JPS533975A - Production of magnetic recording material by evaporation of inclinated incidence angle - Google Patents

Production of magnetic recording material by evaporation of inclinated incidence angle

Info

Publication number
JPS533975A
JPS533975A JP7776876A JP7776876A JPS533975A JP S533975 A JPS533975 A JP S533975A JP 7776876 A JP7776876 A JP 7776876A JP 7776876 A JP7776876 A JP 7776876A JP S533975 A JPS533975 A JP S533975A
Authority
JP
Japan
Prior art keywords
evaporation
inclinated
production
magnetic recording
recording material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7776876A
Other languages
Japanese (ja)
Inventor
Kyuzo Nakamura
Yoshifumi Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP7776876A priority Critical patent/JPS533975A/en
Publication of JPS533975A publication Critical patent/JPS533975A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To make the direction of growth of depositing particles uniform and to improve magnetic characteristics by evaporation through a evaporated aprticle path limitted by control plates set beteeen a non-magnetic base plate such as tape etc. and a magnetic material evaporation source.
JP7776876A 1976-07-02 1976-07-02 Production of magnetic recording material by evaporation of inclinated incidence angle Pending JPS533975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7776876A JPS533975A (en) 1976-07-02 1976-07-02 Production of magnetic recording material by evaporation of inclinated incidence angle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7776876A JPS533975A (en) 1976-07-02 1976-07-02 Production of magnetic recording material by evaporation of inclinated incidence angle

Publications (1)

Publication Number Publication Date
JPS533975A true JPS533975A (en) 1978-01-14

Family

ID=13643113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7776876A Pending JPS533975A (en) 1976-07-02 1976-07-02 Production of magnetic recording material by evaporation of inclinated incidence angle

Country Status (1)

Country Link
JP (1) JPS533975A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131134A (en) * 1988-11-12 1990-05-18 Shinku Yakin Kk Producing equipment of ultrafine organic substance particle
EP1136586A1 (en) * 2000-03-18 2001-09-26 Aguasolar Advances Technologies SA Evaporation apparatus, particularly adapted to an evaporation plant for forming thin layers on a substrate
JPWO2009041239A1 (en) * 2007-09-26 2011-01-20 国立大学法人北海道大学 Nickel thin film and method for forming the same, ferromagnetic nano-junction device and method for manufacturing the same, and thin metal wire and method for forming the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02131134A (en) * 1988-11-12 1990-05-18 Shinku Yakin Kk Producing equipment of ultrafine organic substance particle
EP1136586A1 (en) * 2000-03-18 2001-09-26 Aguasolar Advances Technologies SA Evaporation apparatus, particularly adapted to an evaporation plant for forming thin layers on a substrate
JPWO2009041239A1 (en) * 2007-09-26 2011-01-20 国立大学法人北海道大学 Nickel thin film and method for forming the same, ferromagnetic nano-junction device and method for manufacturing the same, and thin metal wire and method for forming the same

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