JPS5492527A - Manufacture of metal foil having apertures - Google Patents

Manufacture of metal foil having apertures

Info

Publication number
JPS5492527A
JPS5492527A JP16063877A JP16063877A JPS5492527A JP S5492527 A JPS5492527 A JP S5492527A JP 16063877 A JP16063877 A JP 16063877A JP 16063877 A JP16063877 A JP 16063877A JP S5492527 A JPS5492527 A JP S5492527A
Authority
JP
Japan
Prior art keywords
substrate
pattern
metal foil
layer
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16063877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6156317B2 (enrdf_load_stackoverflow
Inventor
Nobuyuki Kishi
Akira Kaneki
Norihiko Tsukui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP16063877A priority Critical patent/JPS5492527A/ja
Publication of JPS5492527A publication Critical patent/JPS5492527A/ja
Publication of JPS6156317B2 publication Critical patent/JPS6156317B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005—Separation of the coating from the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Physical Vapour Deposition (AREA)
JP16063877A 1977-12-28 1977-12-28 Manufacture of metal foil having apertures Granted JPS5492527A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16063877A JPS5492527A (en) 1977-12-28 1977-12-28 Manufacture of metal foil having apertures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16063877A JPS5492527A (en) 1977-12-28 1977-12-28 Manufacture of metal foil having apertures

Publications (2)

Publication Number Publication Date
JPS5492527A true JPS5492527A (en) 1979-07-21
JPS6156317B2 JPS6156317B2 (enrdf_load_stackoverflow) 1986-12-02

Family

ID=15719249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16063877A Granted JPS5492527A (en) 1977-12-28 1977-12-28 Manufacture of metal foil having apertures

Country Status (1)

Country Link
JP (1) JPS5492527A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124600A (ja) * 1984-11-21 1986-06-12 Hitachi Cable Ltd フレ−ムパタ−ンの形成方法
JPH0660804A (ja) * 1992-04-14 1994-03-04 Micron Technol Inc 自己整合高エネルギー融蝕により製造される電界放出ディスプレイ用スペーサー
JP2005340138A (ja) * 2004-05-31 2005-12-08 Canon Inc マスク構造体及びその製造方法
WO2013058289A1 (ja) * 2011-10-17 2013-04-25 株式会社 ベアック 孔開き金属箔の製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124600A (ja) * 1984-11-21 1986-06-12 Hitachi Cable Ltd フレ−ムパタ−ンの形成方法
JPH0660804A (ja) * 1992-04-14 1994-03-04 Micron Technol Inc 自己整合高エネルギー融蝕により製造される電界放出ディスプレイ用スペーサー
JP2005340138A (ja) * 2004-05-31 2005-12-08 Canon Inc マスク構造体及びその製造方法
WO2013058289A1 (ja) * 2011-10-17 2013-04-25 株式会社 ベアック 孔開き金属箔の製造方法
WO2013057772A1 (ja) * 2011-10-17 2013-04-25 株式会社 ベアック 孔開き金属箔の製造方法

Also Published As

Publication number Publication date
JPS6156317B2 (enrdf_load_stackoverflow) 1986-12-02

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