JPS5533024A - Semiconductor device for converting pressure - Google Patents
Semiconductor device for converting pressureInfo
- Publication number
- JPS5533024A JPS5533024A JP10477678A JP10477678A JPS5533024A JP S5533024 A JPS5533024 A JP S5533024A JP 10477678 A JP10477678 A JP 10477678A JP 10477678 A JP10477678 A JP 10477678A JP S5533024 A JPS5533024 A JP S5533024A
- Authority
- JP
- Japan
- Prior art keywords
- film
- support member
- diaphragm part
- parts
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 3
- 239000002253 acid Substances 0.000 abstract 2
- 239000003513 alkali Substances 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000007767 bonding agent Substances 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 229920002379 silicone rubber Polymers 0.000 abstract 1
- 239000004945 silicone rubber Substances 0.000 abstract 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10477678A JPS5533024A (en) | 1978-08-28 | 1978-08-28 | Semiconductor device for converting pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10477678A JPS5533024A (en) | 1978-08-28 | 1978-08-28 | Semiconductor device for converting pressure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5533024A true JPS5533024A (en) | 1980-03-08 |
| JPS6222466B2 JPS6222466B2 (enrdf_load_stackoverflow) | 1987-05-18 |
Family
ID=14389873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10477678A Granted JPS5533024A (en) | 1978-08-28 | 1978-08-28 | Semiconductor device for converting pressure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5533024A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02296373A (ja) * | 1989-05-10 | 1990-12-06 | Mitsubishi Electric Corp | 半導体装置 |
| JPH03229470A (ja) * | 1990-02-02 | 1991-10-11 | Nippondenso Co Ltd | 半導体圧力センサ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS506281A (enrdf_load_stackoverflow) * | 1973-05-18 | 1975-01-22 | ||
| JPS5186986A (ja) * | 1975-01-29 | 1976-07-30 | Tokyo Shibaura Electric Co | Handotaiatsuryokuhenkansochi |
| JPS51140582A (en) * | 1975-05-30 | 1976-12-03 | Nec Corp | Semiconductor resistance element |
-
1978
- 1978-08-28 JP JP10477678A patent/JPS5533024A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS506281A (enrdf_load_stackoverflow) * | 1973-05-18 | 1975-01-22 | ||
| JPS5186986A (ja) * | 1975-01-29 | 1976-07-30 | Tokyo Shibaura Electric Co | Handotaiatsuryokuhenkansochi |
| JPS51140582A (en) * | 1975-05-30 | 1976-12-03 | Nec Corp | Semiconductor resistance element |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02296373A (ja) * | 1989-05-10 | 1990-12-06 | Mitsubishi Electric Corp | 半導体装置 |
| JPH03229470A (ja) * | 1990-02-02 | 1991-10-11 | Nippondenso Co Ltd | 半導体圧力センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6222466B2 (enrdf_load_stackoverflow) | 1987-05-18 |
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