JPS55150254A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS55150254A
JPS55150254A JP5761179A JP5761179A JPS55150254A JP S55150254 A JPS55150254 A JP S55150254A JP 5761179 A JP5761179 A JP 5761179A JP 5761179 A JP5761179 A JP 5761179A JP S55150254 A JPS55150254 A JP S55150254A
Authority
JP
Japan
Prior art keywords
layer
polyimide
coated
opening
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5761179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138853B2 (enrdf_load_stackoverflow
Inventor
Shiro Takeda
Minoru Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5761179A priority Critical patent/JPS55150254A/ja
Priority to DE8080301413T priority patent/DE3060913D1/de
Priority to EP80301413A priority patent/EP0019391B1/en
Priority to US06/148,722 priority patent/US4347306A/en
Publication of JPS55150254A publication Critical patent/JPS55150254A/ja
Publication of JPS6138853B2 publication Critical patent/JPS6138853B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP5761179A 1979-05-12 1979-05-12 Semiconductor device Granted JPS55150254A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP5761179A JPS55150254A (en) 1979-05-12 1979-05-12 Semiconductor device
DE8080301413T DE3060913D1 (en) 1979-05-12 1980-04-30 Improvement in method of manufacturing electronic device having multilayer wiring structure
EP80301413A EP0019391B1 (en) 1979-05-12 1980-04-30 Improvement in method of manufacturing electronic device having multilayer wiring structure
US06/148,722 US4347306A (en) 1979-05-12 1980-05-12 Method of manufacturing electronic device having multilayer wiring structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5761179A JPS55150254A (en) 1979-05-12 1979-05-12 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS55150254A true JPS55150254A (en) 1980-11-22
JPS6138853B2 JPS6138853B2 (enrdf_load_stackoverflow) 1986-09-01

Family

ID=13060649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5761179A Granted JPS55150254A (en) 1979-05-12 1979-05-12 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS55150254A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57154857A (en) * 1981-03-20 1982-09-24 Hitachi Ltd Semiconductor integrated circuit device
JPS5922332A (ja) * 1982-07-28 1984-02-04 Matsushita Electronics Corp 半導体装置
JPS6195551A (ja) * 1984-10-16 1986-05-14 Matsushita Electric Ind Co Ltd 集積回路の多層配線構造体

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57154857A (en) * 1981-03-20 1982-09-24 Hitachi Ltd Semiconductor integrated circuit device
JPS5922332A (ja) * 1982-07-28 1984-02-04 Matsushita Electronics Corp 半導体装置
JPS6195551A (ja) * 1984-10-16 1986-05-14 Matsushita Electric Ind Co Ltd 集積回路の多層配線構造体

Also Published As

Publication number Publication date
JPS6138853B2 (enrdf_load_stackoverflow) 1986-09-01

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