JPH02296373A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPH02296373A JPH02296373A JP11710289A JP11710289A JPH02296373A JP H02296373 A JPH02296373 A JP H02296373A JP 11710289 A JP11710289 A JP 11710289A JP 11710289 A JP11710289 A JP 11710289A JP H02296373 A JPH02296373 A JP H02296373A
- Authority
- JP
- Japan
- Prior art keywords
- coated
- region
- coating
- semiconductor substrate
- exposed region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 239000011248 coating agent Substances 0.000 abstract 5
- 238000000576 coating method Methods 0.000 abstract 5
- 239000000463 material Substances 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 1
- 230000002093 peripheral Effects 0.000 abstract 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11710289A JPH02296373A (en) | 1989-05-10 | 1989-05-10 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11710289A JPH02296373A (en) | 1989-05-10 | 1989-05-10 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02296373A true JPH02296373A (en) | 1990-12-06 |
Family
ID=14703452
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11710289A Pending JPH02296373A (en) | 1989-05-10 | 1989-05-10 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02296373A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04258176A (en) * | 1991-02-12 | 1992-09-14 | Mitsubishi Electric Corp | Semiconductor pressure sensor |
JPH05299671A (ja) * | 1992-01-13 | 1993-11-12 | Mitsubishi Electric Corp | 半導体圧力センサ及びその製造方法 |
US5703393A (en) * | 1995-06-27 | 1997-12-30 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor pressure detecting device and manufacturing method of the device |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5169169A (ja) * | 1975-10-21 | 1976-06-15 | Murata Manufacturing Co | |
JPS5533024A (en) * | 1978-08-28 | 1980-03-08 | Mitsubishi Electric Corp | Semiconductor device for converting pressure |
JPS55124271A (en) * | 1979-03-19 | 1980-09-25 | Mitsubishi Electric Corp | Semiconductor pressure transducer |
JPS59200426A (en) * | 1983-04-27 | 1984-11-13 | Copal Co Ltd | Partial sealing method |
JPS6175549A (en) * | 1984-09-21 | 1986-04-17 | Toshiba Corp | Electronic circuit including semiconductor element and manufacture of the same |
JPS62144368A (en) * | 1985-12-19 | 1987-06-27 | Nec Corp | Protective film for semiconductor type pressure sensor |
-
1989
- 1989-05-10 JP JP11710289A patent/JPH02296373A/ja active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5169169A (ja) * | 1975-10-21 | 1976-06-15 | Murata Manufacturing Co | |
JPS5533024A (en) * | 1978-08-28 | 1980-03-08 | Mitsubishi Electric Corp | Semiconductor device for converting pressure |
JPS55124271A (en) * | 1979-03-19 | 1980-09-25 | Mitsubishi Electric Corp | Semiconductor pressure transducer |
JPS59200426A (en) * | 1983-04-27 | 1984-11-13 | Copal Co Ltd | Partial sealing method |
JPS6175549A (en) * | 1984-09-21 | 1986-04-17 | Toshiba Corp | Electronic circuit including semiconductor element and manufacture of the same |
JPS62144368A (en) * | 1985-12-19 | 1987-06-27 | Nec Corp | Protective film for semiconductor type pressure sensor |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04258176A (en) * | 1991-02-12 | 1992-09-14 | Mitsubishi Electric Corp | Semiconductor pressure sensor |
JPH05299671A (ja) * | 1992-01-13 | 1993-11-12 | Mitsubishi Electric Corp | 半導体圧力センサ及びその製造方法 |
US5703393A (en) * | 1995-06-27 | 1997-12-30 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor pressure detecting device and manufacturing method of the device |
US5811321A (en) * | 1995-06-27 | 1998-09-22 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor pressure detecting device and manufacturing method of the device |
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