JPH0253732B2 - - Google Patents
Info
- Publication number
- JPH0253732B2 JPH0253732B2 JP63169089A JP16908988A JPH0253732B2 JP H0253732 B2 JPH0253732 B2 JP H0253732B2 JP 63169089 A JP63169089 A JP 63169089A JP 16908988 A JP16908988 A JP 16908988A JP H0253732 B2 JPH0253732 B2 JP H0253732B2
- Authority
- JP
- Japan
- Prior art keywords
- strain
- gauge
- diaphragm
- pressure transducer
- strain plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
Description
【発明の詳細な説明】
本発明は、圧力を受けて変位しこれを力に変換
するダイヤフラムと、このダイヤフラムに生じた
力が機械的に伝達されて変形を生じこの変形部に
添着されたストレインゲージによつて該力を電気
信号に変換する起歪体とからなる圧力変換器に関
するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention provides a diaphragm that is displaced in response to pressure and converts it into force, and a strain that is attached to the deformed portion of the diaphragm, which is mechanically transmitted to the diaphragm and deformed. The present invention relates to a pressure transducer comprising a strain body that converts the force into an electric signal using a gauge.
圧力変換器として、第８図に示すように円筒状
のケースａに周縁部を固定されたダイヤフラムｂ
と該ダイヤフラムｂの中央部にケースａの外方
（図においては上方）に向けて突出形成された伝
達棒ｃと、圧力によつて変形するダイヤフラムｂ
から伝達棒ｃを介して力を受ける円板状の起歪板
ｄおよび該起歪板ｄの適宜な位置に添着されたス
トレインゲージｅによつて構成されたものが知ら
れている。この圧力変換器は、ダイヤフラムｂの
中央部に突出形成された伝達棒ｃが起歪板ｄの中
央部に設けられた孔ｆに嵌挿され、そして溶接に
よつて伝達棒ｃと起歪板ｄとが互いに固定されて
いる。また、ダイヤフラムｂを支持するケースａ
の端面と起歪板ｄの周縁に突出形成された堤状部
ｇとの間も溶接によつて互いに固定されている。
そしてこの圧力変換器は、一般にダイヤフラムｂ
が支持されているケースａの端面と起歪板ｄの堤
状部ｇとの間の溶接を行つた後、ダイヤフラムｂ
の伝達棒ｃと起歪板ｄとの溶接を行うという方法
で製造される。 As a pressure transducer, a diaphragm b whose peripheral part is fixed to a cylindrical case a as shown in FIG.
, a transmission rod c formed at the center of the diaphragm b to protrude outward (in the figure, upward) of the case a, and a diaphragm b that deforms under pressure.
It is known that the strain gauge is constructed of a disk-shaped strain plate d which receives a force from the strain plate d via a transmission rod c, and a strain gauge e attached at an appropriate position on the strain plate d. In this pressure transducer, a transmission rod c protruding from the center of a diaphragm b is fitted into a hole f provided at the center of a strain plate d, and the transmission rod c and the strain plate are welded together. d are fixed to each other. In addition, case a supporting diaphragm b
The end face of the strain plate d and the bank-shaped portion g formed protrudingly from the periphery of the strain plate d are also fixed to each other by welding.
And this pressure transducer generally consists of a diaphragm b
After welding between the end face of the case a on which the diaphragm b is supported and the embankment g of the strain plate d, the diaphragm b
It is manufactured by welding the transmission rod c and the strain plate d.
ところで、従来のこの種の圧力変換器には、起
歪板とダイヤフラムとのばね定数比を大きくする
ことに限度があつた。 However, in this type of conventional pressure transducer, there is a limit to increasing the spring constant ratio between the strain plate and the diaphragm.
すなわち、この種の圧力変換器においては、起
歪板ｄとダイヤフラムｂとを組合せた状態におけ
るそのばね定数Ｋが大きい程圧力変換器の固有振
動数が大きくなり、その結果応答性も良く且つ外
部からの強制振動にも耐えるようになることが知
られている。また、圧力変換器の諸性能、例えば
圧力−出力特性の直線性、外部から加えられる機
械的力（例えば第８図においてＦで示す方向の
力）の影響、過渡温度特性等は、ダイヤフラムｂ
が柔で起歪板ｄが剛であればこれらが良好になる
ことも知られている。従つて、起歪板ｄのばね定
数KBとダイヤフラムｂのばね定数KDとの比
（KB／KD）の値が大きい程好ましい。そして、そ
の値は、ダイヤフラムｂのばね定数KDを小さく
することによつて大きくすることができる。 That is, in this type of pressure transducer, the larger the spring constant K of the strain plate d and diaphragm b in combination, the larger the natural frequency of the pressure transducer, and as a result, the response is better and the external It is known that it can withstand forced vibrations from In addition, various performances of the pressure transducer, such as linearity of pressure-output characteristics, influence of externally applied mechanical force (for example, force in the direction indicated by F in FIG. 8), transient temperature characteristics, etc.
It is also known that these properties will be good if the strain plate d is flexible and the strain plate d is rigid. Therefore, it is preferable that the ratio (K B /K D ) of the spring constant K B of the strain plate d to the spring constant K D of the diaphragm b be as large as possible. The value can be increased by decreasing the spring constant K D of the diaphragm b.
しかしながら、圧力変換器の外径寸法は使用条
件等を勘案した技術的要求によりあまり大きくす
ることはできないため、ダイヤフラムｂのばね定
数KDを小さくするには、ダイヤフラムｂの板厚
を薄くする以外に方法がなく、しかもダイヤフラ
ムｂの板厚を薄くすることには製作上の限度があ
り、0.1mm程度より薄くすることは困難である。
殊に圧力変換器の定格容量が小さい場合は、ばね
定数KDの値はある一定値より小さくすることが
できなかつた。従つて、そのばね定数比KB／KD
をより大きくするには起歪板ｄのばね定数KBを
大きくすることが必要である。しかし、起歪板ｄ
のばね定数KBを大きくすると感度が低下するた
め、均一な肉厚を有する従来の起歪板ｄではその
ばね定数KBを大きくすることに限界がある。そ
のため、ばね定数比KB／KDを大きくすることに
限界があり、圧力変換器の性能の向上を図ること
が非常に困難であつた。 However, the outer diameter of the pressure transducer cannot be increased too much due to technical requirements that take into account usage conditions, etc., so the only way to reduce the spring constant K D of diaphragm b is to reduce the thickness of diaphragm b. Moreover, there is a manufacturing limit to reducing the thickness of the diaphragm b, and it is difficult to reduce the thickness of the diaphragm b to less than about 0.1 mm.
Especially when the rated capacity of the pressure transducer is small, the value of the spring constant K D cannot be made smaller than a certain value. Therefore, the spring constant ratio K B /K D
In order to make it larger, it is necessary to increase the spring constant K B of the strain plate d. However, the strain plate d
If the spring constant K B is increased, the sensitivity decreases, so there is a limit to increasing the spring constant K B in the conventional strain plate d having a uniform wall thickness. Therefore, there is a limit to increasing the spring constant ratio K B /K D , and it has been extremely difficult to improve the performance of the pressure transducer.
ところで、ストレインゲージは、起歪板の変形
に応じて伸縮してひずみを検出するゲージグリツ
ドと、ゲージリードを接続するためのタブとから
なるが、上記タブは、ゲージリードを接続する便
宜のため、かなり幅広に形成されているのに対
し、上記ゲージグリツドから延長されタブに連接
する部分は幅狭に形成されている関係上、その連
接部近傍に断面急変部が存在する。また、ゲージ
リードをタブに接続したときにできる半田盛部に
も断面急変部が存在する。 By the way, a strain gauge consists of a gauge grid that expands and contracts according to the deformation of a strain plate to detect strain, and a tab for connecting a gauge lead. Although it is formed quite wide, the portion extending from the gauge grid and connecting to the tab is formed narrowly, so that there is a sudden change in cross section near the connecting portion. Further, there is also a sudden change in cross section in the solder mound formed when the gauge lead is connected to the tab.
ところで、この断面急変部には、応力が集中
し、その応力が一定以上であると、疲労破壊を引
き起こすという問題がある。 By the way, there is a problem in that stress is concentrated in this section where the cross section suddenly changes, and if the stress exceeds a certain level, it will cause fatigue failure.
本発明は、このような事情に鑑みてなされたも
で、その目的は、起歪板のばね定数KBを大きく
することにより起歪板のばね定数KBとダイヤフ
ラムのばね定数KDとの比KB／KDを大きくし、そ
れによつて圧力変換器の各種性能を高めると共
に、ストレインゲージの断面急変部における疲労
破壊を生じることがなく、耐久性に優れ、信頼性
の高い圧力変換器を提供することにある。 The present invention has been made in view of the above circumstances, and its purpose is to increase the spring constant K B of the strain plate to increase the difference between the spring constant K B of the strain plate and the spring constant K D of the diaphragm. By increasing the ratio K B /K D , various performances of the pressure transducer are improved, and the pressure transducer is highly durable and reliable without causing fatigue failure at the section of the strain gauge where the cross section suddenly changes. Our goal is to provide the following.
本発明は、上記目的を達成するために、圧力を
受けて変位しこれを力に変換するダイヤフラム
と、このダイヤフラムの変位によつて生ずる力を
中央部に受けて変形しこの変形部に添着されたス
トレインゲージによつて前記力を電気信号に変換
するようにされた起歪体とを備える圧力変換器に
おいて、前記起歪体は、その中央部を挟むごとく
互いに離間する一対または複数対のスリツト状透
孔を形成することによつて透孔間に各端部を起歪
体に支持されたビーム状をなす起歪板が形成さ
れ、少なくとも起歪板の一方の面に前記中央部を
中心とする断面円弧状の応力集中溝が形成された
構成とし、一方、ストレインゲージは、ゲージグ
リツドが前記起歪板の他方の面の前記応力集中溝
に対応した部位に添着され、ゲージリードが接続
されたタブが前記応力集中溝からずれた部位に添
着された構成としたものである。 In order to achieve the above object, the present invention includes a diaphragm that is displaced in response to pressure and converts it into force, and a diaphragm that is deformed by receiving the force generated by the displacement of the diaphragm in its central portion and attached to this deformed portion. In the pressure transducer, the strain gauge includes a strain gauge that converts the force into an electric signal, and the strain gauge has one or more pairs of slits spaced apart from each other so as to sandwich the center portion of the strain gauge. By forming the shaped through holes, a beam-shaped strain plate with each end supported by a strain body is formed between the holes, and at least one surface of the strain plate has a beam-shaped strain plate with a center portion centered on the center portion. On the other hand, in the strain gauge, a gauge grid is attached to a portion of the other surface of the strain plate corresponding to the stress concentration groove, and a gauge lead is connected to the strain gauge. The tab is attached to a portion shifted from the stress concentration groove.
以下、本発明を図面に示した実施例に従つて詳
細に説明する。 Hereinafter, the present invention will be explained in detail according to embodiments shown in the drawings.
第１図および第２図は、起歪板のばね定数を著
しく大きくすることによつて、起歪板とダイヤフ
ラムとのばね定数比KB／KDを大きくした本発明
に係る圧力変換器の一実施例を示す平面図および
正面中央縦断面図である。 FIGS. 1 and 2 show a pressure transducer according to the present invention in which the spring constant ratio of the strain plate to the diaphragm, K B /K D , is increased by significantly increasing the spring constant of the strain plate. FIG. 1 is a plan view and a front center vertical cross-sectional view showing one embodiment.
第１図および第２図において、１は円筒状のケ
ース、２は円板状のダイヤフラムで、その周縁部
がケース１の内周に固定されている。３はダイヤ
フラム２の中心部にその板面に垂直に連設された
伝達棒である。４は詳しくは後述する起歪体であ
り全体形状が円板状を呈し、その中心部に筒状部
５が一体に形成され、その筒状部５の中心部に
は、上記伝達棒３が嵌挿される孔（またはねじ
孔）６が穿設されている。 In FIGS. 1 and 2, 1 is a cylindrical case, and 2 is a disc-shaped diaphragm, the peripheral edge of which is fixed to the inner periphery of the case 1. In FIG. Reference numeral 3 denotes a transmission rod that is connected to the center of the diaphragm 2 perpendicularly to the plate surface thereof. Reference numeral 4 denotes a strain-generating body which will be described in detail later, and has a disk-like overall shape, and a cylindrical part 5 is integrally formed in the center thereof, and the transmission rod 3 is mounted in the center of the cylindrical part 5. A hole (or screw hole) 6 into which it is inserted is bored.
７は起歪体４の周縁部に一体に設けられた堤状
部で、その外径はケース１の外径と略同一にさ
れ、その内径はケース１の内径よりも稍大径にさ
れている。８，８は起歪体４の裏面に設けられた
２本の断面半円弧状で且つ同心円状の応力集中
溝、９，９は円板状の起歪体４の中央部を挟んで
平行に穿設された２本のスリツト状の透孔、１０
は該透孔９，９が穿設されることによつてその間
に形成され、両端部が固定された一文字ビーム状
（帯板状）の起歪板１０である。該起歪板１０の
応力集中溝８と対応する表面側の上面位置にはそ
れぞれストレインゲージ１１，１１，……が例え
ば接着、などの手段によつて添着されている。 Reference numeral 7 denotes a bank-like part integrally provided at the peripheral edge of the strain body 4, and its outer diameter is approximately the same as the outer diameter of the case 1, and its inner diameter is slightly larger than the inner diameter of the case 1. There is. Reference numerals 8 and 8 indicate two stress concentration grooves having a semicircular arc shape in cross section and concentric circles provided on the back surface of the flexure element 4, and 9 and 9 extending in parallel across the center of the disc-shaped flexure element 4. Two slit-like holes, 10
is a straight beam-shaped (band plate-shaped) strain plate 10 formed between the through holes 9, 9 and fixed at both ends. Strain gauges 11, 11, . . . are attached to the upper surface positions of the strain plate 10 on the surface side corresponding to the stress concentration grooves 8, respectively, by means such as adhesive.
このような圧力変換器によれば、起歪板１０の
裏面に応力集中溝８，８が設けられ、該応力集中
溝８，８の設けられた部分の反対側（表面側）に
ストレインゲージ１１，１１，……が添着されて
いるので、ダイヤフラム２が圧力を受けて変形
し、それによつて起歪体４の起歪板１０が変形し
てこの起歪板１０の内部に応力が生じ、その応力
は応力集中溝８，８が形成された部分においてき
わめて強くなる。すなわち、起歪板１０に応力集
中溝８を形成した場合には、起歪板１０が圧力を
受けたとき生ずる応力が第３図に示すように応力
集中溝８が形成された部分に集中する。従つて、
起歪板１０に加わつた圧力に対してストレインゲ
ージ１１，１１，……により生ずる出力が非常に
大きくなり、感度が非常に良くなる。 According to such a pressure transducer, the stress concentration grooves 8, 8 are provided on the back surface of the strain plate 10, and the strain gauge 11 is provided on the opposite side (front side) of the portion where the stress concentration grooves 8, 8 are provided. , 11, . The stress becomes extremely strong in the portions where the stress concentration grooves 8, 8 are formed. That is, when the stress concentration grooves 8 are formed in the strain plate 10, the stress generated when the strain plate 10 receives pressure is concentrated in the portion where the stress concentration grooves 8 are formed, as shown in FIG. . Therefore,
The output generated by the strain gauges 11, 11, . . . in response to the pressure applied to the strain plate 10 becomes very large, and the sensitivity becomes very good.
しかも、起歪体４にスリツト状の透孔９，９を
穿設することによつて起歪板１０を形成し、その
起歪板１０上にストレインゲージ１１，１１，１
１，１１を添着したので、受ける力が比較的小さ
くてもその力を受けて変形するのは起歪板１０に
限られるので、それによつて起歪板１０により生
じる応力は比較的大きなものとなる。すなわち、
ストレインゲージ１１，１１，……がひずみを検
知するために起歪板１０全体を変形せしめること
は必要ではなく、ストレインゲージ１１，１１，
１１，１１が添着された部分だけを変形せしめれ
ば充分である。そして、起歪板１０に特に応力集
中溝８，８を設けず起歪板１０が圧力を受けたと
きに起歪板１０全体が変形するような従来の場合
は、第４図ａに示すように、ストレインゲージ
ｅ，ｅ，……に一定のひずみを生じさせるのに起
歪板ｄ全体が大きく撓むことになる。それに対し
て、本発明のように、ストレインゲージ１１，１
１，……が設けられた起歪板１０の部分、すなわ
ち応力集中溝８，８を設けた部分は、第４図ｂに
示すように受ける圧力Ｆが比較的小さくてもスト
レインゲージ１１，１１に発生するひずみが大き
くなる。従つて、圧力変換器の感度は非常に高く
なる。 Moreover, the strain plate 10 is formed by forming slit-like through holes 9, 9 in the strain plate 4, and the strain gauges 11, 11, 1 are placed on the strain plate 10.
1 and 11, even if the applied force is relatively small, only the strain plate 10 deforms in response to the force, so that the stress generated by the strain plate 10 is relatively large. Become. That is,
In order for the strain gauges 11, 11, . . . to detect strain, it is not necessary to deform the entire strain plate 10;
It is sufficient to deform only the portions 11, 11 attached. In the conventional case where stress concentration grooves 8, 8 are not particularly provided in the strain plate 10 and the strain plate 10 as a whole deforms when the strain plate 10 receives pressure, as shown in FIG. 4a, In addition, in order to produce a certain strain in the strain gauges e, e, . On the other hand, as in the present invention, the strain gauges 11, 1
1, . . . , that is, the portion provided with the stress concentration grooves 8, 8, the strain gauges 11, 11 are not affected even if the pressure F received is relatively small, as shown in FIG. 4b. The strain that occurs increases. Therefore, the sensitivity of the pressure transducer becomes very high.
更に本発明によれば、起歪板１０に応力集中溝
８，８を設けてストレインゲージ１１，１１，…
…を添着した部分に応力が集中するようにすると
共にスリツト状の透孔９，９を設けることによつ
てストレインゲージ１１，１１，……が添着され
た部分（すなわち起歪板１０）だけが圧力によつ
て変形するようにして圧力変換器の感度を高くす
るようにしたので、支障なく起歪板１０のばね定
数KBを大きくすることができる。従つて、起歪
板１０とダイヤフラム２とのばね定数比KB／KD
の値を大きくすることができ、圧力変換器の各種
性能、例えば、圧力−出力特性の直線性等を改良
することができる。そして、このように透孔９，
９、応力集中溝８，８は、比較的製造コストの低
い切削加工ができる構造上の利点もある。 Furthermore, according to the present invention, the stress concentration grooves 8, 8 are provided in the strain plate 10, and the strain gauges 11, 11, . . .
By making the stress concentrate on the part to which the strain gauges 11, 11, ... are attached, and by providing the slit-like through holes 9, 9, only the part to which the strain gauges 11, 11, ... are attached (that is, the strain plate 10) is concentrated. Since the pressure transducer is deformed by pressure to increase its sensitivity, the spring constant K B of the strain plate 10 can be increased without any problem. Therefore, the spring constant ratio between the strain plate 10 and the diaphragm 2 is K B /K D
can be increased, and various performances of the pressure transducer, such as linearity of pressure-output characteristics, can be improved. And like this, the through hole 9,
9. The stress concentration grooves 8, 8 also have the structural advantage that they can be cut at relatively low manufacturing cost.
次に、本発明の要部であるストレインゲージの
疲労破壊を防ぐための構成部分について詳しく説
明する。 Next, components for preventing fatigue failure of the strain gauge, which are essential parts of the present invention, will be explained in detail.
第５図ａ，ｂに示すように、本発明において、
ストレインゲージ１１は、そのゲージグリツド１
２だけが応力集中溝８が形成された面と反対側の
起歪板１０における応力集中溝８に対応する部位
に接着等の手段により添着され、そして、ゲージ
リード１３が接続されたタブ１４が応力集中溝８
からずれるように起歪板１０に添着される。 As shown in FIGS. 5a and 5b, in the present invention,
The strain gauge 11 is connected to its gauge grid 1
2 is attached by adhesive or other means to a portion of the strain plate 10 opposite to the surface on which the stress concentration groove 8 is formed, and the tab 14 to which the gauge lead 13 is connected is attached. Stress concentration groove 8
It is attached to the strain plate 10 so as to be displaced from the center.
すなわち、ストレインゲージ１１は、既述した
ように、ゲージグリツド１２の伸縮によりひずみ
を検出するが、タブ１４に断面急変部Ａがあり、
また、半田盛部１５にも断面急変部Ｂがあるの
で、応力がこの断面急変部Ａ，Ｂに集中し、その
応力が所定限界を越えれば、疲労破壊を引き起こ
すこととなる。 That is, as described above, the strain gauge 11 detects strain by the expansion and contraction of the gauge grid 12, but the tab 14 has a sudden change in cross section A.
Furthermore, since the solder mound 15 also has a sudden section B, stress is concentrated on these sections A and B, and if the stress exceeds a predetermined limit, fatigue failure will occur.
ところが、本発明の圧力変換器においては、ス
トレインゲージ１１のゲージグリツド１２の部分
を、起歪板１０の応力集中溝８の反対側に位置さ
せ、タブ１４の部分を応力集中溝８からずれるよ
うに位置させることにより、ゲージグリツド１２
のみに応力が集中し、それ以外の部分に加わる応
力が小さくなるので、タブ１４や半田盛部１５等
での疲労破壊を皆無にすることが可能となる。 However, in the pressure transducer of the present invention, the gauge grid 12 portion of the strain gauge 11 is located on the opposite side of the stress concentration groove 8 of the strain plate 10, and the tab 14 portion is positioned so as to be displaced from the stress concentration groove 8. By positioning the gauge grid 12
Since the stress is concentrated only on the solder plate and the stress applied to other parts is reduced, it is possible to completely eliminate fatigue failure at the tab 14, the solder mound 15, etc.
尚、本発明は、上述した実施例に限らずその要
旨を変更しない範囲内で種々変形して実施でき
る。 Note that the present invention is not limited to the embodiments described above, and can be implemented with various modifications without changing the gist thereof.
例えば、起歪体４は、第６図に示すように起歪
板１０を一文字状にしてもよいが、第７図に示す
ように十字状にしてもよい。 For example, the strain-generating body 4 may have the strain-generating plate 10 in the shape of a single character as shown in FIG. 6, but it may also be formed in the shape of a cross as shown in FIG.
以上詳述したように、本発明によれば、感度を
低下させずに起歪板のばね定数を大きくすること
により起歪板のばね定数とダイヤフラムのばね定
数の比を大きくし、非直線性、過渡温度特性等の
諸性能を向上し得ると共に、ストレインゲージの
断面急変部における疲労破壊を生じることがな
く、耐久性に優れ、信頼性の高い圧力変換器を提
供することができる。 As detailed above, according to the present invention, the ratio of the spring constant of the strain plate to the spring constant of the diaphragm is increased by increasing the spring constant of the strain plate without reducing the sensitivity. , it is possible to improve various performances such as transient temperature characteristics, and also to provide a pressure transducer which is excellent in durability and highly reliable without causing fatigue failure at the section of the strain gauge where the cross section suddenly changes.
第１図および第２図は、本発明に係る圧力変換
器の一実施例の構成をそれぞれ示す平面図および
正面中央縦断面図、第３図は、同実施例において
応力集中溝を設けた部分の応力分布図、第４図
ａ，ｂは、ストレインゲージに生ずるひずみが同
一であるとした場合における起歪板に生ずるたわ
みの関係を従来のものａと本発明のものｂとをそ
れぞれ比較する説明図、第５図ａ，ｂは、本発明
の要部構成を示すもので、このうち、第５図ａは
平面図、第５図ｂはＩ−Ｉ線矢視断面図、第６図
および第７図は、本発明に係る圧力変換器の起歪
体の一実施例およびその変形例の外観構成をそれ
ぞれ示す斜視図、第８図は、従来の圧力変換器の
一例を示す縦断面図である。
１……ケース、２……ダイヤフラム、３……伝
達棒、４……起歪体、５……筒状部、６……孔、
７……堤状部、８……応力集中溝、９……透孔、
１０……起歪板、１１……ストレインゲージ、１
２……ゲージグリツド、１３……ゲージリード、
１４……タブ、１５……半田盛部。
1 and 2 are a plan view and a front center vertical sectional view respectively showing the configuration of an embodiment of a pressure transducer according to the present invention, and FIG. 3 is a section in which stress concentration grooves are provided in the same embodiment. The stress distribution diagrams in Figures 4a and 4b compare the relationship between the deflection that occurs in the strain plate when the strain that occurs in the strain gauge is the same, and the conventional one a and the inventive one b, respectively. The explanatory drawings, FIGS. 5a and 5b, show the main structure of the present invention, of which FIG. 5a is a plan view, FIG. 5b is a sectional view taken along the line I-I, and FIG. and FIG. 7 is a perspective view showing an external configuration of an embodiment of a strain body of a pressure transducer according to the present invention and a modification thereof, and FIG. 8 is a longitudinal section showing an example of a conventional pressure transducer. It is a diagram. DESCRIPTION OF SYMBOLS 1... Case, 2... Diaphragm, 3... Transmission rod, 4... Strain body, 5... Cylindrical part, 6... Hole,
7... Bank-like part, 8... Stress concentration groove, 9... Through hole,
10...Strain plate, 11...Strain gauge, 1
2... Gauge grid, 13... Gauge lead,
14...Tab, 15...Solder Moribe.
Claims (1)
ヤフラムと、このダイヤフラムの変位によつて生
ずる力を中央部に受けて変形しこの変形部に添着
されたストレインゲージによつて前記力を電気信
号に変換するようにされた起歪体とを備える圧力
変換器において、前記起歪体は、その中央部を挟
むごとく互いに離間する一対または複数対のスリ
ツト状透孔を形成することによつて透孔間に各端
部を起歪体に支持されたビーム状をなす起歪板が
形成され、少なくとも起歪板の一方の面に前記中
央部を中心とする断面円弧状の応力集中溝が形成
された構成とし、一方、ストレインゲージは、ゲ
ージグリツドが前記起歪板の他方の面の前記応力
集中溝に対応した部位に添着され、ゲージリード
が接続されたタブが前記応力集中溝からずれた部
位に添着された構成としたことを特徴とする圧力
変換器。1 A diaphragm that is displaced in response to pressure and converts it into force, and a central part that receives the force generated by the displacement of this diaphragm and deforms, and converts the force into an electrical signal by a strain gauge attached to this deformed part. In the pressure transducer, the flexure-generating body has one or more pairs of slit-like through holes spaced apart from each other so as to sandwich the central portion of the flexure-generating body. A beam-shaped strain plate supported at each end by a strain body is formed between the holes, and a stress concentration groove having an arcuate cross section centered on the center portion is formed on at least one surface of the strain plate. On the other hand, in the strain gauge, a gauge grid is attached to a portion of the other surface of the strain plate that corresponds to the stress concentration groove, and a tab to which a gauge lead is connected is deviated from the stress concentration groove. A pressure transducer characterized in that it is configured to be attached to a pressure transducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16908988A JPS6426117A (en) | 1988-07-08 | 1988-07-08 | Pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16908988A JPS6426117A (en) | 1988-07-08 | 1988-07-08 | Pressure transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6426117A JPS6426117A (en) | 1989-01-27 |
| JPH0253732B2 true JPH0253732B2 (en) | 1990-11-19 |
Family
ID=15880123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16908988A Granted JPS6426117A (en) | 1988-07-08 | 1988-07-08 | Pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426117A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107110727B (en) * | 2014-10-07 | 2019-06-18 | 日立金属株式会社 | Pressure sensor and differential pressure pick-up and the mass flow control appts for using them |
| CN113340503A (en) * | 2021-06-24 | 2021-09-03 | 武汉东海石化重型装备有限公司 | Material increase manufacturing method of pressure-bearing equipment convenient for stress sensing |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6314891A (en) * | 1986-07-04 | 1988-01-22 | Nippon Steel Corp | Production of zn alloy electroplated steel sheet having superior adhesion to plating |
-
1988
- 1988-07-08 JP JP16908988A patent/JPS6426117A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6314891A (en) * | 1986-07-04 | 1988-01-22 | Nippon Steel Corp | Production of zn alloy electroplated steel sheet having superior adhesion to plating |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6426117A (en) | 1989-01-27 |
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