JPS5533025A - Pressure-to-electricity converter - Google Patents
Pressure-to-electricity converterInfo
- Publication number
- JPS5533025A JPS5533025A JP10477778A JP10477778A JPS5533025A JP S5533025 A JPS5533025 A JP S5533025A JP 10477778 A JP10477778 A JP 10477778A JP 10477778 A JP10477778 A JP 10477778A JP S5533025 A JPS5533025 A JP S5533025A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm member
- thin plate
- silicon crystal
- support members
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 4
- 239000013078 crystal Substances 0.000 abstract 4
- 229910052710 silicon Inorganic materials 0.000 abstract 4
- 239000010703 silicon Substances 0.000 abstract 4
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000007767 bonding agent Substances 0.000 abstract 1
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 230000005496 eutectics Effects 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10477778A JPS5533025A (en) | 1978-08-28 | 1978-08-28 | Pressure-to-electricity converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10477778A JPS5533025A (en) | 1978-08-28 | 1978-08-28 | Pressure-to-electricity converter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5533025A true JPS5533025A (en) | 1980-03-08 |
| JPS6222467B2 JPS6222467B2 (enrdf_load_stackoverflow) | 1987-05-18 |
Family
ID=14389900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10477778A Granted JPS5533025A (en) | 1978-08-28 | 1978-08-28 | Pressure-to-electricity converter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5533025A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2832894B2 (ja) * | 1988-07-26 | 1998-12-09 | 日立建機株式会社 | 圧力センサ及びその製造方法、並びに圧力センサを備える油圧機器 |
| JP2010538254A (ja) * | 2007-08-27 | 2010-12-09 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 圧力センサ、圧力センサを有するセンサプローブ、センサプローブを有する医療装置、及びセンサプローブを製造する方法 |
-
1978
- 1978-08-28 JP JP10477778A patent/JPS5533025A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2832894B2 (ja) * | 1988-07-26 | 1998-12-09 | 日立建機株式会社 | 圧力センサ及びその製造方法、並びに圧力センサを備える油圧機器 |
| JP2010538254A (ja) * | 2007-08-27 | 2010-12-09 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 圧力センサ、圧力センサを有するセンサプローブ、センサプローブを有する医療装置、及びセンサプローブを製造する方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6222467B2 (enrdf_load_stackoverflow) | 1987-05-18 |
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