JPS55117257A - Fabrication of semiconductor device - Google Patents

Fabrication of semiconductor device

Info

Publication number
JPS55117257A
JPS55117257A JP2415379A JP2415379A JPS55117257A JP S55117257 A JPS55117257 A JP S55117257A JP 2415379 A JP2415379 A JP 2415379A JP 2415379 A JP2415379 A JP 2415379A JP S55117257 A JPS55117257 A JP S55117257A
Authority
JP
Japan
Prior art keywords
film
semiconductor device
recess
substrate
cvd process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2415379A
Other languages
English (en)
Inventor
Atsuhiko Menju
Mamoru Kanazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP2415379A priority Critical patent/JPS55117257A/ja
Publication of JPS55117257A publication Critical patent/JPS55117257A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP2415379A 1979-03-02 1979-03-02 Fabrication of semiconductor device Pending JPS55117257A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2415379A JPS55117257A (en) 1979-03-02 1979-03-02 Fabrication of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2415379A JPS55117257A (en) 1979-03-02 1979-03-02 Fabrication of semiconductor device

Publications (1)

Publication Number Publication Date
JPS55117257A true JPS55117257A (en) 1980-09-09

Family

ID=12130388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2415379A Pending JPS55117257A (en) 1979-03-02 1979-03-02 Fabrication of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55117257A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009100697A (ja) * 2007-10-24 2009-05-14 Sumitomo Chemical Co Ltd 保温カーテンおよび農園芸用ハウス

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009100697A (ja) * 2007-10-24 2009-05-14 Sumitomo Chemical Co Ltd 保温カーテンおよび農園芸用ハウス

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