JPS55163881A - Manufacture of light receiving surface - Google Patents

Manufacture of light receiving surface

Info

Publication number
JPS55163881A
JPS55163881A JP7127279A JP7127279A JPS55163881A JP S55163881 A JPS55163881 A JP S55163881A JP 7127279 A JP7127279 A JP 7127279A JP 7127279 A JP7127279 A JP 7127279A JP S55163881 A JPS55163881 A JP S55163881A
Authority
JP
Japan
Prior art keywords
substrate
thin film
layer
amorphous
flatten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7127279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244695B2 (enrdf_load_stackoverflow
Inventor
Toshihisa Tsukada
Yukio Takasaki
Tadaaki Hirai
Toru Umaji
Hideaki Yamamoto
Yasuo Tanaka
Eiichi Maruyama
Yoshio Ishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7127279A priority Critical patent/JPS55163881A/ja
Priority to US06/154,999 priority patent/US4394749A/en
Priority to EP80301904A priority patent/EP0023079B1/en
Priority to CA000353538A priority patent/CA1145835A/en
Priority to DE8080301904T priority patent/DE3069268D1/de
Publication of JPS55163881A publication Critical patent/JPS55163881A/ja
Publication of JPS6244695B2 publication Critical patent/JPS6244695B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/191—Photoconductor image sensors

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP7127279A 1979-06-08 1979-06-08 Manufacture of light receiving surface Granted JPS55163881A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP7127279A JPS55163881A (en) 1979-06-08 1979-06-08 Manufacture of light receiving surface
US06/154,999 US4394749A (en) 1979-06-08 1980-05-30 Photoelectric device and method of producing the same
EP80301904A EP0023079B1 (en) 1979-06-08 1980-06-06 Method of producing a solid state photoelectric device
CA000353538A CA1145835A (en) 1979-06-08 1980-06-06 Photoelectric device and method of producing the same
DE8080301904T DE3069268D1 (en) 1979-06-08 1980-06-06 Method of producing a solid state photoelectric device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7127279A JPS55163881A (en) 1979-06-08 1979-06-08 Manufacture of light receiving surface

Publications (2)

Publication Number Publication Date
JPS55163881A true JPS55163881A (en) 1980-12-20
JPS6244695B2 JPS6244695B2 (enrdf_load_stackoverflow) 1987-09-22

Family

ID=13455909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7127279A Granted JPS55163881A (en) 1979-06-08 1979-06-08 Manufacture of light receiving surface

Country Status (1)

Country Link
JP (1) JPS55163881A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63174480A (ja) * 1987-01-14 1988-07-18 Hitachi Ltd 光電変換装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527772A (en) * 1978-08-18 1980-02-28 Matsushita Electric Ind Co Ltd Solid state pickup device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527772A (en) * 1978-08-18 1980-02-28 Matsushita Electric Ind Co Ltd Solid state pickup device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63174480A (ja) * 1987-01-14 1988-07-18 Hitachi Ltd 光電変換装置

Also Published As

Publication number Publication date
JPS6244695B2 (enrdf_load_stackoverflow) 1987-09-22

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