JPS5555521A - Method of epitaxial growth at liquid phase - Google Patents

Method of epitaxial growth at liquid phase

Info

Publication number
JPS5555521A
JPS5555521A JP12788178A JP12788178A JPS5555521A JP S5555521 A JPS5555521 A JP S5555521A JP 12788178 A JP12788178 A JP 12788178A JP 12788178 A JP12788178 A JP 12788178A JP S5555521 A JPS5555521 A JP S5555521A
Authority
JP
Japan
Prior art keywords
substrate
temperature
liquid phase
epitaxial growth
growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12788178A
Other languages
English (en)
Inventor
Kazuo Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12788178A priority Critical patent/JPS5555521A/ja
Publication of JPS5555521A publication Critical patent/JPS5555521A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Semiconductor Lasers (AREA)
JP12788178A 1978-10-19 1978-10-19 Method of epitaxial growth at liquid phase Pending JPS5555521A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12788178A JPS5555521A (en) 1978-10-19 1978-10-19 Method of epitaxial growth at liquid phase

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12788178A JPS5555521A (en) 1978-10-19 1978-10-19 Method of epitaxial growth at liquid phase

Publications (1)

Publication Number Publication Date
JPS5555521A true JPS5555521A (en) 1980-04-23

Family

ID=14970943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12788178A Pending JPS5555521A (en) 1978-10-19 1978-10-19 Method of epitaxial growth at liquid phase

Country Status (1)

Country Link
JP (1) JPS5555521A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58168218A (ja) * 1982-03-30 1983-10-04 Fujitsu Ltd 液相エピタキシヤル成長法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF APPLIED PHYSICS=1978 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58168218A (ja) * 1982-03-30 1983-10-04 Fujitsu Ltd 液相エピタキシヤル成長法

Similar Documents

Publication Publication Date Title
JPS51111476A (en) Method of liquid phase epitaxial crystal growth
JPS5555521A (en) Method of epitaxial growth at liquid phase
JPS51142975A (en) Production method of semiconductor devices
JPS547861A (en) Liquid phase epitaxial growth method
JPS52104474A (en) Control method for crystal growth
JPS5211860A (en) Liquid phase epitaxial device
JPS52143761A (en) Crystal growth method
JPS53105371A (en) Crystal growing method for potassium arsenide
JPS52135264A (en) Liquid phase epitaxial growth method
JPS52106381A (en) Automatic control apparatus for diameter of crystal
JPS5384457A (en) Liquid-phase epitaxial growth method
JPS5412587A (en) Warpage reducing method of lithium tantalate single crystal wafers
JPS5381487A (en) Method and apparatus for liquid phase epitaxial growth
JPS5429560A (en) Gas phase growth method for semiconductor
JPS52111473A (en) Ribbon crystal growth method
JPS5261958A (en) Method and device for liquid phase crystal crowth
JPS52129277A (en) Liquid phase epitaxial growth method
JPS51126037A (en) Semiconductor crystal growth method
JPS5376657A (en) Liquid phase epitaxial growth method
JPS5424576A (en) Liquid phase epitaxial growing unit and its method
JPS52114268A (en) Selective liquid growing method
JPS52155189A (en) Multiple layer crystal growth
JPS51114383A (en) Liquid phase epitaxial crystal growth
JPS5337184A (en) Epitaxially growing method in liquid phase
JPS5288276A (en) Liquid-phase epitaxial growth