JPS55125269A - Boat for metallizing - Google Patents

Boat for metallizing

Info

Publication number
JPS55125269A
JPS55125269A JP3349179A JP3349179A JPS55125269A JP S55125269 A JPS55125269 A JP S55125269A JP 3349179 A JP3349179 A JP 3349179A JP 3349179 A JP3349179 A JP 3349179A JP S55125269 A JPS55125269 A JP S55125269A
Authority
JP
Japan
Prior art keywords
top cover
area
opening
evaporation
intermediate plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3349179A
Other languages
Japanese (ja)
Inventor
Akira Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP3349179A priority Critical patent/JPS55125269A/en
Publication of JPS55125269A publication Critical patent/JPS55125269A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To evaporate subliming material at a constant evaporation speed at all times, by setting the ratio of the total sum of the area of the opening made in the intermediate plate for intercepting the lumps evaporated from a lapped evaporation boat to the area of the opening made in the top cover at a specific value. CONSTITUTION:A lapped evaporation boat is composed of a boat body 1, a top cover 2, and an intermediate plate 3. The ratio of the total sum A of the area of plural openings 3b made in the intermediate plate 3 to the area B of the opening 2a made in the top cover 2 is set at 3/4.A<=B. As a result, the opening 2a of the top cover 2 is hardly intercepted during evaporation with evaporated material including lumps, hence metallizing speed to a substrate to be metallized is kept constant and stabilized, consequently evaporated coating of uniform quality is formed on the metallizing substrate.
JP3349179A 1979-03-22 1979-03-22 Boat for metallizing Pending JPS55125269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3349179A JPS55125269A (en) 1979-03-22 1979-03-22 Boat for metallizing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3349179A JPS55125269A (en) 1979-03-22 1979-03-22 Boat for metallizing

Publications (1)

Publication Number Publication Date
JPS55125269A true JPS55125269A (en) 1980-09-26

Family

ID=12388020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3349179A Pending JPS55125269A (en) 1979-03-22 1979-03-22 Boat for metallizing

Country Status (1)

Country Link
JP (1) JPS55125269A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004211110A (en) * 2002-12-26 2004-07-29 Fuji Electric Holdings Co Ltd Crucible for vapor deposition, vapor deposition system, and vapor deposition method
EP2270251A1 (en) * 2009-07-02 2011-01-05 Mitsubishi Heavy Industries, Ltd. Vacuum vapor deposition apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004211110A (en) * 2002-12-26 2004-07-29 Fuji Electric Holdings Co Ltd Crucible for vapor deposition, vapor deposition system, and vapor deposition method
EP2270251A1 (en) * 2009-07-02 2011-01-05 Mitsubishi Heavy Industries, Ltd. Vacuum vapor deposition apparatus
CN101942639A (en) * 2009-07-02 2011-01-12 三菱重工业株式会社 Vacuum vapor deposition equipment
US9663853B2 (en) 2009-07-02 2017-05-30 Mitsubishi Heavy Industries, Ltd. Vacuum vapor deposition apparatus

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