JPS6257094B2 - - Google Patents
Info
- Publication number
- JPS6257094B2 JPS6257094B2 JP14648978A JP14648978A JPS6257094B2 JP S6257094 B2 JPS6257094 B2 JP S6257094B2 JP 14648978 A JP14648978 A JP 14648978A JP 14648978 A JP14648978 A JP 14648978A JP S6257094 B2 JPS6257094 B2 JP S6257094B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- etching
- substrate
- electrode
- voltmeter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 21
- 238000001312 dry etching Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 4
- 238000000992 sputter etching Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14648978A JPS5574140A (en) | 1978-11-29 | 1978-11-29 | Termination detecting method of insulating film etching |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14648978A JPS5574140A (en) | 1978-11-29 | 1978-11-29 | Termination detecting method of insulating film etching |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5574140A JPS5574140A (en) | 1980-06-04 |
| JPS6257094B2 true JPS6257094B2 (enrdf_load_stackoverflow) | 1987-11-30 |
Family
ID=15408778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14648978A Granted JPS5574140A (en) | 1978-11-29 | 1978-11-29 | Termination detecting method of insulating film etching |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5574140A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0490490A (ja) * | 1990-08-06 | 1992-03-24 | Nippon Steel Corp | 電気炉の炉体構造 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5879722A (ja) * | 1981-11-06 | 1983-05-13 | Fujitsu Ltd | プラズマエツチングの制御方法 |
-
1978
- 1978-11-29 JP JP14648978A patent/JPS5574140A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0490490A (ja) * | 1990-08-06 | 1992-03-24 | Nippon Steel Corp | 電気炉の炉体構造 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5574140A (en) | 1980-06-04 |
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