JPS5533024A - Semiconductor device for converting pressure - Google Patents

Semiconductor device for converting pressure

Info

Publication number
JPS5533024A
JPS5533024A JP10477678A JP10477678A JPS5533024A JP S5533024 A JPS5533024 A JP S5533024A JP 10477678 A JP10477678 A JP 10477678A JP 10477678 A JP10477678 A JP 10477678A JP S5533024 A JPS5533024 A JP S5533024A
Authority
JP
Japan
Prior art keywords
film
support member
diaphragm part
parts
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10477678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6222466B2 (enrdf_load_stackoverflow
Inventor
Shoichi Kakimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10477678A priority Critical patent/JPS5533024A/ja
Publication of JPS5533024A publication Critical patent/JPS5533024A/ja
Publication of JPS6222466B2 publication Critical patent/JPS6222466B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP10477678A 1978-08-28 1978-08-28 Semiconductor device for converting pressure Granted JPS5533024A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10477678A JPS5533024A (en) 1978-08-28 1978-08-28 Semiconductor device for converting pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10477678A JPS5533024A (en) 1978-08-28 1978-08-28 Semiconductor device for converting pressure

Publications (2)

Publication Number Publication Date
JPS5533024A true JPS5533024A (en) 1980-03-08
JPS6222466B2 JPS6222466B2 (enrdf_load_stackoverflow) 1987-05-18

Family

ID=14389873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10477678A Granted JPS5533024A (en) 1978-08-28 1978-08-28 Semiconductor device for converting pressure

Country Status (1)

Country Link
JP (1) JPS5533024A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02296373A (ja) * 1989-05-10 1990-12-06 Mitsubishi Electric Corp 半導体装置
JPH03229470A (ja) * 1990-02-02 1991-10-11 Nippondenso Co Ltd 半導体圧力センサ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS506281A (enrdf_load_stackoverflow) * 1973-05-18 1975-01-22
JPS5186986A (ja) * 1975-01-29 1976-07-30 Tokyo Shibaura Electric Co Handotaiatsuryokuhenkansochi
JPS51140582A (en) * 1975-05-30 1976-12-03 Nec Corp Semiconductor resistance element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS506281A (enrdf_load_stackoverflow) * 1973-05-18 1975-01-22
JPS5186986A (ja) * 1975-01-29 1976-07-30 Tokyo Shibaura Electric Co Handotaiatsuryokuhenkansochi
JPS51140582A (en) * 1975-05-30 1976-12-03 Nec Corp Semiconductor resistance element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02296373A (ja) * 1989-05-10 1990-12-06 Mitsubishi Electric Corp 半導体装置
JPH03229470A (ja) * 1990-02-02 1991-10-11 Nippondenso Co Ltd 半導体圧力センサ

Also Published As

Publication number Publication date
JPS6222466B2 (enrdf_load_stackoverflow) 1987-05-18

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