JPS55145166A - Metallizing method with aluminum - Google Patents

Metallizing method with aluminum

Info

Publication number
JPS55145166A
JPS55145166A JP5029379A JP5029379A JPS55145166A JP S55145166 A JPS55145166 A JP S55145166A JP 5029379 A JP5029379 A JP 5029379A JP 5029379 A JP5029379 A JP 5029379A JP S55145166 A JPS55145166 A JP S55145166A
Authority
JP
Japan
Prior art keywords
wire
crucible
ingot
hardness
vapor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5029379A
Other languages
English (en)
Inventor
Hirobumi Yoshida
Tatsuo Itagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5029379A priority Critical patent/JPS55145166A/ja
Publication of JPS55145166A publication Critical patent/JPS55145166A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP5029379A 1979-04-25 1979-04-25 Metallizing method with aluminum Pending JPS55145166A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5029379A JPS55145166A (en) 1979-04-25 1979-04-25 Metallizing method with aluminum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5029379A JPS55145166A (en) 1979-04-25 1979-04-25 Metallizing method with aluminum

Publications (1)

Publication Number Publication Date
JPS55145166A true JPS55145166A (en) 1980-11-12

Family

ID=12854855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5029379A Pending JPS55145166A (en) 1979-04-25 1979-04-25 Metallizing method with aluminum

Country Status (1)

Country Link
JP (1) JPS55145166A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7265068B2 (en) 2001-08-27 2007-09-04 Hagihara Industries Inc. Light shielding sheet
WO2021203463A1 (zh) * 2020-04-09 2021-10-14 深圳市华星光电半导体显示技术有限公司 金属蒸镀设备

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7265068B2 (en) 2001-08-27 2007-09-04 Hagihara Industries Inc. Light shielding sheet
WO2021203463A1 (zh) * 2020-04-09 2021-10-14 深圳市华星光电半导体显示技术有限公司 金属蒸镀设备

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