JPS57135330A - Stress converter - Google Patents
Stress converterInfo
- Publication number
- JPS57135330A JPS57135330A JP2061481A JP2061481A JPS57135330A JP S57135330 A JPS57135330 A JP S57135330A JP 2061481 A JP2061481 A JP 2061481A JP 2061481 A JP2061481 A JP 2061481A JP S57135330 A JPS57135330 A JP S57135330A
- Authority
- JP
- Japan
- Prior art keywords
- adhere
- stress
- piezo
- reliability
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
PURPOSE:To obtain a stress converter which is small in time aging and high in reliability, by laminating a prescribed semiconductor chip, etc. having an insulator, an electrode and a piezo-resistance effect, on a metallic plate whose elastic deformation is free. CONSTITUTION:Onto a metallic substrate 9 of phosphor bronze, etc., having a large elastic area, an insulating film 10 is made to adhere by means of vapor- deposition, etc. Onto this film 10, an electrode 11 is laminated and made to adhere by the same treatment, and when a semiconductor chip 1 of p silicon for converting stress, having a piezo-resistance effect is made to adhere and is formed, it is possible to obtain a stress converter which is free from time aging due to temperature, humidity, etc., and stable and high in reliability, since there is no unstable structure base such as glass fiber, epoxy resin, etc. due to adhesion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2061481A JPS57135330A (en) | 1981-02-13 | 1981-02-13 | Stress converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2061481A JPS57135330A (en) | 1981-02-13 | 1981-02-13 | Stress converter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57135330A true JPS57135330A (en) | 1982-08-20 |
Family
ID=12032127
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2061481A Pending JPS57135330A (en) | 1981-02-13 | 1981-02-13 | Stress converter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57135330A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493318A (en) * | 1972-05-06 | 1974-01-12 |
-
1981
- 1981-02-13 JP JP2061481A patent/JPS57135330A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493318A (en) * | 1972-05-06 | 1974-01-12 |
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