JPS56108276A - Semiconductor diaphragm type sensor - Google Patents

Semiconductor diaphragm type sensor

Info

Publication number
JPS56108276A
JPS56108276A JP1004980A JP1004980A JPS56108276A JP S56108276 A JPS56108276 A JP S56108276A JP 1004980 A JP1004980 A JP 1004980A JP 1004980 A JP1004980 A JP 1004980A JP S56108276 A JPS56108276 A JP S56108276A
Authority
JP
Japan
Prior art keywords
diaphragm
rigid portion
thick
type sensor
central
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1004980A
Other languages
Japanese (ja)
Inventor
Masanori Tanabe
Satoshi Shimada
Motohisa Nishihara
Kazuji Yamada
Akio Yasukawa
Michitaka Shimazoe
Yoshitaka Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1004980A priority Critical patent/JPS56108276A/en
Publication of JPS56108276A publication Critical patent/JPS56108276A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE:To decrease the stress produced in the diaphragm and obtain excellent linearity in a semiconductor diaphragm type sensor by forming the monocrystalline Si diaphragm on which a plurality of piezo-resistor elements are attached, by a thick peripheral fixing portion and a thick central rigid portion surrounded therewith. CONSTITUTION:As the diaphragm 1 constituting the sensor, monocrystalline Si having (110) surface is used. A thick central rigid portion 31 is provided in the center, and a thick peripheral fixing portion is formed surrounding the central rigid portion 31 through a groove pointing to the lower surface. Thus, also the central portion of the diaphragm 1 is formed with a rigid portion. On the surface of the diaphragm 1, a plurality of piezo-resistor elements 5 are formed by diffusing P type impurities so as to be on <111> axes and located at positions 52 and 54 on the fixing portion 3 and positions 51 and 53 on the rigid portion 31. Then, the diaphragm 1 is supported by a support 11 and surrounded by a case 10. Each element 5 is connected through a lead wire 7 to a terminal electrode 8 on a terminal strip 9 provided on the surface of the case 10, to form a bridge circuit.
JP1004980A 1980-02-01 1980-02-01 Semiconductor diaphragm type sensor Pending JPS56108276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1004980A JPS56108276A (en) 1980-02-01 1980-02-01 Semiconductor diaphragm type sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1004980A JPS56108276A (en) 1980-02-01 1980-02-01 Semiconductor diaphragm type sensor

Publications (1)

Publication Number Publication Date
JPS56108276A true JPS56108276A (en) 1981-08-27

Family

ID=11739536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1004980A Pending JPS56108276A (en) 1980-02-01 1980-02-01 Semiconductor diaphragm type sensor

Country Status (1)

Country Link
JP (1) JPS56108276A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425735A (en) * 1990-05-21 1992-01-29 Hitachi Ltd Semicondcutor diaphragm for measuring pressure and differential pressure
US8506537B2 (en) 2001-10-12 2013-08-13 Coloplast A/S Sealing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0425735A (en) * 1990-05-21 1992-01-29 Hitachi Ltd Semicondcutor diaphragm for measuring pressure and differential pressure
US8506537B2 (en) 2001-10-12 2013-08-13 Coloplast A/S Sealing device

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