JPS5541765A - Manufacturing semiconductor element - Google Patents
Manufacturing semiconductor elementInfo
- Publication number
- JPS5541765A JPS5541765A JP11534878A JP11534878A JPS5541765A JP S5541765 A JPS5541765 A JP S5541765A JP 11534878 A JP11534878 A JP 11534878A JP 11534878 A JP11534878 A JP 11534878A JP S5541765 A JPS5541765 A JP S5541765A
- Authority
- JP
- Japan
- Prior art keywords
- film
- region
- sio
- deposited
- stacked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enhance contact property by changing SixNy which is yielded on an Si3N4 film into SiO2 and removing it with hydrofluoric acid solution in the case openings are provided through an SiO2 film, a polycrystal film, and the like deposited on an Si3N4 film, on which an electrode metal is deposited.
CONSTITUTION: A base diffused region 2 is formed in a semiconductor substrate 1, and an emitter diffused region 10 is provided in the region 2. An SiO2 film 3 and an Si3N4 film 4 are stacked and deposited on all over the surface. Then, an opening is made in the stacked film, and a polycrystal Si film 8, which contains As and is contacted with the region, is formed. At the same time an opening reaching the region 2 is also provided in the stacked film containing SixNy film 9 (x≫y) which is generated on the film 4. Thereafter, the intermediate compound film 9 is changed into an SiO2 film 9' by oxidization treatment, and it is removed with thin hydrofluoric acid solution. In this method, the surface of the exposed film 4 is cleaned, and a Ti-Pt-Au electrode 12, which is contacted with the film 8 and the region 2, is deposited thereon.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11534878A JPS5541765A (en) | 1978-09-19 | 1978-09-19 | Manufacturing semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11534878A JPS5541765A (en) | 1978-09-19 | 1978-09-19 | Manufacturing semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5541765A true JPS5541765A (en) | 1980-03-24 |
Family
ID=14660292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11534878A Pending JPS5541765A (en) | 1978-09-19 | 1978-09-19 | Manufacturing semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5541765A (en) |
-
1978
- 1978-09-19 JP JP11534878A patent/JPS5541765A/en active Pending
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