JPS5574140A - Termination detecting method of insulating film etching - Google Patents

Termination detecting method of insulating film etching

Info

Publication number
JPS5574140A
JPS5574140A JP14648978A JP14648978A JPS5574140A JP S5574140 A JPS5574140 A JP S5574140A JP 14648978 A JP14648978 A JP 14648978A JP 14648978 A JP14648978 A JP 14648978A JP S5574140 A JPS5574140 A JP S5574140A
Authority
JP
Japan
Prior art keywords
etching
base
substrate
electrode
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14648978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6257094B2 (enrdf_load_stackoverflow
Inventor
Shinpei Iijima
Yoshifumi Kawamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14648978A priority Critical patent/JPS5574140A/ja
Publication of JPS5574140A publication Critical patent/JPS5574140A/ja
Publication of JPS6257094B2 publication Critical patent/JPS6257094B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP14648978A 1978-11-29 1978-11-29 Termination detecting method of insulating film etching Granted JPS5574140A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14648978A JPS5574140A (en) 1978-11-29 1978-11-29 Termination detecting method of insulating film etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14648978A JPS5574140A (en) 1978-11-29 1978-11-29 Termination detecting method of insulating film etching

Publications (2)

Publication Number Publication Date
JPS5574140A true JPS5574140A (en) 1980-06-04
JPS6257094B2 JPS6257094B2 (enrdf_load_stackoverflow) 1987-11-30

Family

ID=15408778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14648978A Granted JPS5574140A (en) 1978-11-29 1978-11-29 Termination detecting method of insulating film etching

Country Status (1)

Country Link
JP (1) JPS5574140A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5879722A (ja) * 1981-11-06 1983-05-13 Fujitsu Ltd プラズマエツチングの制御方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0490490A (ja) * 1990-08-06 1992-03-24 Nippon Steel Corp 電気炉の炉体構造

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5879722A (ja) * 1981-11-06 1983-05-13 Fujitsu Ltd プラズマエツチングの制御方法

Also Published As

Publication number Publication date
JPS6257094B2 (enrdf_load_stackoverflow) 1987-11-30

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