JPS5556644A - Manufacture of semiconductor integrated circuit - Google Patents

Manufacture of semiconductor integrated circuit

Info

Publication number
JPS5556644A
JPS5556644A JP12860378A JP12860378A JPS5556644A JP S5556644 A JPS5556644 A JP S5556644A JP 12860378 A JP12860378 A JP 12860378A JP 12860378 A JP12860378 A JP 12860378A JP S5556644 A JPS5556644 A JP S5556644A
Authority
JP
Japan
Prior art keywords
layer
epitaxial layer
layers
linear
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12860378A
Other languages
English (en)
Inventor
Akihiko Furukawa
Minoru Taguchi
Hajime Sasaki
Koichi Kanzaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12860378A priority Critical patent/JPS5556644A/ja
Publication of JPS5556644A publication Critical patent/JPS5556644A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0214—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L
    • H01L27/0229—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L of bipolar structures
    • H01L27/0233—Integrated injection logic structures [I2L]
    • H01L27/0244—I2L structures integrated in combination with analog structures

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Element Separation (AREA)
  • Bipolar Integrated Circuits (AREA)
JP12860378A 1978-10-20 1978-10-20 Manufacture of semiconductor integrated circuit Pending JPS5556644A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12860378A JPS5556644A (en) 1978-10-20 1978-10-20 Manufacture of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12860378A JPS5556644A (en) 1978-10-20 1978-10-20 Manufacture of semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS5556644A true JPS5556644A (en) 1980-04-25

Family

ID=14988848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12860378A Pending JPS5556644A (en) 1978-10-20 1978-10-20 Manufacture of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5556644A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5758352A (en) * 1980-09-26 1982-04-08 Hitachi Ltd Manufacture of semiconductor device
JPS58200568A (ja) * 1982-05-19 1983-11-22 Hitachi Ltd 半導体集積回路装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5758352A (en) * 1980-09-26 1982-04-08 Hitachi Ltd Manufacture of semiconductor device
JPH0136256B2 (ja) * 1980-09-26 1989-07-31 Hitachi Seisakusho Kk
JPS58200568A (ja) * 1982-05-19 1983-11-22 Hitachi Ltd 半導体集積回路装置

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