JPS5533035A - Forming of resist pattern shaped like inverted truncated pyramid - Google Patents
Forming of resist pattern shaped like inverted truncated pyramidInfo
- Publication number
- JPS5533035A JPS5533035A JP10505378A JP10505378A JPS5533035A JP S5533035 A JPS5533035 A JP S5533035A JP 10505378 A JP10505378 A JP 10505378A JP 10505378 A JP10505378 A JP 10505378A JP S5533035 A JPS5533035 A JP S5533035A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- substrate
- pattern
- truncated pyramid
- inverted truncated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10505378A JPS5533035A (en) | 1978-08-28 | 1978-08-28 | Forming of resist pattern shaped like inverted truncated pyramid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10505378A JPS5533035A (en) | 1978-08-28 | 1978-08-28 | Forming of resist pattern shaped like inverted truncated pyramid |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5533035A true JPS5533035A (en) | 1980-03-08 |
Family
ID=14397235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10505378A Pending JPS5533035A (en) | 1978-08-28 | 1978-08-28 | Forming of resist pattern shaped like inverted truncated pyramid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5533035A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59228648A (ja) * | 1983-06-10 | 1984-12-22 | Sumitomo Electric Ind Ltd | ホトレジストの現像法 |
JPS61156044A (ja) * | 1984-12-27 | 1986-07-15 | Nec Corp | レジストステンシルマスクの製造方法 |
JPS6286726A (ja) * | 1985-10-11 | 1987-04-21 | Mitsubishi Electric Corp | レジストパタ−ン形成方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5373073A (en) * | 1976-12-11 | 1978-06-29 | Fujitsu Ltd | Treatment method for photo resist |
-
1978
- 1978-08-28 JP JP10505378A patent/JPS5533035A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5373073A (en) * | 1976-12-11 | 1978-06-29 | Fujitsu Ltd | Treatment method for photo resist |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59228648A (ja) * | 1983-06-10 | 1984-12-22 | Sumitomo Electric Ind Ltd | ホトレジストの現像法 |
JPS61156044A (ja) * | 1984-12-27 | 1986-07-15 | Nec Corp | レジストステンシルマスクの製造方法 |
JPS6286726A (ja) * | 1985-10-11 | 1987-04-21 | Mitsubishi Electric Corp | レジストパタ−ン形成方法 |
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