JPS5530811A - Single field alignment method - Google Patents

Single field alignment method

Info

Publication number
JPS5530811A
JPS5530811A JP10282578A JP10282578A JPS5530811A JP S5530811 A JPS5530811 A JP S5530811A JP 10282578 A JP10282578 A JP 10282578A JP 10282578 A JP10282578 A JP 10282578A JP S5530811 A JPS5530811 A JP S5530811A
Authority
JP
Japan
Prior art keywords
field
correcting
terms
control system
absolute dimension
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10282578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6320015B2 (enrdf_load_stackoverflow
Inventor
Sumio Hosaka
Hajime Hayakawa
Kenichi Asanami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP10282578A priority Critical patent/JPS5530811A/ja
Publication of JPS5530811A publication Critical patent/JPS5530811A/ja
Publication of JPS6320015B2 publication Critical patent/JPS6320015B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP10282578A 1978-08-25 1978-08-25 Single field alignment method Granted JPS5530811A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10282578A JPS5530811A (en) 1978-08-25 1978-08-25 Single field alignment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10282578A JPS5530811A (en) 1978-08-25 1978-08-25 Single field alignment method

Publications (2)

Publication Number Publication Date
JPS5530811A true JPS5530811A (en) 1980-03-04
JPS6320015B2 JPS6320015B2 (enrdf_load_stackoverflow) 1988-04-26

Family

ID=14337790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10282578A Granted JPS5530811A (en) 1978-08-25 1978-08-25 Single field alignment method

Country Status (1)

Country Link
JP (1) JPS5530811A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5743421A (en) * 1980-08-28 1982-03-11 Jeol Ltd Adjusting method for correction circuit of electron beam exposure device
JPS5787131A (en) * 1980-11-20 1982-05-31 Jeol Ltd Exposing method of electron beam
JP2000349021A (ja) * 1999-04-13 2000-12-15 Internatl Business Mach Corp <Ibm> 電子ビーム・リソグラフィ・システム

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5743421A (en) * 1980-08-28 1982-03-11 Jeol Ltd Adjusting method for correction circuit of electron beam exposure device
JPS5787131A (en) * 1980-11-20 1982-05-31 Jeol Ltd Exposing method of electron beam
JP2000349021A (ja) * 1999-04-13 2000-12-15 Internatl Business Mach Corp <Ibm> 電子ビーム・リソグラフィ・システム

Also Published As

Publication number Publication date
JPS6320015B2 (enrdf_load_stackoverflow) 1988-04-26

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