾性体と前記ひずみセンサを接合する低融点ガラスは、バナジウム系ガラスから成ることを特徴とする圧力センサ。 The pressure sensor according to claim 11.
The low-melting glass that joins the elastic body and the strain sensor is made of vanadium-based glass. - 請求項1乃至13のいずれか1項に記載の圧力センサにおいて、
前記ダイアフラムは、その中央部と端部の間に複数の屈曲部が形成されていることを特徴とする圧力センサ。 The pressure sensor according to any one of claims 1 to 13,
The diaphragm is characterized in that a plurality of bent portions are formed between a central portion and an end portion of the diaphragm. - 請求項1に記載の圧力センサにおいて、
前記ダイアフラムの外周部を固定するサポートと、該サポートに固定され、前記ダイアフラムと前記弾性体及び前記ひずみセンサを囲うように設置された気密ハウジングとを備え、前記サポートと前記気密ハウジングは、気密性が維持可能なように固定されていることを特徴とする圧力センサ。 The pressure sensor according to claim 1.
A support that fixes an outer peripheral portion of the diaphragm; and an airtight housing that is fixed to the support and is disposed so as to surround the diaphragm, the elastic body, and the strain sensor. The support and the airtight housing are airtight. The pressure sensor is fixed so that can be maintained. - 請求項15に記載の圧力センサにおいて、
前記サポートの外周部につばが設けられ、該つばに前記気密ハウジングが固定され、前記つばの厚さは0.10mm以上、0.20mm以下であることを特徴とする圧力センサ。 The pressure sensor according to claim 15,
A pressure sensor characterized in that a collar is provided on an outer peripheral portion of the support, the airtight housing is fixed to the collar, and the thickness of the collar is 0.10 mm or more and 0.20 mm or less. - 請求項16に記載の圧力センサにおいて、
前記サポートは鍛造材から成り、鍛造によって形成される鍛流線の方向が前記つばの面内方向と一致することを特徴とする圧力センサ。 The pressure sensor according to claim 16,
The pressure sensor according to claim 1, wherein the support is made of a forged material, and a direction of a forging line formed by forging coincides with an in-plane direction of the collar. - 互いに対向配置され、流体の圧力により変形する第1のダイアフラム及び第2のダイアフラムと、該第1のダイアフラム及び該第2のダイアフラムの間に配置され、一方側が前記第1のダイアフラムと接合すると共に、他方側が前記第2のダイアフラムと接合する弾性体と、該弾性体の一方側又は他方側で、かつ、前記第1のダイアフラム及び前記第2のダイアフラムの中心に相当する位置から離れた端部側に設置され、前記第1のダイアフラム及び前記第2のダイアフラムの変形と連動する前記弾性体の変形をひずみとして検出するひずみセンサとを備え、
前記弾性体は、前記ひずみセンサを形成する材料の線膨張係数に近い線膨張係数をもつ材料から成ることを特徴とする差圧センサ。 A first diaphragm and a second diaphragm which are arranged opposite to each other and deformed by the pressure of fluid, and are arranged between the first diaphragm and the second diaphragm, and one side is joined to the first diaphragm. An elastic body whose other side is joined to the second diaphragm, and an end portion on one side or the other side of the elastic body and away from a position corresponding to the center of the first diaphragm and the second diaphragm A strain sensor that is installed on the side and detects the deformation of the elastic body interlocked with the deformation of the first diaphragm and the second diaphragm;
The differential pressure sensor according to claim 1, wherein the elastic body is made of a material having a linear expansion coefficient close to that of the material forming the strain sensor. - 請求項1乃至17のいずれか1項に記載の圧力センサ又は請求項18に記載の差圧センサを組み込んで、流体の圧力をモニタリングすることを特徴とする質量流量制御装置。 A mass flow rate control apparatus incorporating the pressure sensor according to any one of claims 1 to 17 or the differential pressure sensor according to claim 18 to monitor the pressure of a fluid.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/517,261 US10175132B2 (en) | 2014-10-07 | 2015-10-06 | Pressure sensor, differential pressure sensor, and mass flow rate control device using same |
JP2016553119A JP6237923B2 (en) | 2014-10-07 | 2015-10-06 | Pressure sensor, differential pressure sensor, and mass flow controller using them |
CN201580054213.5A CN107110727B (en) | 2014-10-07 | 2015-10-06 | Pressure sensor and differential pressure pick-up and the mass flow control appts for using them |
KR1020177009345A KR101959150B1 (en) | 2014-10-07 | 2015-10-06 | Pressure sensor, differential pressure sensor, and mass flow rate control device using same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014206347 | 2014-10-07 | ||
JP2014-206347 | 2014-10-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2016056555A1 true WO2016056555A1 (en) | 2016-04-14 |
Family
ID=55653166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2015/078358 WO2016056555A1 (en) | 2014-10-07 | 2015-10-06 | Pressure sensor, differential pressure sensor, and mass flow rate control device using same |
Country Status (5)
Country | Link |
---|---|
US (1) | US10175132B2 (en) |
JP (1) | JP6237923B2 (en) |
KR (1) | KR101959150B1 (en) |
CN (1) | CN107110727B (en) |
WO (1) | WO2016056555A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019022082A1 (en) * | 2017-07-28 | 2019-01-31 | 京セラ株式会社 | Sensor element |
JP2019060639A (en) * | 2017-09-25 | 2019-04-18 | 日立金属株式会社 | Pressure sensor, method for manufacturing pressure sensor, and mass flow rate control device |
WO2020066872A1 (en) * | 2018-09-25 | 2020-04-02 | 日立金属株式会社 | Flexible printed wiring board, bonded member, pressure sensor, and mass flow rate control device |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107727304B (en) * | 2017-09-06 | 2019-10-08 | 浙江工贸职业技术学院 | A kind of sensor |
CN109870255B (en) * | 2017-12-05 | 2023-09-12 | 北京佰为深科技发展有限公司 | Fabry-Perot sensor and manufacturing method thereof |
CN108593185A (en) * | 2018-03-21 | 2018-09-28 | 江苏盛仕铭科技有限公司 | A kind of Antiimpact pressure transmitter |
EP3556704B1 (en) * | 2018-04-16 | 2023-08-30 | KONE Corporation | An elevator brake |
KR20200117084A (en) | 2019-04-02 | 2020-10-14 | 삼성디스플레이 주식회사 | Touch sensor and display device |
CN110926692B (en) * | 2019-12-20 | 2021-09-17 | 中国电子科技集团公司第四十八研究所 | High-temperature particle scouring resistant pressure sensitive element, preparation method thereof and sputtering film pressure sensor |
WO2021131577A1 (en) * | 2019-12-25 | 2021-07-01 | 株式会社フジキン | Pressure control device |
US20210214211A1 (en) * | 2020-01-15 | 2021-07-15 | Stmicroelectronics Pte Ltd | Mems thin membrane with stress structure |
JP2022018624A (en) * | 2020-07-16 | 2022-01-27 | アズビル株式会社 | Pressure sensor |
CN112704792A (en) * | 2020-12-30 | 2021-04-27 | 西南医科大学 | Water collecting cup assembly and breathing machine |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63217671A (en) * | 1987-03-05 | 1988-09-09 | Nippon Denso Co Ltd | Semiconductor pressure sensor |
JPS6426117A (en) * | 1988-07-08 | 1989-01-27 | Kyowa Electronic Instruments | Pressure transducer |
JPH0635934U (en) * | 1991-06-20 | 1994-05-13 | 株式会社日立製作所 | Pressure sensor |
JPH0712939U (en) * | 1993-07-29 | 1995-03-03 | 山武ハネウエル株式会社 | Semiconductor pressure transducer |
JP2004053344A (en) * | 2002-07-18 | 2004-02-19 | Tem-Tech Kenkyusho:Kk | Metal diaphragm pressure sensor of load conversion type |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7786864B1 (en) * | 2000-09-08 | 2010-08-31 | Automotive Technologies International, Inc. | Vehicular RFID and sensor assemblies |
EP1590637B1 (en) * | 2003-01-21 | 2008-11-05 | Expro Meters, Inc. | An apparatus and method of measuring gas volume fraction of a fluid flowing within a pipe |
US7313968B2 (en) * | 2003-01-30 | 2008-01-01 | Jms Co., Ltd. | Pressure detector and pressure detecting method |
DE102004006201B4 (en) | 2004-02-09 | 2011-12-08 | Robert Bosch Gmbh | Pressure sensor with silicon chip on a steel diaphragm |
KR100528636B1 (en) | 2004-04-26 | 2005-11-15 | (주)센서시스템기술 | Pressure sensor and fabricating method thereof |
CN101419107A (en) * | 2008-11-14 | 2009-04-29 | 江苏晶石科技集团有限公司 | Pressure detecting sensor |
KR101151343B1 (en) | 2010-08-11 | 2012-06-08 | 한국생산기술연구원 | Pressure sensor |
EP2691996A4 (en) * | 2011-03-30 | 2015-01-28 | Ambature Inc | Electrical, mechanical, computing, and/or other devices formed of extremely low resistance materials |
US10506934B2 (en) * | 2012-05-25 | 2019-12-17 | Phyzhon Health Inc. | Optical fiber pressure sensor |
-
2015
- 2015-10-06 JP JP2016553119A patent/JP6237923B2/en active Active
- 2015-10-06 US US15/517,261 patent/US10175132B2/en active Active
- 2015-10-06 CN CN201580054213.5A patent/CN107110727B/en active Active
- 2015-10-06 KR KR1020177009345A patent/KR101959150B1/en active IP Right Grant
- 2015-10-06 WO PCT/JP2015/078358 patent/WO2016056555A1/en active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63217671A (en) * | 1987-03-05 | 1988-09-09 | Nippon Denso Co Ltd | Semiconductor pressure sensor |
JPS6426117A (en) * | 1988-07-08 | 1989-01-27 | Kyowa Electronic Instruments | Pressure transducer |
JPH0635934U (en) * | 1991-06-20 | 1994-05-13 | 株式会社日立製作所 | Pressure sensor |
JPH0712939U (en) * | 1993-07-29 | 1995-03-03 | 山武ハネウエル株式会社 | Semiconductor pressure transducer |
JP2004053344A (en) * | 2002-07-18 | 2004-02-19 | Tem-Tech Kenkyusho:Kk | Metal diaphragm pressure sensor of load conversion type |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019022082A1 (en) * | 2017-07-28 | 2019-01-31 | 京セラ株式会社 | Sensor element |
CN110998864A (en) * | 2017-07-28 | 2020-04-10 | 京瓷株式会社 | Sensor element |
JPWO2019022082A1 (en) * | 2017-07-28 | 2020-07-09 | 京セラ株式会社 | Sensor element |
CN110998864B (en) * | 2017-07-28 | 2023-09-19 | 京瓷株式会社 | sensor element |
JP2019060639A (en) * | 2017-09-25 | 2019-04-18 | 日立金属株式会社 | Pressure sensor, method for manufacturing pressure sensor, and mass flow rate control device |
WO2020066872A1 (en) * | 2018-09-25 | 2020-04-02 | 日立金属株式会社 | Flexible printed wiring board, bonded member, pressure sensor, and mass flow rate control device |
KR20210064212A (en) | 2018-09-25 | 2021-06-02 | 히타치 긴조쿠 가부시키가이샤 | Flexible Printed Wiring Boards, Bonds, Pressure Sensors and Mass Flow Control Units |
JPWO2020066872A1 (en) * | 2018-09-25 | 2021-08-30 | 日立金属株式会社 | Flexible printed wiring boards, joints, pressure sensors and mass flow control devices |
JP7207415B2 (en) | 2018-09-25 | 2023-01-18 | 日立金属株式会社 | Flexible printed wiring board, joined body, pressure sensor and mass flow controller |
US11895776B2 (en) | 2018-09-25 | 2024-02-06 | Hitachi Metals, Ltd. | Flexible printed wiring board, joined body, pressure sensor and mass flow controller |
Also Published As
Publication number | Publication date |
---|---|
JP6237923B2 (en) | 2017-11-29 |
KR20170053678A (en) | 2017-05-16 |
KR101959150B1 (en) | 2019-03-15 |
US10175132B2 (en) | 2019-01-08 |
US20170299456A1 (en) | 2017-10-19 |
CN107110727A (en) | 2017-08-29 |
CN107110727B (en) | 2019-06-18 |
JPWO2016056555A1 (en) | 2017-06-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6237923B2 (en) | Pressure sensor, differential pressure sensor, and mass flow controller using them | |
JP5839150B2 (en) | Pressure sensor, mass flow meter and mass flow controller using the same | |
JP5243704B2 (en) | Force sensor | |
KR102552452B1 (en) | A hermetic pressure sensor | |
US9021885B2 (en) | Pressure sensor chip | |
JP5714395B2 (en) | Capacitive pressure sensor | |
JP2008058110A (en) | Chip for force sensor and force sensor | |
JP4210296B2 (en) | Method for manufacturing force sensor | |
JP2010019827A (en) | Pressure sensor | |
KR20090129363A (en) | Diaphram for pressure sensor and pressure sensor | |
US9243964B2 (en) | Device for converting a force or a pressure into an electrical signal and method for producing such a device | |
JP6663315B2 (en) | Pressure sensor | |
US10451507B2 (en) | Pressure sensor | |
CN108463704B (en) | Pressure sensor | |
WO2016017290A1 (en) | Pressure sensor | |
JP2005156164A (en) | Pressure sensor, and manufacturing method for pressure sensor | |
CN111712697B (en) | Pressure gauge | |
JP2011013190A (en) | Force detector and housing for force detector | |
JP6820101B2 (en) | Torque detector | |
JP2012058024A (en) | Pressure sensor | |
JPH08240494A (en) | Pressure sensor and its manufacture | |
JP2012058023A (en) | Pressure sensor | |
KR20200020957A (en) | Torque detector and manufacturing method of torque detector | |
JP2008224573A (en) | Pressure sensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 15849238 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2016553119 Country of ref document: JP Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 20177009345 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 15517261 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 15849238 Country of ref document: EP Kind code of ref document: A1 |